Next Article in Journal
Object-Based Classification of Ikonos Imagery for Mapping Large-Scale Vegetation Communities in Urban Areas
Next Article in Special Issue
Effect of Electrical Contact on the Contact Residual Stress of a Microrelay Switch
Previous Article in Journal
Study on a Concentric Tube Bulb Manometer and its Performance Compared to U-shaped Manometer
Previous Article in Special Issue
Modeling and Manufacturing of Micromechanical RF Switch with Inductors
Sensors 2007, 7(11), 2846-2859; doi:10.3390/s7112846
Article

Quantitative Accelerated Life Testing of MEMS Accelerometers

1,* , 1
,
1
,
2
,
2
 and
2
1 National Institute for R&D in Microtechnologies –IMT-Bucharest, 126A, Erou Iancu Nicolae street, 077190, Bucharest, Romania 2 Centre Spatial de Liège - CSL (Université de Liège), Place du 20-Août, 9 à B-4000 Liège, Belgium
* Author to whom correspondence should be addressed.
Received: 27 September 2007 / Accepted: 14 November 2007 / Published: 20 November 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
View Full-Text   |   Download PDF [602 KB, uploaded 21 June 2014]   |   Browse Figures
SciFeed

Abstract

Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variants of mechanical stressare used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tiltingand high temperature is used. Tilting is appropriate as application-driven stress, because thetilt movement is a natural environment for devices used for automotive and aerospaceapplications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The testresults demonstrated the excellent reliability of the studied devices, the failure rate in the“worst case” being smaller than 10-7h-1.
Keywords: reliability; accelerometers; MEMS; tilting; vibration. reliability; accelerometers; MEMS; tilting; vibration.
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
EndNote |
RIS
MDPI and ACS Style

Bâzu, M.; Gălăţeanu, L.; Ilian, V.E.; Loicq, J.; Habraken, S.; Collette, J.-P. Quantitative Accelerated Life Testing of MEMS Accelerometers. Sensors 2007, 7, 2846-2859.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert