On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
Faculty of Technology, Natural Sciences and Maritime Sciences, University of South-Eastern Norway, Campus Vestfold, Raveien 215, 3184 Borre, Norway
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Sensors 2019, 19(17), 3770; https://doi.org/10.3390/s19173770
Received: 1 August 2019
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Revised: 26 August 2019
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Accepted: 27 August 2019
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Published: 30 August 2019
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers.
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MDPI and ACS Style
Truong, B.D.; Le, C.P.; Halvorsen, E. On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers. Sensors 2019, 19, 3770. https://doi.org/10.3390/s19173770
AMA Style
Truong BD, Le CP, Halvorsen E. On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers. Sensors. 2019; 19(17):3770. https://doi.org/10.3390/s19173770
Chicago/Turabian StyleTruong, Binh D., Cuong P. Le, and Einar Halvorsen. 2019. "On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers" Sensors 19, no. 17: 3770. https://doi.org/10.3390/s19173770
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