Sensors 2008, 8(2), 1308-1320; doi:10.3390/s8021308
Article

Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting

Received: 15 February 2008; Accepted: 21 February 2008 / Published: 22 February 2008
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These techniques, which require a proper photoresist, mask, UV light exposure, developing, and electroplating as a preprocess, are considered to have some problems. In this study, we propose a new microfabrication technology which consists of micro end-milling and powder blasting. This technique could be directly applied to fabricate the metal mold without any preprocesses. The metal mold with micro-channels is machined by micro end-milling, and then, burrs generated in the end-milling process are removed by powder blasting. From the experimental results, micro end-milling combined with powder blasting could be applied effectively for fabrication of the injection mold of biochips with micro fluidic channels.
Keywords: Biochip; Micro Fluidic Channel; Powder Blasting; Micro End-milling;
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MDPI and ACS Style

Yun, D.J.; Seo, T.I.; Park, D.S. Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting. Sensors 2008, 8, 1308-1320.

AMA Style

Yun DJ, Seo TI, Park DS. Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting. Sensors. 2008; 8(2):1308-1320.

Chicago/Turabian Style

Yun, Dae J.; Seo, Tae I.; Park, Dong S. 2008. "Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting." Sensors 8, no. 2: 1308-1320.

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