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Journal: Sensors, 2019
Volume: 19
Number: 3770
Article:
On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
Authors:
by
Binh Duc Truong, Cuong Phu Le and Einar Halvorsen
Link:
https://www.mdpi.com/1424-8220/19/17/3770
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