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Journal: Micromachines, 2019
Volume: 10
Number: 792

Article: A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor
Authors: by Yi Chiu, Hsuan-Wu Liu and Hao-Chiao Hong
Link: https://www.mdpi.com/2072-666X/10/11/792

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