Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires
Microelectronics, Materials Center Leoben Forschung GmbH, 8700 Leoben, Austria
ams AG, 8141 Premstätten, Austria
Author to whom correspondence should be addressed.
Received: 22 February 2019 / Revised: 13 June 2019 / Accepted: 8 July 2019 / Published: 10 July 2019
PDF [3251 KB, uploaded 12 July 2019]
Metal oxide multi-nanowire-based chemical gas sensors were manufactured by a fast and simple transfer printing technology. A two-step method employing spray pyrolysis deposition and a thermal annealing process was used for SnO
nanowires fabrication. A polydimethylsiloxane stamp was used to transfer the SnO
nanowires on two different gas sensing devices—Si-based substrates and microhotplate-based platform chips. Both contained a metallic inter-digital electrode structure (IDES), on which the SnO
nanowires were transferred for realization of multi-NW gas sensor devices. The gas sensor devices show a very high response towards H
S down to the 10 ppb range. Furthermore, a good response towards CO has been achieved, where in particular the microhotplate-based devices exhibit almost no cross sensitivity to humidity.
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Sosada-Ludwikowska, F.; Wimmer-Teubenbacher, R.; Sagmeister, M.; Köck, A. Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires. Sensors 2019, 19, 3049.
Sosada-Ludwikowska F, Wimmer-Teubenbacher R, Sagmeister M, Köck A. Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires. Sensors. 2019; 19(14):3049.
Sosada-Ludwikowska, Florentyna; Wimmer-Teubenbacher, Robert; Sagmeister, Martin; Köck, Anton. 2019. "Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires." Sensors 19, no. 14: 3049.
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