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Journal: Materials, 2023
Volume: 16
Number: 2068
Article:
Microstructure Evolution with Rapid Thermal Annealing Time in (001)-Oriented Piezoelectric PZT Films Integrated on (111) Si
Authors:
by
Yingying Wang, Hanfei Zhu, Yinxiu Xue, Peng Yan and Jun Ouyang
Link:
https://www.mdpi.com/1996-1944/16/5/2068
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