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Journal: Sensors, 2018
Volume: 18
Number: 2494
2494
Article: A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection
Authors: Xiaoqing Shi, Yulan Lu, Bo Xie, Yadong Li, Junbo Wang, Deyong Chen and Jian Chen
Link: https://www.mdpi.com/1424-8220/18/8/2494

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