Thin Film on CMOS Active Pixel Sensor for Space Applications
Abstract
:1. Introduction
2. Results and Discussion
2.1. CMOS circuit architecture
2.2. Thin Film on CMOS (TFC) Technology
3. Results
3.1. Characterization of the CMOS circuitry without TFC layer
3.2. Measurements of the TFC layer
3.3. Irradiation tests
4. Conclusions
Acknowledgments
References
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TFC Layer Thickness [μm] | Star Magnitude 1 | Star Magnitude 6 | Saturation Charge [e-] | Capacitance Linearity [%] | ||||
---|---|---|---|---|---|---|---|---|
Signal @ 0.1s integr. [e-] | Noise @ 0.1s integr. [e-] | S/N at 10 bit A/D [dB] | Signal @ 0.1s integr. [e-] | Noise @ 0.1s integr. [e-] | S/N at 10 bit A/D [dB] | |||
0.5 | 121200 | 498 | 47 | 1882 | 358 | 10 | 500000 | 99.2 |
1.0 | 143960 | 426 | 50 | 1610 | 199 | 13 | 272232 | 98.6 |
1.5 | 155220 | 418 | 50 | 1713 | 147 | 19 | 197109 | 98.1 |
1.8 | 159950 | 418 | 50 | 1759 | 130 | 19 | 172018 | 97.8 |
2.0 | 162400 | 419 | 50 | 1784 | 122 | 19 | 159575 | 97.6 |
2.2 | 164550 | 420 | 50 | 1807 | 115 | 19 | 149254 | 97.5 |
N° | Characteristics | Limits | Unit | ||||||
---|---|---|---|---|---|---|---|---|---|
Min | Typ | Max | |||||||
1. | Signal Generation | integrating | - | ||||||
2. | Shutter | full field synchronous | - | ||||||
3. | Pixel Access | XY random pixel access | - | ||||||
4. | Pixel Signal Read-Out | multiple non-destructive | - | ||||||
5. | Power Supply | single voltage supply (+5V) | - | ||||||
6. | Array Size | 640 × 640 | pixel | ||||||
7. | Pixel Pitch | 20 × 20 | μm | ||||||
8. | Fill Factor | 85 | 100 | % | |||||
9. | Full Well Capacity | 112000 | 140000 | e- | |||||
10. | Sensitivity | 10 (dynamic: 1:1000) | |||||||
11. | Exposure Time | 0.1 | 1000 | ms | |||||
12. | Non Linearity up to Full Well | 5 | 10 | % | |||||
13. | Dark Signal @ 293°K | 80 | pA/cm2 | ||||||
14. | DSNU (1σ Full Well ) | 5 * | % | ||||||
15. | PRNU (1σ 90% Full Well ) | 9 * | % | ||||||
16. | Power Consumption | 850 | mW | ||||||
17. | Signal Frequency | 5 | 10 | MHz | |||||
* With CDS and DDS |
© 2008 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland. This article is an open-access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
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Schulze Spuentrup, J.D.; Burghartz, J.N.; Graf, H.-G.; Harendt, C.; Hutter, F.; Nicke, M.; Schmidt, U.; Schubert, M.; Sterzel, J. Thin Film on CMOS Active Pixel Sensor for Space Applications. Sensors 2008, 8, 6340-6354. https://doi.org/10.3390/s8106340
Schulze Spuentrup JD, Burghartz JN, Graf H-G, Harendt C, Hutter F, Nicke M, Schmidt U, Schubert M, Sterzel J. Thin Film on CMOS Active Pixel Sensor for Space Applications. Sensors. 2008; 8(10):6340-6354. https://doi.org/10.3390/s8106340
Chicago/Turabian StyleSchulze Spuentrup, Jan Dirk, Joachim N. Burghartz, Heinz-Gerd Graf, Christine Harendt, Franz Hutter, Markus Nicke, Uwe Schmidt, Markus Schubert, and Juergen Sterzel. 2008. "Thin Film on CMOS Active Pixel Sensor for Space Applications" Sensors 8, no. 10: 6340-6354. https://doi.org/10.3390/s8106340
APA StyleSchulze Spuentrup, J. D., Burghartz, J. N., Graf, H.-G., Harendt, C., Hutter, F., Nicke, M., Schmidt, U., Schubert, M., & Sterzel, J. (2008). Thin Film on CMOS Active Pixel Sensor for Space Applications. Sensors, 8(10), 6340-6354. https://doi.org/10.3390/s8106340