Chu, S.-Y.; Shen, M.-X.; Yeh, T.-H.; Chen, C.-H.; Lee, C.-T.; Lee, H.-Y.
Investigation of Ga2O3-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System. Sensors 2020, 20, 6159.
https://doi.org/10.3390/s20216159
AMA Style
Chu S-Y, Shen M-X, Yeh T-H, Chen C-H, Lee C-T, Lee H-Y.
Investigation of Ga2O3-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System. Sensors. 2020; 20(21):6159.
https://doi.org/10.3390/s20216159
Chicago/Turabian Style
Chu, Shao-Yu, Meng-Xian Shen, Tsung-Han Yeh, Chia-Hsun Chen, Ching-Ting Lee, and Hsin-Ying Lee.
2020. "Investigation of Ga2O3-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System" Sensors 20, no. 21: 6159.
https://doi.org/10.3390/s20216159
APA Style
Chu, S.-Y., Shen, M.-X., Yeh, T.-H., Chen, C.-H., Lee, C.-T., & Lee, H.-Y.
(2020). Investigation of Ga2O3-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System. Sensors, 20(21), 6159.
https://doi.org/10.3390/s20216159