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Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting
AbstractFor microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These techniques, which require a proper photoresist, mask, UV light exposure, developing, and electroplating as a preprocess, are considered to have some problems. In this study, we propose a new microfabrication technology which consists of micro end-milling and powder blasting. This technique could be directly applied to fabricate the metal mold without any preprocesses. The metal mold with micro-channels is machined by micro end-milling, and then, burrs generated in the end-milling process are removed by powder blasting. From the experimental results, micro end-milling combined with powder blasting could be applied effectively for fabrication of the injection mold of biochips with micro fluidic channels.
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Yun, D.J.; Seo, T.I.; Park, D.S. Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting. Sensors 2008, 8, 1308-1320.View more citation formats
Yun DJ, Seo TI, Park DS. Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting. Sensors. 2008; 8(2):1308-1320.Chicago/Turabian Style
Yun, Dae J.; Seo, Tae I.; Park, Dong S. 2008. "Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting." Sensors 8, no. 2: 1308-1320.