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Journal: SensorsVolume: 24Number: 5157
Article: Hybrid Bright-Dark-Field Microscopic Fringe Projection System for Cu Pillar Height Measurement in Wafer-Level Package
- Authors:
- Dezhao Wang1,2,
- Weihu Zhou1,2,3,* and
- Zili Zhang2,3,*
- et al.
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