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Journal: Sensors, 2024
Volume: 24
Number: 2495
Article:
MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA
Authors:
by
Zheng Lu, Hao Jia, Ding Wang and Haitao Yu
Link:
https://www.mdpi.com/1424-8220/24/8/2495
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