Sensors 2008, 8(2), 767-783; doi:10.3390/s8020767
Article

Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient

1 Department of Mechanics, Politecnico of Torino, C.so Duca degli Abruzzi,24 - 10129, Torino, Italy 2 Faculty of Mechanical Engineering, State University of Campinas, CEP 13083-970 Campinas, Brazil
* Author to whom correspondence should be addressed.
Received: 19 November 2007; Accepted: 28 January 2008 / Published: 6 February 2008
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
PDF Full-text Download PDF Full-Text [638 KB, uploaded 16 September 2008 11:01 CEST]
Abstract: The dynamic characterization of a set of gold micro beams by electrostatic excitation in presence of residual stress gradient has been studied experimentally. A method to determine the micro-cantilever residual stress gradient by measuring the deflection and curvature and then identifying the residual stress model by means of frequency shift behaviour is presented. A comparison with different numerical FEM models and experimental results has been carried out, introducing in the model the residual stress of the structures, responsible for an initial upward curvature. Dynamic spectrum data are measured via optical interferometry and experimental frequency shift curves are obtained by increasing the dc voltage applied to the specimens. A good correspondence is pointed out between measures and numerical models so that the residual stress effect can be evaluated for different configurations.
Keywords: Frequency shift; residual stress gradient; micro cantilever; MEMS

Article Statistics

Load and display the download statistics.

Citations to this Article

Cite This Article

MDPI and ACS Style

Ballestra, A.; Somà, A.; Pavanello, R. Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient. Sensors 2008, 8, 767-783.

AMA Style

Ballestra A, Somà A, Pavanello R. Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient. Sensors. 2008; 8(2):767-783.

Chicago/Turabian Style

Ballestra, Alberto; Somà, Aurelio; Pavanello, Renato. 2008. "Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient." Sensors 8, no. 2: 767-783.

Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert