Qiao, W.; Gao, Z.; Yuan, Q.; Chen, L.; Guo, Z.; Huo, X.; Wang, Q.
Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry. Sensors 2025, 25, 4085.
https://doi.org/10.3390/s25134085
AMA Style
Qiao W, Gao Z, Yuan Q, Chen L, Guo Z, Huo X, Wang Q.
Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry. Sensors. 2025; 25(13):4085.
https://doi.org/10.3390/s25134085
Chicago/Turabian Style
Qiao, Wenyou, Zhishan Gao, Qun Yuan, Lu Chen, Zhenyan Guo, Xiao Huo, and Qian Wang.
2025. "Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry" Sensors 25, no. 13: 4085.
https://doi.org/10.3390/s25134085
APA Style
Qiao, W., Gao, Z., Yuan, Q., Chen, L., Guo, Z., Huo, X., & Wang, Q.
(2025). Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry. Sensors, 25(13), 4085.
https://doi.org/10.3390/s25134085
