Due to its simple mechanical structure and high motion stability, the H-shaped platform has been increasingly widely used in precision measuring, numerical control machining and semiconductor packaging equipment, etc. The H-shaped platform is normally driven by multiple (three) permanent magnet synchronous linear motors. The main challenges for H-shaped platform-control include synchronous control between the two linear motors in the Y
direction as well as total positioning error of the platform mover, a combination of position deviation in X
directions. To deal with the above challenges, this paper proposes a control strategy based on the inverse system method through state feedback and dynamic decoupling of the thrust force. First, mechanical dynamics equations have been deduced through the analysis of system coupling based on the platform structure. Second, the mathematical model of the linear motors and the relevant coordinate transformation between dq
-axis currents and ABC-phase currents are analyzed. Third, after the main concept of inverse system method being explained, the inverse system model of the platform control system has been designed after defining relevant system variables. Inverse system model compensates the original nonlinear coupled system into pseudo-linear decoupled linear system, for which typical linear control methods, like PID, can be adopted to control the system. The simulation model of the control system is built in MATLAB/Simulink and the simulation result shows that the designed control system has both small synchronous deviation and small total trajectory tracking error. Furthermore, the control program has been run on NI controller for both fixed-loop-time and free-loop-time modes, and the test result shows that the average loop computation time needed is rather small, which makes it suitable for real industrial applications. Overall, it proves that the proposed new control strategy can be used in industrial applications that have high-precision and high real-time performance requirements.
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