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Journal: Sensors, 2020
Volume: 20
Number: 6037

Article: Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching
Authors: by Diana Mata-Hernandez, Daniel Fernández, Saoni Banerji and Jordi Madrenas
Link: https://www.mdpi.com/1424-8220/20/21/6037

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