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Journal: Sensors, 2018
Volume: 18
Number: 2111

Article: Experiments on MEMS Integration in 0.25 μm CMOS Process
Authors: by Piotr Michalik, Daniel Fernández, Matthias Wietstruck, Mehmet Kaynak and Jordi Madrenas
Link: https://www.mdpi.com/1424-8220/18/7/2111

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