Zhang, Q.; Chen, M.; Liu, H.; Zhao, X.; Qin, X.; Wang, F.; Tang, Y.; Yeoh, K.H.; Chew, K.-H.; Sun, X.
Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices. Materials 2021, 14, 6437.
https://doi.org/10.3390/ma14216437
AMA Style
Zhang Q, Chen M, Liu H, Zhao X, Qin X, Wang F, Tang Y, Yeoh KH, Chew K-H, Sun X.
Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices. Materials. 2021; 14(21):6437.
https://doi.org/10.3390/ma14216437
Chicago/Turabian Style
Zhang, Qiaozhen, Mingzhu Chen, Huiling Liu, Xiangyong Zhao, Xiaomei Qin, Feifei Wang, Yanxue Tang, Keat Hoe Yeoh, Khian-Hooi Chew, and Xiaojuan Sun.
2021. "Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices" Materials 14, no. 21: 6437.
https://doi.org/10.3390/ma14216437
APA Style
Zhang, Q., Chen, M., Liu, H., Zhao, X., Qin, X., Wang, F., Tang, Y., Yeoh, K. H., Chew, K.-H., & Sun, X.
(2021). Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices. Materials, 14(21), 6437.
https://doi.org/10.3390/ma14216437