Order Article Reprints
Journal: Sensors, 2020
Volume: 20
Number: 6037
Article:
Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching
Authors:
by
Diana Mata-Hernandez, Daniel Fernández, Saoni Banerji and Jordi Madrenas
Link:
https://www.mdpi.com/1424-8220/20/21/6037
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