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Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires

1
Microelectronics, Materials Center Leoben Forschung GmbH, 8700 Leoben, Austria
2
ams AG, 8141 Premstätten, Austria
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(14), 3049; https://doi.org/10.3390/s19143049
Received: 22 February 2019 / Revised: 13 June 2019 / Accepted: 8 July 2019 / Published: 10 July 2019
(This article belongs to the Special Issue Eurosensors 2018 Selected Papers)
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Abstract

Metal oxide multi-nanowire-based chemical gas sensors were manufactured by a fast and simple transfer printing technology. A two-step method employing spray pyrolysis deposition and a thermal annealing process was used for SnO 2 nanowires fabrication. A polydimethylsiloxane stamp was used to transfer the SnO 2 nanowires on two different gas sensing devices—Si-based substrates and microhotplate-based platform chips. Both contained a metallic inter-digital electrode structure (IDES), on which the SnO 2 nanowires were transferred for realization of multi-NW gas sensor devices. The gas sensor devices show a very high response towards H 2 S down to the 10 ppb range. Furthermore, a good response towards CO has been achieved, where in particular the microhotplate-based devices exhibit almost no cross sensitivity to humidity. View Full-Text
Keywords: SnO2; nanowires; transfer printing; PDMS; gas sensors; metal oxides SnO2; nanowires; transfer printing; PDMS; gas sensors; metal oxides
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Sosada-Ludwikowska, F.; Wimmer-Teubenbacher, R.; Sagmeister, M.; Köck, A. Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires. Sensors 2019, 19, 3049.

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