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Sensors 2008, 8(2), 1308-1320; doi:10.3390/s8021308
Article

Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting

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 and *
Received: 15 February 2008 / Accepted: 21 February 2008 / Published: 22 February 2008
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract

For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These techniques, which require a proper photoresist, mask, UV light exposure, developing, and electroplating as a preprocess, are considered to have some problems. In this study, we propose a new microfabrication technology which consists of micro end-milling and powder blasting. This technique could be directly applied to fabricate the metal mold without any preprocesses. The metal mold with micro-channels is machined by micro end-milling, and then, burrs generated in the end-milling process are removed by powder blasting. From the experimental results, micro end-milling combined with powder blasting could be applied effectively for fabrication of the injection mold of biochips with micro fluidic channels.
Keywords: Biochip; Micro Fluidic Channel; Powder Blasting; Micro End-milling; Biochip; Micro Fluidic Channel; Powder Blasting; Micro End-milling;
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Yun, D.J.; Seo, T.I.; Park, D.S. Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting. Sensors 2008, 8, 1308-1320.

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