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Journal: MaterialsVolume: 16Number: 2068
Article: Microstructure Evolution with Rapid Thermal Annealing Time in (001)-Oriented Piezoelectric PZT Films Integrated on (111) Si
- Authors:
- Yingying Wang1,2,
- Hanfei Zhu2 and
- Yinxiu Xue2
- et al.
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