Special Issue "Modeling, Testing and Reliability Issues in MEMS Engineering 2011"

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A special issue of Sensors (ISSN 1424-8220).

Deadline for manuscript submissions: closed (15 December 2011)

Special Issue Editor

Guest Editor
Dr. Stefano Mariani
Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy
Website: http://www.dica.polimi.it/en/
E-Mail: stefano.mariani@polimi.it
Phone: +39 02 2399 4279
Fax: +39 02 2399 4300
Interests: MEMS; structural sensors; kalman filtering

Special Issue Information

Dear Colleagues,

Micro-electro-mechanical-systems (MEMS) are devices on a millimeter scale, with micro-resolution. Each MEMS is given by the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate, obtained through micro-fabrication technology.

MEMS are often designed to work in mobile devices, and are therefore subject during their life to accidental mechanical loadings. Because of the MEMS size, multi-scale analyses are sometimes required in reliability analysis. Furthermore, also thermal, electrical, magnetic and environmental actions should be accounted for in a fully coupled multi-physics modelling of the devices.

As for packaging, some technical problems caused to the devices are not yet thoroughly understood and solved. Since standards do not necessarily apply to packaged MEMS, new knowledge-based testing methodologies need to be proposed.

The aim of this special issue is to collect high quality research results on all these aspects of MEMS engineering.

Dr. Stefano Mariani
Guest Editor

Keywords

  • micro-electro-mechanical-systems
  • multi-scale and multi-physics modeling
  • micro-fluidics
  • failure analysis
  • reliability analysis
  • package engineering

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Published Papers (14 papers)

by , ,  and
Sensors 2013, 13(9), 12564-12580; doi:10.3390/s130912564
Received: 11 June 2013; in revised form: 30 July 2013 / Accepted: 27 August 2013 / Published: 18 September 2013
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by ,  and
Sensors 2013, 13(8), 10599-10622; doi:10.3390/s130810599
Received: 29 June 2013; in revised form: 1 August 2013 / Accepted: 12 August 2013 / Published: 15 August 2013
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by , , ,  and
Sensors 2012, 12(6), 6857-6868; doi:10.3390/s120606857
Received: 16 April 2012; in revised form: 13 May 2012 / Accepted: 22 May 2012 / Published: 25 May 2012
Show/Hide Abstract | Cited by 1 | PDF Full-text (641 KB) | HTML Full-text | XML Full-text

by , , , ,  and
Sensors 2012, 12(4), 4172-4186; doi:10.3390/s120404172
Received: 28 February 2012; in revised form: 16 March 2012 / Accepted: 16 March 2012 / Published: 28 March 2012
Show/Hide Abstract | Cited by 3 | PDF Full-text (1425 KB) | HTML Full-text | XML Full-text

by
Sensors 2012, 12(3), 3082-3104; doi:10.3390/s120303082
Received: 13 January 2012; in revised form: 24 February 2012 / Accepted: 24 February 2012 / Published: 6 March 2012
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by , , ,  and
Sensors 2012, 12(2), 2219-2235; doi:10.3390/s120202219
Received: 8 December 2011; in revised form: 31 January 2012 / Accepted: 7 February 2012 / Published: 15 February 2012
Show/Hide Abstract | Cited by 4 | PDF Full-text (2109 KB) | HTML Full-text | XML Full-text
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by , , ,  and
Sensors 2012, 12(2), 1720-1737; doi:10.3390/s120201720
Received: 30 December 2011; in revised form: 1 February 2012 / Accepted: 2 February 2012 / Published: 7 February 2012
Show/Hide Abstract | Cited by 2 | PDF Full-text (675 KB) | HTML Full-text | XML Full-text
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by ,  and
Sensors 2011, 11(12), 11112-11121; doi:10.3390/s111211112
Received: 13 October 2011; in revised form: 22 November 2011 / Accepted: 23 November 2011 / Published: 28 November 2011
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by ,  and
Sensors 2011, 11(10), 9798-9806; doi:10.3390/s111009798
Received: 22 August 2011; in revised form: 12 October 2011 / Accepted: 17 October 2011 / Published: 19 October 2011
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by  and
Sensors 2011, 11(10), 9217-9232; doi:10.3390/s111009217
Received: 4 July 2011; in revised form: 19 August 2011 / Accepted: 22 September 2011 / Published: 27 September 2011
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by , , ,  and
Sensors 2011, 11(9), 8203-8226; doi:10.3390/s110908203
Received: 18 July 2011; in revised form: 9 August 2011 / Accepted: 16 August 2011 / Published: 25 August 2011
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by ,  and
Sensors 2011, 11(8), 8143-8151; doi:10.3390/s110808143
Received: 27 June 2011; in revised form: 27 July 2011 / Accepted: 18 August 2011 / Published: 19 August 2011
Show/Hide Abstract | Cited by 6 | PDF Full-text (1116 KB) | HTML Full-text | XML Full-text

by , ,  and
Sensors 2011, 11(7), 6991-7003; doi:10.3390/s110706991
Received: 8 May 2011; in revised form: 24 June 2011 / Accepted: 26 June 2011 / Published: 4 July 2011
Show/Hide Abstract | Cited by 4 | PDF Full-text (486 KB) | HTML Full-text | XML Full-text

by , , ,  and
Sensors 2011, 11(5), 4972-4989; doi:10.3390/s110504972
Received: 15 March 2011; in revised form: 28 April 2011 / Accepted: 3 May 2011 / Published: 4 May 2011
Show/Hide Abstract | Cited by 8 | PDF Full-text (947 KB) | HTML Full-text | XML Full-text

Last update: 7 August 2014

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