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Sensors 2007, 7(11), 2846-2859; https://doi.org/10.3390/s7112846

Quantitative Accelerated Life Testing of MEMS Accelerometers

1
National Institute for R&D in Microtechnologies –IMT-Bucharest, 126A, Erou Iancu Nicolae street, 077190, Bucharest, Romania
2
Centre Spatial de Liège - CSL (Université de Liège), Place du 20-Août, 9 à B-4000 Liège, Belgium
*
Author to whom correspondence should be addressed.
Received: 27 September 2007 / Accepted: 14 November 2007 / Published: 20 November 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract

Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variants of mechanical stressare used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tiltingand high temperature is used. Tilting is appropriate as application-driven stress, because thetilt movement is a natural environment for devices used for automotive and aerospaceapplications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The testresults demonstrated the excellent reliability of the studied devices, the failure rate in the“worst case” being smaller than 10-7h-1. View Full-Text
Keywords: reliability; accelerometers; MEMS; tilting; vibration. reliability; accelerometers; MEMS; tilting; vibration.
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Bâzu, M.; Gălăţeanu, L.; Ilian, V.E.; Loicq, J.; Habraken, S.; Collette, J.-P. Quantitative Accelerated Life Testing of MEMS Accelerometers. Sensors 2007, 7, 2846-2859.

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