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Open AccessArticle

The Development of Love Wave-Based Humidity Sensors Incorporating Multiple Layers

Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
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Author to whom correspondence should be addressed.
Academic Editor: Michael Tiemann
Sensors 2015, 15(4), 8615-8623; https://doi.org/10.3390/s150408615
Received: 5 February 2015 / Revised: 23 March 2015 / Accepted: 30 March 2015 / Published: 14 April 2015
(This article belongs to the Special Issue Gas Sensors—Designs and Applications)
A Love wave humidity sensor is developed by using a multilayer structure consisting of PVA/SiO2 layers on an ST-90°X quartz substrate. The theoretical result shows that the sensor with such a two-layer structure can achieve a higher sensitivity and a smaller loss than the structures with a single polymer layer. Comparative experiments are performed for the sensor incorporating PVA/SiO2 layers and the sensor incorporating a PVA layer. The experimental results agree well with the theoretical predication. View Full-Text
Keywords: Love wave; humidity sensor; viscoelastic; multiple layers Love wave; humidity sensor; viscoelastic; multiple layers
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MDPI and ACS Style

Wang, L.; Liu, J.; He, S. The Development of Love Wave-Based Humidity Sensors Incorporating Multiple Layers. Sensors 2015, 15, 8615-8623.

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