Special Issue "Modeling, Testing and Reliability Issues in MEMS Engineering"

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A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (31 December 2008)

Special Issue Editor

Guest Editor
Dr. Stefano Mariani
Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy
Website: http://www.dica.polimi.it/en/
E-Mail: stefano.mariani@polimi.it
Phone: +39 02 2399 4279
Fax: +39 02 2399 4300
Interests: MEMS; structural sensors; kalman filtering

Special Issue Information

Dear Colleagues,

Micro-electro-mechanical-systems (MEMS) are devices on a millimeter scale, with micro-resolution. Each MEMS is given by the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate, obtained through micro-fabrication technology.

MEMS are often designed to work in mobile devices, and are therefore subject during their life to accidental mechanical loadings. Because of the MEMS size, multi-scale analyses are sometimes required in reliability analysis. Furthermore, also thermal, electrical, magnetic and environmental actions should be accounted for in a fully coupled multi-physics modelling of the devices.

As for packaging, some technical problems caused to the devices are not yet thoroughly understood and solved. Since standards do not necessarily apply to packaged MEMS, new knowledge-based testing methodologies need to be proposed.

The aim of this special issue is to collect high quality research results on all these aspects of MEMS engineering.

Dr. Stefano Mariani
Guest Editor

Keywords

  • micro-electro-mechanical-systems
  • multi-scale and multi-physics modelling
  • micro-fluidics
  • failure analysis
  • reliability analysis
  • package engineering

Related Special Issue

Published Papers (32 papers)

by , ,  and
Sensors 2007, 7(5), 697-707; doi:10.3390/s7050697
Received: 2 May 2007; Accepted: 21 May 2007 / Published: 24 May 2007
Show/Hide Abstract | Cited by 3 | PDF Full-text (774 KB) | HTML Full-text | XML Full-text

by ,  and
Sensors 2007, 7(5), 760-796; doi:10.3390/s7050760
Received: 13 April 2007; Accepted: 21 May 2007 / Published: 31 May 2007
Show/Hide Abstract | Cited by 22 | PDF Full-text (605 KB) | HTML Full-text | XML Full-text

by  and
Sensors 2007, 7(7), 1069-1090; doi:10.3390/s7071069
Received: 18 May 2007; Accepted: 27 June 2007 / Published: 28 June 2007
Show/Hide Abstract | Cited by 13 | PDF Full-text (757 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2007, 7(8), 1387-1398; doi:10.3390/s7081387
Received: 21 June 2007; Accepted: 30 July 2007 / Published: 31 July 2007
Show/Hide Abstract | Cited by 17 | PDF Full-text (7464 KB) | HTML Full-text | XML Full-text

by ,  and
Sensors 2007, 7(8), 1399-1414; doi:10.3390/s7081399
Received: 27 June 2007; Accepted: 2 August 2007 / Published: 3 August 2007
Show/Hide Abstract | Cited by 4 | PDF Full-text (1542 KB) | HTML Full-text | XML Full-text

by , , , , ,  and
Sensors 2007, 7(8), 1643-1654; doi:10.3390/s7081643
Received: 11 June 2007; Accepted: 24 August 2007 / Published: 27 August 2007
Show/Hide Abstract | Cited by 9 | PDF Full-text (1374 KB) | HTML Full-text | XML Full-text

by  and
Sensors 2007, 7(9), 1720-1730; doi:10.3390/s7091720
Received: 19 July 2007; Accepted: 31 August 2007 / Published: 3 September 2007
Show/Hide Abstract | Cited by 3 | PDF Full-text (758 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2007, 7(9), 1817-1833; doi:10.3390/s7081817
Received: 30 August 2007; Accepted: 6 September 2007 / Published: 7 September 2007
Show/Hide Abstract | Cited by 26 | PDF Full-text (1199 KB) | HTML Full-text | XML Full-text

by  and
Sensors 2007, 7(9), 1887-1900; doi:10.3390/s7091887
Received: 6 August 2007; Accepted: 10 September 2007 / Published: 11 September 2007
Show/Hide Abstract | Cited by 13 | PDF Full-text (365 KB) | HTML Full-text | XML Full-text

by ,  and
Sensors 2007, 7(10), 2174-2182; doi:10.3390/s7102174
Received: 18 July 2007; Accepted: 27 September 2007 / Published: 9 October 2007
Show/Hide Abstract | Cited by 5 | PDF Full-text (394 KB) | HTML Full-text | XML Full-text

by  and
Sensors 2007, 7(11), 2660-2670; doi:10.3390/s7112670
Received: 18 October 2007; Accepted: 7 November 2007 / Published: 9 November 2007
Show/Hide Abstract | Cited by 17 | PDF Full-text (618 KB) | HTML Full-text | XML Full-text

by ,  and
Sensors 2007, 7(12), 3386-3398; doi:10.3390/s7123386
Received: 19 November 2007; Accepted: 18 December 2007 / Published: 19 November 2007
Show/Hide Abstract | Cited by 12 | PDF Full-text (2328 KB) | HTML Full-text | XML Full-text

by , , , ,  and
Sensors 2007, 7(11), 2846-2859; doi:10.3390/s7112846
Received: 27 September 2007; Accepted: 14 November 2007 / Published: 20 November 2007
Show/Hide Abstract | Cited by 2 | PDF Full-text (602 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2007, 7(11), 2997-3011; doi:10.3390/s7112997
Received: 12 October 2007; Accepted: 14 November 2007 / Published: 26 November 2007
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by  and
Sensors 2007, 7(12), 3012-3026; doi:10.3390/s7123012
Received: 5 November 2007; Accepted: 27 November 2007 / Published: 29 November 2007
Show/Hide Abstract | Cited by 10 | PDF Full-text (324 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2007, 7(12), 3071-3083; doi:10.3390/s7123071
Received: 25 October 2007; Accepted: 29 November 2007 / Published: 4 December 2007
Show/Hide Abstract | Cited by 1 | PDF Full-text (362 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2008, 8(1), 222-235; doi:10.3390/s8010222
Received: 30 November 2007; Accepted: 8 January 2008 / Published: 21 January 2008
Show/Hide Abstract | Cited by 4 | PDF Full-text (2930 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2008, 8(1), 211-221; doi:10.3390/s8010211
Received: 4 December 2007; Accepted: 8 January 2008 / Published: 21 January 2008
Show/Hide Abstract | Cited by 2 | PDF Full-text (839 KB) | HTML Full-text | XML Full-text

by ,  and
Sensors 2008, 8(2), 700-710; doi:10.3390/s8020700
Received: 14 January 2008; Accepted: 29 January 2008 / Published: 6 February 2008
Show/Hide Abstract | Cited by 5 | PDF Full-text (4962 KB) | HTML Full-text | XML Full-text

by ,  and
Sensors 2008, 8(2), 767-783; doi:10.3390/s8020767
Received: 19 November 2007; Accepted: 28 January 2008 / Published: 6 February 2008
Show/Hide Abstract | Cited by 4 | PDF Full-text (638 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2008, 8(2), 784-799; doi:10.3390/s8020784
Received: 30 November 2007; Accepted: 31 January 2008 / Published: 6 February 2008
Show/Hide Abstract | Cited by 10 | PDF Full-text (599 KB) | HTML Full-text | XML Full-text

by ,  and
Sensors 2008, 8(2), 877-885; doi:10.3390/s8020877
Received: 10 January 2008; Accepted: 6 February 2008 / Published: 8 February 2008
Show/Hide Abstract | Cited by 4 | PDF Full-text (1527 KB) | HTML Full-text | XML Full-text

by ,  and
Sensors 2008, 8(2), 1048-1069; doi:10.3390/s8021048
Received: 21 December 2007; Accepted: 14 February 2008 / Published: 15 February 2008
Show/Hide Abstract | Cited by 29 | PDF Full-text (1400 KB) | HTML Full-text | XML Full-text

by ,  and
Sensors 2008, 8(2), 994-1003; doi:10.3390/s8020994
Received: 14 September 2007; Accepted: 8 February 2008 / Published: 19 February 2008
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by ,  and
Sensors 2008, 8(2), 1308-1320; doi:10.3390/s8021308
Received: 15 February 2008; Accepted: 21 February 2008 / Published: 22 February 2008
Show/Hide Abstract | Cited by 6 | PDF Full-text (6644 KB) | HTML Full-text | XML Full-text

by ,  and
Sensors 2008, 8(3), 1475-1487; doi:10.3390/s8031475
Received: 30 January 2008; Accepted: 27 February 2008 / Published: 3 March 2008
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by  and
Sensors 2008, 8(4), 2240-2261; doi:10.3390/s8042240
Received: 14 November 2007; Accepted: 26 March 2008 / Published: 29 March 2008
Show/Hide Abstract | Cited by 14 | PDF Full-text (303 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2008, 8(6), 3706-3718; doi:10.3390/s8063706
Received: 21 March 2008; in revised form: 24 May 2008 / Accepted: 2 June 2008 / Published: 3 June 2008
Show/Hide Abstract | Cited by 2 | PDF Full-text (574 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2008, 8(11), 7359-7368; doi:10.3390/s8117359
Received: 9 October 2008; in revised form: 6 November 2008 / Accepted: 12 November 2008 / Published: 18 November 2008
Show/Hide Abstract | Cited by 8 | PDF Full-text (551 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2008, 8(11), 7438-7452; doi:10.3390/s8117438
Received: 11 October 2008; in revised form: 11 November 2008 / Accepted: 14 November 2008 / Published: 19 November 2008
Show/Hide Abstract | Cited by 1 | PDF Full-text (1192 KB) | HTML Full-text | XML Full-text

by  and
Sensors 2009, 9(12), 9945-9964; doi:10.3390/s91209945
Received: 4 November 2009; in revised form: 27 November 2009 / Accepted: 27 November 2009 / Published: 8 December 2009
Show/Hide Abstract | Cited by 1 | PDF Full-text (650 KB) | HTML Full-text | XML Full-text

by  and
Sensors 2010, 10(2), 1232-1250; doi:10.3390/s100201232
Received: 15 December 2009; in revised form: 31 December 2009 / Accepted: 23 January 2010 / Published: 2 February 2010
Show/Hide Abstract | Cited by 5 | PDF Full-text (524 KB) | HTML Full-text | XML Full-text
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Last update: 4 March 2014

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