Li, C.; Li, M.; Shi, J.; Huang, H.; Li, Z.
Evaluation and Characterization of High-Uniformity SiNx Thin Film with Controllable Refractive Index by Home-Made Cat-CVD Based on Orthogonal Experiments. Molecules 2025, 30, 1091.
https://doi.org/10.3390/molecules30051091
AMA Style
Li C, Li M, Shi J, Huang H, Li Z.
Evaluation and Characterization of High-Uniformity SiNx Thin Film with Controllable Refractive Index by Home-Made Cat-CVD Based on Orthogonal Experiments. Molecules. 2025; 30(5):1091.
https://doi.org/10.3390/molecules30051091
Chicago/Turabian Style
Li, Caifang, Minghui Li, Jinsong Shi, Haibin Huang, and Zhimei Li.
2025. "Evaluation and Characterization of High-Uniformity SiNx Thin Film with Controllable Refractive Index by Home-Made Cat-CVD Based on Orthogonal Experiments" Molecules 30, no. 5: 1091.
https://doi.org/10.3390/molecules30051091
APA Style
Li, C., Li, M., Shi, J., Huang, H., & Li, Z.
(2025). Evaluation and Characterization of High-Uniformity SiNx Thin Film with Controllable Refractive Index by Home-Made Cat-CVD Based on Orthogonal Experiments. Molecules, 30(5), 1091.
https://doi.org/10.3390/molecules30051091