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Sensors 2008, 8(2), 1048-1069; doi:10.3390/s8021048
Article

Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates

1
, 2,*  and 3
Received: 21 December 2007; Accepted: 14 February 2008 / Published: 15 February 2008
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract: We study the influence of von Karman nonlinearity, van der Waals force, and a athermal stresses on pull-in instability and small vibrations of electrostatically actuated mi-croplates. We use the Galerkin method to develop a tractable reduced-order model for elec-trostatically actuated clamped rectangular microplates in the presence of van der Waals forcesand thermal stresses. More specifically, we reduce the governing two-dimensional nonlineartransient boundary-value problem to a single nonlinear ordinary differential equation. For thestatic problem, the pull-in voltage and the pull-in displacement are determined by solving apair of nonlinear algebraic equations. The fundamental vibration frequency corresponding toa deflected configuration of the microplate is determined by solving a linear algebraic equa-tion. The proposed reduced-order model allows for accurately estimating the combined effectsof van der Waals force and thermal stresses on the pull-in voltage and the pull-in deflectionprofile with an extremely limited computational effort.
Keywords: Microelectromechanical systems; microplate; van der Waals force; pull-in insta- bility; microsensor Microelectromechanical systems; microplate; van der Waals force; pull-in insta- bility; microsensor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Batra, R.C.; Porfiri, M.; Spinello, D. Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates. Sensors 2008, 8, 1048-1069.

AMA Style

Batra RC, Porfiri M, Spinello D. Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates. Sensors. 2008; 8(2):1048-1069.

Chicago/Turabian Style

Batra, Romesh C.; Porfiri, Maurizio; Spinello, Davide. 2008. "Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates." Sensors 8, no. 2: 1048-1069.


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