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Journal: Sensors, 2021
Volume: 21
Number: 2566
Article:
Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime
Authors:
by
Boris A. Boom, Alessandro Bertolini, Eric Hennes and Johannes F. J. van den Brand
Link:
https://www.mdpi.com/1424-8220/21/7/2566
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