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Quantitative Accelerated Life Testing of MEMS Accelerometers
National Institute for R&D in Microtechnologies –IMT-Bucharest, 126A, Erou Iancu Nicolae street, 077190, Bucharest, Romania
Centre Spatial de Liège - CSL (Université de Liège), Place du 20-Août, 9 à B-4000 Liège, Belgium
* Author to whom correspondence should be addressed.
Received: 27 September 2007; Accepted: 14 November 2007 / Published: 20 November 2007
Abstract: Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variants of mechanical stressare used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tiltingand high temperature is used. Tilting is appropriate as application-driven stress, because thetilt movement is a natural environment for devices used for automotive and aerospaceapplications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The testresults demonstrated the excellent reliability of the studied devices, the failure rate in the“worst case” being smaller than 10-7h-1.
Keywords: reliability; accelerometers; MEMS; tilting; vibration.
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Bâzu, M.; Gălăţeanu, L.; Ilian, V.E.; Loicq, J.; Habraken, S.; Collette, J.-P. Quantitative Accelerated Life Testing of MEMS Accelerometers. Sensors 2007, 7, 2846-2859.
Bâzu M, Gălăţeanu L, Ilian VE, Loicq J, Habraken S, Collette J-P. Quantitative Accelerated Life Testing of MEMS Accelerometers. Sensors. 2007; 7(11):2846-2859.
Bâzu, Marius; Gălăţeanu, Lucian; Ilian, Virgil E.; Loicq, Jerome; Habraken, Serge; Collette, Jean-Paul. 2007. "Quantitative Accelerated Life Testing of MEMS Accelerometers." Sensors 7, no. 11: 2846-2859.