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Journal: SensorsVolume: 21Number: 2566
Article: Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime
  • Authors:
  • Boris A. Boom1,*,
  • Alessandro Bertolini1 and
  • Eric Hennes1
  • et al.
Link: https://www.mdpi.com/1424-8220/21/7/2566

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