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Open AccessArticle

Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry

3D Optical Metrology Laboratory, Department of Photonic Engineering, Chosun University, 309 Pilmun-daero, Dong-gu, Gwangju 61452, Korea
Author to whom correspondence should be addressed.
Sensors 2019, 19(23), 5094;
Received: 26 October 2019 / Revised: 14 November 2019 / Accepted: 19 November 2019 / Published: 21 November 2019
(This article belongs to the Special Issue Sensors for Precision Dimensional Metrology)
In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measure the phase, but also overcome the 2π-ambiguity problem of typical phase-shifting interferometry. The rough surface profile can be calculated by the visibility of the interference fringe and can compensate for the height discontinuity by phase jumps occurring in a fine height map. An inclined plane mirror and a step height specimen with 9 μm were used for the validation of capability of measuring continuously smooth surface and large step heights. The measurement results were in good agreement with the results of typical two-wavelength interferometry. View Full-Text
Keywords: spatial phase shifting; one shot imaging; two-wavelength interferometry; polarization pixelated camera spatial phase shifting; one shot imaging; two-wavelength interferometry; polarization pixelated camera
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Jeon, J.W.; Joo, K.-N. Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry. Sensors 2019, 19, 5094.

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