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Journal: Materials, 2022
Volume: 15
Number: 2102

Article: Influence of Thin Film Deposition on AFM Cantilever Tips in Adhesion and Young’s Modulus of MEMS Surfaces
Authors: by Pedram Heidari, Majid Salehi, Behrooz Ruhani, Violeta Purcar and Simona Căprărescu
Link: https://www.mdpi.com/1996-1944/15/6/2102

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