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Journal: Materials, 2024
Volume: 17
Number: 4891
Article:
Micromechanical Characterization of AlCu Films for MEMS Using Instrumented Indentation Method
Authors:
by
Dongyang Hou, Yuhang Ouyang, Zhen Zhou, Fang Dong and Sheng Liu
Link:
https://www.mdpi.com/1996-1944/17/19/4891
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