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Open AccessArticle

Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform

1
Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany
2
Fakultät für Elektrotechnik und Informationstechnik, Zentrum für Mikrotechnologien Chemnitz, Technische Universität Chemnitz, Reichenhainer Straße 70, 09126 Chemnitz, Germany
3
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(20), 4529; https://doi.org/10.3390/s19204529
Received: 26 September 2019 / Revised: 15 October 2019 / Accepted: 15 October 2019 / Published: 18 October 2019
(This article belongs to the Special Issue Sensors for Precision Dimensional Metrology)
Nanomechanical characterization of vertically aligned micro- and nanopillars plays an important role in quality control of pillar-based sensors and devices. A microelectromechanical system based scanning probe microscope (MEMS-SPM) has been developed for quantitative measurement of the bending stiffness of micro- and nanopillars with high aspect ratios. The MEMS-SPM exhibits large in-plane displacement with subnanometric resolution and medium probing force beyond 100 micro-Newtons. A proof-of-principle experimental setup using an MEMS-SPM prototype has been built to experimentally determine the in-plane bending stiffness of silicon nanopillars with an aspect ratio higher than 10. Comparison between the experimental results and the analytical and FEM evaluation has been demonstrated. Measurement uncertainty analysis indicates that this nano-bending system is able to determine the pillar bending stiffness with an uncertainty better than 5%, provided that the pillars’ stiffness is close to the suspending stiffness of the MEMS-SPM. The MEMS-SPM measurement setup is capable of on-chip quantitative nanomechanical characterization of pillar-like nano-objects fabricated out of different materials. View Full-Text
Keywords: nanomechanical characterization; nanoindentation; nanomechanical properties; nanopillars; microelectromechanical system; scanning probe microscopy nanomechanical characterization; nanoindentation; nanomechanical properties; nanopillars; microelectromechanical system; scanning probe microscopy
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Li, Z.; Gao, S.; Brand, U.; Hiller, K.; Hahn, S.; Hamdana, G.; Peiner, E.; Wolff, H.; Bergmann, D. Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform. Sensors 2019, 19, 4529.

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