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Three Cavity Tunable MEMS Fabry Perot Interferometer
AbstractIn this paper a four-mirror tunable micro electro-mechanical systems (MEMS)Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. Thespectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018(nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the threecavity lengths). Two different cases were separately considered for the tuning. In case one,tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 weredeflected for the tuning of the FPI.
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Parashar, A.; Shah, A.; Packirisamy, M.; Sivakumar, N. Three Cavity Tunable MEMS Fabry Perot Interferometer. Sensors 2007, 7, 3071-3083.View more citation formats
Parashar A, Shah A, Packirisamy M, Sivakumar N. Three Cavity Tunable MEMS Fabry Perot Interferometer. Sensors. 2007; 7(12):3071-3083.Chicago/Turabian Style
Parashar, Avinash; Shah, Ankur; Packirisamy, Muthukumaran; Sivakumar, Narayanswamy. 2007. "Three Cavity Tunable MEMS Fabry Perot Interferometer." Sensors 7, no. 12: 3071-3083.