Sensors 2009, 9(12), 9945-9964; doi:10.3390/s91209945
Article

A Reduced Three Dimensional Model for SAW Sensors Using Finite Element Analysis

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Received: 4 November 2009; in revised form: 27 November 2009 / Accepted: 27 November 2009 / Published: 8 December 2009
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: A major problem that often arises in modeling Micro Electro Mechanical Systems (MEMS) such as Surface Acoustic Wave (SAW) sensors using Finite Element Analysis (FEA) is the extensive computational capacity required. In this study a new approach is adopted to significantly reduce the computational capacity needed for analyzing the response of a SAW sensor using the finite element (FE) method. The approach is based on the plane wave solution where the properties of the wave vary in two dimensions and are uniform along the thickness of the device. The plane wave solution therefore allows the thickness of the SAW device model to be minimized; the model is referred to as a Reduced 3D Model (R3D). Various configurations of this novel R3D model are developed and compared with theoretical and experimental frequency data and the results show very good agreement. In addition, two-dimensional (2D) models with similar configurations to the R3D are developed for comparison since the 2D approach is widely adopted in the literature as a computationally inexpensive approach to model SAW sensors using the FE method. Results illustrate that the R3D model is capable of capturing the SAW response more accurately than the 2D model; this is demonstrated by comparison of centre frequency and insertion loss values. These results are very encouraging and indicate that the R3D model is capable of capturing the MEMS-based SAW sensor response without being computationally expensive.
Keywords: Finite Element Analysis; Aluminum Nitride; Surface Acoustic Waves; MEMS; SAW sensors
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MDPI and ACS Style

El Gowini, M.M.; Moussa, W.A. A Reduced Three Dimensional Model for SAW Sensors Using Finite Element Analysis. Sensors 2009, 9, 9945-9964.

AMA Style

El Gowini MM, Moussa WA. A Reduced Three Dimensional Model for SAW Sensors Using Finite Element Analysis. Sensors. 2009; 9(12):9945-9964.

Chicago/Turabian Style

El Gowini, Mohamed M.; Moussa, Walied A. 2009. "A Reduced Three Dimensional Model for SAW Sensors Using Finite Element Analysis." Sensors 9, no. 12: 9945-9964.

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