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Sensors 2007, 7(12), 3071-3083; doi:10.3390/s7123071

Three Cavity Tunable MEMS Fabry Perot Interferometer

* , ,  and
Department of Mechanical and Industrial Engineering, EV 13-310, Concordia University, 1515, St. Catherine West, Montreal, Quebec, Canada H3G 2W1
* Author to whom correspondence should be addressed.
Received: 25 October 2007 / Accepted: 29 November 2007 / Published: 4 December 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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In this paper a four-mirror tunable micro electro-mechanical systems (MEMS)Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. Thespectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018(nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the threecavity lengths). Two different cases were separately considered for the tuning. In case one,tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 weredeflected for the tuning of the FPI.
Keywords: Fabry Perot Interferometer; IR Spectroscopy; Full width Half Maximum; MEMS Fabry Perot Interferometer; IR Spectroscopy; Full width Half Maximum; MEMS
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Parashar, A.; Shah, A.; Packirisamy, M.; Sivakumar, N. Three Cavity Tunable MEMS Fabry Perot Interferometer. Sensors 2007, 7, 3071-3083.

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