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Journal: Sensors, 2021
Volume: 21
Number: 379
Article:
Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor
Authors:
by
Baohua Tian, Haiping Shang, Lihuan Zhao, Dahai Wang, Yang Liu and Weibing Wang
Link:
https://www.mdpi.com/1424-8220/21/2/379
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