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Sensors 2007, 7(12), 3071-3083; doi:10.3390/s7123071
Communication

Three Cavity Tunable MEMS Fabry Perot Interferometer

* , ,  and
Received: 25 October 2007; Accepted: 29 November 2007 / Published: 4 December 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract: In this paper a four-mirror tunable micro electro-mechanical systems (MEMS)Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. Thespectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018(nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the threecavity lengths). Two different cases were separately considered for the tuning. In case one,tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 weredeflected for the tuning of the FPI.
Keywords: Fabry Perot Interferometer; IR Spectroscopy; Full width Half Maximum; MEMS Fabry Perot Interferometer; IR Spectroscopy; Full width Half Maximum; MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Parashar, A.; Shah, A.; Packirisamy, M.; Sivakumar, N. Three Cavity Tunable MEMS Fabry Perot Interferometer. Sensors 2007, 7, 3071-3083.

AMA Style

Parashar A, Shah A, Packirisamy M, Sivakumar N. Three Cavity Tunable MEMS Fabry Perot Interferometer. Sensors. 2007; 7(12):3071-3083.

Chicago/Turabian Style

Parashar, Avinash; Shah, Ankur; Packirisamy, Muthukumaran; Sivakumar, Narayanswamy. 2007. "Three Cavity Tunable MEMS Fabry Perot Interferometer." Sensors 7, no. 12: 3071-3083.



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