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Sensors 2008, 8(1), 222-235; doi:10.3390/s8010222

Article

Experimental Study on the Effects of Alumina Abrasive Particle Behavior in MR Polishing for MEMS Applications

Dong-Woo Kim ^1,* , Myeong-Woo Cho ¹ , Tae-Il Seo ²  and Young-Jae Shin ³

¹ Division of Mechanical Engineering, Inha University, Incheon 402-751, Korea ² Department of Mechanical Engineering, University of Incheon, Incheon 402-751, Korea ³ Nano-Mechanical Systems Technology Division, KIMM, Daejeon 305-343, Korea

* Author to whom correspondence should be addressed.

Received: 30 November 2007 / Accepted: 8 January 2008 / Published: 21 January 2008

(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)

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Abstract: Recently, the magnetorheological (MR) polishing process has been examined asa new ultra-precision polishing technology for micro parts in MEMS applications. In theMR polishing process, the magnetic force plays a dominant role. This method uses MRfluids which contains micro abrasives as a polishing media. The objective of the presentresearch is to shed light onto the material removal mechanism under various slurryconditions for polishing and to investigate surface characteristics, including shape analysisand surface roughness measurement, of spots obtained from the MR polishing process usingalumina abrasives. A series of basic experiments were first performed to determine theoptimum polishing conditions for BK7 glass using prepared slurries by changing the processparameters, such as wheel rotating speed and electric current. Using the obtained results,groove polishing was then performed and the results are investigated. Outstanding surfaceroughness of Ra=3.8nm was obtained on the BK7 glass specimen. The present resultshighlight the possibility of applying this polishing method to ultra-precision micro partsproduction, especially in MEMS applications.

Keywords: MR (Magnetorhelogical) fluids; Ultra-precision polishing; Bingham flow; Micro machining.

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