Sensors 2007, 7(5), 697-707; doi:10.3390/s7050697
Article

An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method

1,* email, 1email, 2email and 2email
Received: 2 May 2007; Accepted: 21 May 2007 / Published: 24 May 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, the mass flow rate of abrasive and the number of nozzle scanning times on erosion depth of the Pyrex and the soda lime glasses were examined. From the experimental results, optimal blasting conditions were selected for the Pyrex glass machining. The dimensions of the designed glass sensor was 1.7×1.7×0.6mm for the vibrating mass, and 2.9×0.7×0.2mm for the cantilever beam. The machining results showed that the dimensional errors of the machined glass sensor ranged from 3 μm in minimum to 20 μm in maximum. These results imply that the micro powder blasting method can be applied for the micromachining of glass-based acceleration sensors to replace the exiting method.
Keywords: Acceleration sensor; micro powder blasting; micromachining; masking; etching.
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MDPI and ACS Style

Park, D.-S.; Yun, D.-J.; Cho, M.-W.; Shin, B.-C. An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method. Sensors 2007, 7, 697-707.

AMA Style

Park D-S, Yun D-J, Cho M-W, Shin B-C. An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method. Sensors. 2007; 7(5):697-707.

Chicago/Turabian Style

Park, Dong-Sam; Yun, Dae-Jin; Cho, Myeong-Woo; Shin, Bong-Cheol. 2007. "An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method." Sensors 7, no. 5: 697-707.

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