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Journal: Sensors, 2022
Volume: 22
Number: 685
685
Article: Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors
Authors: by Simon Gassner, Rainer Schaller, Matthias Eberl, Carsten von Koblinski, Simon Essing, Mohammadamir Ghaderi, Katrin Schmitt and Jürgen Wöllenstein
Link: https://www.mdpi.com/1424-8220/22/2/685

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