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Sensors 2008, 8(2), 767-783; doi:10.3390/s8020767
Article

Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient

1
, 1,*  and 2
Received: 19 November 2007; Accepted: 28 January 2008 / Published: 6 February 2008
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract: The dynamic characterization of a set of gold micro beams by electrostatic excitation in presence of residual stress gradient has been studied experimentally. A method to determine the micro-cantilever residual stress gradient by measuring the deflection and curvature and then identifying the residual stress model by means of frequency shift behaviour is presented. A comparison with different numerical FEM models and experimental results has been carried out, introducing in the model the residual stress of the structures, responsible for an initial upward curvature. Dynamic spectrum data are measured via optical interferometry and experimental frequency shift curves are obtained by increasing the dc voltage applied to the specimens. A good correspondence is pointed out between measures and numerical models so that the residual stress effect can be evaluated for different configurations.
Keywords: Frequency shift; residual stress gradient; micro cantilever; MEMS Frequency shift; residual stress gradient; micro cantilever; MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Ballestra, A.; Somà, A.; Pavanello, R. Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient. Sensors 2008, 8, 767-783.

AMA Style

Ballestra A, Somà A, Pavanello R. Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient. Sensors. 2008; 8(2):767-783.

Chicago/Turabian Style

Ballestra, Alberto; Somà, Aurelio; Pavanello, Renato. 2008. "Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient." Sensors 8, no. 2: 767-783.



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