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Journal: Materials, 2023
Volume: 16
Number: 4688
4688
Article: Area-Selective Atomic Layer Deposition of ZnO on Si\SiO₂ Modified with Tris(dimethylamino)methylsilane
Authors: by Behnam Moeini, Tahereh G. Avval, Hidde H. Brongersma, Stanislav Průša, Pavel Bábík, Elena Vaníčková, Brian R. Strohmeier, David S. Bell, Dennis Eggett, Steven M. George and Matthew R. Linford
Link: https://www.mdpi.com/1996-1944/16/13/4688

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