Next Article in Journal
3D Printing-Based Integrated Water Quality Sensing System
Previous Article in Journal
Image Processing of Porous Silicon Microarray in Refractive Index Change Detection
Previous Article in Special Issue
In-Situ Measurement of High-Temperature Proton Exchange Membrane Fuel Cell Stack Using Flexible Five-in-One Micro-Sensor
Article Menu
Issue 6 (June) cover image

Export Article

Open AccessArticle
Sensors 2017, 17(6), 1332; doi:10.3390/s17061332

The Development of the Differential MEMS Vector Hydrophone

Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
These authors contributed equally to this study.
*
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 11 April 2017 / Revised: 27 May 2017 / Accepted: 30 May 2017 / Published: 8 June 2017
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)

Abstract

To solve the problem that MEMS vector hydrophones are greatly interfered with by the vibration of the platform and flow noise in applications, this paper describes a differential MEMS vector hydrophone that could simultaneously receive acoustic signals and reject acceleration signals. Theoretical and simulation analyses have been carried out. Lastly, a prototype of the differential MEMS vector hydrophone has been created and tested using a standing wave tube and a vibration platform. The results of the test show that this hydrophone has a high sensitivity, Mv = −185 dB (@ 500 Hz, 0 dB reference 1 V/μPa), which is almost the same as the previous MEMS vector hydrophones, and has a low acceleration sensitivity, Mv = −58 dB (0 dB reference 1 V/g), which has decreased by 17 dB compared with the previous MEMS vector hydrophone. The differential MEMS vector hydrophone basically meets the requirements of acoustic vector detection when it is rigidly fixed to a working platform, which lays the foundation for engineering applications of MEMS vector hydrophones. View Full-Text
Keywords: MEMS; hydrophone; sensitivity; acceleration sensitivity MEMS; hydrophone; sensitivity; acceleration sensitivity
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Zhang, G.; Liu, M.; Shen, N.; Wang, X.; Zhang, W. The Development of the Differential MEMS Vector Hydrophone. Sensors 2017, 17, 1332.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top