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Sensors 2007, 7(12), 3012-3026; doi:10.3390/s7123012
Article

Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces

1 and 2,*
Received: 5 November 2007; Accepted: 27 November 2007 / Published: 29 November 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract: The influence of damping on the dynamical behavior of the electrostaticparallel-plate and torsional actuators with the van der Waals (vdW) or Casimir force(torque) is presented. The values of the pull-in parameters and the number of theequilibrium points do not change whether there is damping or not. The ability ofequilibrium points is varied with the appearance of damping. One equilibrium point is anunstable saddle with a different damping coefficient, the other equilibrium point is astable node when the damping coefficient is greater than some critical value, andotherwise it is a stable focus. Then there are two heteroclinic orbits passing from theunstable saddle point to the stable node or focus.
Keywords: damping; Casimir force (torque); vdW force (torque); heteroclinic orbit. damping; Casimir force (torque); vdW force (torque); heteroclinic orbit.
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Lin, W.-H.; Zhao, Y.-P. Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces. Sensors 2007, 7, 3012-3026.

AMA Style

Lin W-H, Zhao Y-P. Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces. Sensors. 2007; 7(12):3012-3026.

Chicago/Turabian Style

Lin, Wen-Hui; Zhao, Ya-Pu. 2007. "Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces." Sensors 7, no. 12: 3012-3026.


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