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Sensors 2008, 8(2), 767-783; doi:10.3390/s8020767

Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient

Department of Mechanics, Politecnico of Torino, Duca degli Abruzzi,24 - 10129, Torino, Italy
Faculty of Mechanical Engineering, State University of Campinas, CEP 13083-970 Campinas, Brazil
Author to whom correspondence should be addressed.
Received: 19 November 2007 / Accepted: 28 January 2008 / Published: 6 February 2008
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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The dynamic characterization of a set of gold micro beams by electrostatic excitation in presence of residual stress gradient has been studied experimentally. A method to determine the micro-cantilever residual stress gradient by measuring the deflection and curvature and then identifying the residual stress model by means of frequency shift behaviour is presented. A comparison with different numerical FEM models and experimental results has been carried out, introducing in the model the residual stress of the structures, responsible for an initial upward curvature. Dynamic spectrum data are measured via optical interferometry and experimental frequency shift curves are obtained by increasing the dc voltage applied to the specimens. A good correspondence is pointed out between measures and numerical models so that the residual stress effect can be evaluated for different configurations. View Full-Text
Keywords: Frequency shift; residual stress gradient; micro cantilever; MEMS Frequency shift; residual stress gradient; micro cantilever; MEMS

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Ballestra, A.; Somà, A.; Pavanello, R. Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient. Sensors 2008, 8, 767-783.

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