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Journal: MaterialsVolume: 17Number: 4891
Article: Micromechanical Characterization of AlCu Films for MEMS Using Instrumented Indentation Method
  • Authors:
  • Dongyang Hou1,
  • Yuhang Ouyang1 and
  • Zhen Zhou1
  • et al.
Link: https://www.mdpi.com/1996-1944/17/19/4891

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