Search Results (19)

This work presents the theoretical design and finite element modeling of high-sensitivity microcantilevers for biosensing applications, integrating piezoelectric actuation with novel ultrananocrystalline diamond (UNCD) structures. Microcantilevers were designed based on projections to grow a multilayer metal/AlN/metal/UNCD stack on silicon substrates, optimized to detect adsorption of biomolecules on the surface of exposed UNCD microcantilevers at the picogram scale. A central design criterion was to match the microcantilever’s eigenfrequency with the resonant frequency of the AlN-based piezoelectric actuator, enabling efficient dynamic excitation. The beam length was tuned to ensure a ≥2 kHz resonant frequency shift upon adsorption of 1 pg of mass distributed on the exposed surface of a UNCD-based microcantilever. Subsequently, a Gaussian distribution mass function with a variance of 5 µm was implemented to evaluate the resonant frequency shift upon mass addition at a certain point on the microcantilever where a variation from 600 Hz to 100 Hz was observed when the mass distribution center was located at the tip of the microcantilever and the piezoelectric borderline, respectively. Both frequency and time domain analyses were performed to predict the resonance behavior, oscillation amplitude, and quality factor. To ensure the reliability of the simulations, the model was first validated using experimental results reported in the literature for an AlN/nanocrystalline diamond (NCD) microcantilever. The results confirmed that the AlN/UNCD architecture exhibits higher resonant frequencies and enhanced sensitivity compared to equivalent AlN/Si structures. The findings demonstrate that using a UNCD-based microcantilever not only improves biocompatibility but also significantly enhances the mechanical performance of the biosensor, offering a robust foundation for the development of next-generation MEMS-based biochemical detection platforms. The research reported here introduces a novel design methodology that integrates piezoelectric actuation with UNCD microcantilevers through eigenfrequency matching, enabling efficient picogram-scale mass detection. Unlike previous approaches, it combines actuator and cantilever optimization within a unified finite element framework, validated against experimental data published in the literature for similar piezo-actuated sensors using materials with inferior biocompatibility compared with the novel UNCD. The dual-domain simulation strategy offers accurate prediction of key performance metrics, establishing a robust and scalable path for next-generation MEMS biosensors. Full article

This paper presents a cost-effective and versatile pico-dispensing technique as an efficient and straightforward approach for depositing zinc oxide nanoparticle (ZnO—NP) thin films on micromechanical devices (MEMS). Due to its piezoelectric properties, bulk ZnO is commonly used as a material for micro-/nanocantilever actuation. The pico-dispensing process provides precise control over the deposition, allowing uniform and localized application of ZnO—NP on microcantilevers. Compared to traditional ZnO deposition techniques (e.g., sputtering or sol–gel), pico-dispensing of ZnO—NP offers advantages in simplicity, reduced material waste, and significantly lower costs. Furthermore, it is easy to tailor the composition and properties by incorporating nanoparticles of other materials. Experimental results demonstrate that ZnO—NP thin films deposited via pico-dispensing enable actuation with amplitudes of several nanometers and bandwidths up to 250 kHz, making them potentially suitable for actuation of micromechanical devices such as in dynamic AFM modes. Full article

This article explores the accelerated lifetime test approach to characterize the time-dependent response of a piezoelectrically driven microcantilever (PD-MC) based gas sensor. The novelty here relies on demonstrating how accelerated lifetime tests can be useful to differentiate sensing mechanisms for non-linear gas sensors. The results show the determination of the sensor’s optimum operation time while maintaining result validity. The approach is demonstrated for 1,5-diaminopentane (cadaverine), a volatile organic compound (VOC) whose concentration in meat and fish products has been proven viable for determining the shelf life. A PD-MC functionalized with a cadaverine-specific binder was therefore incorporated into a hand-held electronic nose, and the response was found to be highly reliable within a specific resonance frequency shift, enabling the accurate prediction of meat and fish expiration dates. To identify the limits of detection in terms of cadaverine concentration and sensor lifetime, this study applies the results of accelerated life tests into a Weibull distribution analysis to extract the expected time to failure. For the accelerated life tests, a functionalized PD-MC was exposed to high concentrations of cadaverine, i.e., 252.3 mg/kg, 335.82 mg/kg, and 421.08 mg/kg, compared to the nominal concentration of 33 mg/kg observed in meat and fish samples. Furthermore, we demonstrate the differentiation of the response mechanisms of the system accruing from the concentration-dependent interaction of cadaverine with the binder. This enables the determination of the upper limit of the analyte concentration for a stable response. The findings suggest that the functionalized PD-MC sensor exhibits a linear and predictable response when exposed to a standard cadaverine concentration of 33 mg/kg for up to 93.01 min. Full article

The tapping-mode atomic force microscope (TM-AFM) is widely used today; however, improper matching between the operating medium and the sampling time may lead to inaccurate measurement results. The relationship between the damping coefficient and the steady state of the TM-AFM microcantilever is investigated in this paper using multiple stability theory. Firstly, the effects of changes in dimensionless linear damping coefficients and dimensionless piezoelectric film damping coefficients on the motion stability of the system are examined using bifurcation diagrams, phase trajectories, and domains of attraction. Subsequently, the degrees of effect of the two damping coefficients on the stability of the system are compared. Finally, the bi-parametric bifurcation characteristics of the system under a specific number of iterative cycles are investigated using the bi-parametric bifurcation diagram in conjunction with the actual working conditions, and the boundary conditions for the transition of the system’s motion from an unstable state to a stable state are obtained. The results of the study show that to ensure the accuracy and reliability of the individual measurement data in 500 iteration cycles, the dimensionless linear damping coefficient must be greater than 0.01014. Our results will provide valuable references for TM-AFM measurement media selection, improving TM-AFM imaging quality, measurement accuracy and maneuverability, and TM-AFM troubleshooting. Full article

The analytical modeling of thin-film, multilayered piezoelectric microcantilevers is presented in this work. Piezoelectric microcantilevers were used in chemical sensors. Different types of probe coatings were applied to these types of microcantilevers. A position-sensitive sensor (PSS) system was used to identify chemical ingredients in materials with high sensitivity, and external voltage was measured in mV. The maximum voltage generated for the sensor was 39 mV. This range of voltage is suitable for sensing electronic systems. The angle change in a microcantilever in a liquid or gas environment identifies a material’s chemical ingredients. A microcantilever deflects, resulting in varying voltages in the analysis of materials. COMSOL software and equations were used for analytical simulations to determine the optimal design parameters. COMSOL software model development and MEMS design were involved in the analytical simulations. This paper examines an analytical model of the cantilever and discusses the fabrication process. Full article

This work presents an approach for the estimation of the adsorbed mass of 1,5-diaminopentane (cadaverine) on a functionalized piezoelectrically driven microcantilever (PD-MC) sensor, using a polynomial developed from the characterization of the resonance frequency response to the known added mass. This work supplements the previous studies we carried out on the development of an electronic nose for the measurement of cadaverine in meat and fish, as a determinant of its freshness. An analytical transverse vibration analysis of a chosen microcantilever beam with given dimensions and desired resonance frequency (>10 kHz) was conducted. Since the beam is considered stepped with both geometrical and material non-uniformity, a modal solution for stepped beams, extendable to clamped-free beams of any shape and structure, is derived and used for free and forced vibration analyses of the beam. The forced vibration analysis is then used for transformation to an equivalent electrical model, to address the fact that the microcantilever is both electronically actuated and read. An analytical resonance frequency response to the mass added is obtained by adding simulated masses to the free end of the beam. Experimental verification of the resonance frequency response is carried out, by applying known masses to the microcantilever while measuring the resonance frequency response using an impedance analyzer. The obtained response is then transformed into a resonance frequency to the added mass response polynomial using a polynomial fit. The resulting polynomial is then verified for performance using different masses of cantilever functionalization solution. The functionalized cantilever is then exposed to different concentrations of cadaverine while measuring the resonance frequency and mass of cadaverine adsorbed estimated using the previously obtained polynomial. The result is that there is the possibility of using this approach to estimate the mass of cadaverine gas adsorbed on a functionalized microcantilever, but the effectiveness of this approach is highly dependent on the known masses used for the development of the response polynomial model. Full article

This paper presents a dynamic-mode microcantilever sensor based on a gap method. The sensor has a V-shaped microcantilever and a fixed structure at a distance of 2 µm from its free end. The microcantilever is excited by applying an ac electric potential (3 V_p) to its piezoelectric pads and vibrates at its fundamental resonant frequency. An independent ac electric potential (200 kHz, 15 V_pp) is applied to the fixed structure. This creates a non-uniform electric field with its maxima at the gap and exerts a dielectrophoresis (DEP) force. The DEP force attracts and adsorbs the E. coli bacteria to the cantilever edge at the gap. The binding of the bacteria to the cantilever creates a shift in the resonant frequency of the microcantilever sensor, which is detected by a laser vibrometer. The real-time detection of E. coli bacteria samples, diluted in distilled water, was performed for concentrations of 10⁵–10³ cells/mL and the real-time frequency shifts were −2264.3 to −755 Hz in 4 min, respectively. The tests were expanded to study the effect of the electric potential amplitude (10, 12, 15 V_pp) and higher frequency shifts were observed for higher amplitudes. Full article

Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm³ cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10⁻⁶ g/mL and 10⁻⁴ mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz. Full article

We present a novel MEMS sensor for the detection of magnetic particles in liquids, which consists of a microcantilever excited piezoelectrically in resonance and having an integrated planar coil on its free end. Due to the latter component, magnetic particles are attracted and accumulate on the sensor surface. The additional mass introduced by the particles changes the resonance frequency of the microcantilever serving as measured quantity. To evaluate our design, we dispersed 250 nm iron-oxide particles in de-ionized water and monitored the resonance frequency during particle accumulation. 100 min after measurement start, a total resonance frequency shift of 6 kHz was found, which can easily be measured and shows the high potential of the proposed sensor design. Full article

Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb_0.97La_0.02)(Zr_0.95Ti_0.05)O₃ (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process, to utilize the effect of phase transition induced strain and sharp phase switch of antiferroelectric materials. When micro-cantilevers made of antiferroelectric thick films were driven by sweep voltages, there were two resonant peaks corresponding to the natural frequency shift from 27.8 to 27.0 kHz, before and after phase transition. This is the compensation principle for the PLZT micro-cantilever to tune the natural frequency by the amplitude modulation of driving voltage, rather than of frequency modulation. Considering the natural frequency shift about 0.8 kHz and the frequency tuning ability about 156 Hz/V before the phase transition, this can compensate the frequency shift caused by increasing temperature by tuning only the amplitude of driving voltage, when the ultrasonic micro-transducer made of antiferroelectric thick films works for such a long period. Therefore, antiferroelectric thick films with hetero-structures incorporated into PLZT micro-cantilevers not only require a lower driving voltage (no more than 40 V) than rival bulk piezoelectric ceramics, but also exhibit better performance of frequency invariability, based on the amplitude modulation. Full article

This paper proposes an approach for designing an efficient vibration energy harvester based on a vibro-impacting piezoelectric microcantilever with a geometric shape that has been rationally modified in accordance with results of dynamic optimization. The design goal is to increase the amplitudes of higher-order vibration modes induced during the vibro-impact response of the piezoelectric transducer, thereby providing a means to improve the energy conversion efficiency and power output. A rational configuration of the energy harvester is proposed and it is demonstrated that the new design retains essential modal characteristics of the optimal microcantilever structures, further providing the added benefit of less costly fabrication. The effects of structural dynamics associated with advantageous exploitation of higher vibration modes are analyzed experimentally by means of laser vibrometry as well as numerically via transient simulations of microcantilever response to random excitation. Electrical characterization results indicate that the proposed harvester outperforms its conventional counterpart (based on the microcantilever of the constant cross-section) in terms of generated electrical output. Reported results may serve for the development of impact-type micropower generators with harvesting performance that is enhanced by virtue of self-excitation of large intensity higher-order mode responses when the piezoelectric transducer is subjected to relatively low-frequency excitation with strongly variable vibration magnitudes. Full article

The determination of fluid density and viscosity using most cantilever-based sensors is based on changes in resonant frequency and peak width. Here, we present a wave propagation analysis using piezoelectrically excited micro-cantilevers under distributed fluid loading. The standing wave shapes of microscale-thickness cantilevers partially immersed in liquids (water, 25% glycerol, and acetone), and nanoscale-thickness microfabricated cantilevers fully immersed in gases (air at three different pressures, carbon dioxide, and nitrogen) were investigated to identify the effects of fluid-structure interactions to thus determine the fluid properties. This measurement method was validated by comparing with the known fluid properties, which agreed well with the measurements. The relative differences for the liquids were less than 4.8% for the densities and 3.1% for the viscosities, and those for the gases were less than 6.7% for the densities and 7.3% for the viscosities, showing better agreements in liquids than in gases. Full article

A piezoelectric bimorph beam, as an upgraded cantilever beam structure, can be used to detect gas content and build a micro-actuator, among other functions. Thus, this beam is widely applied to microelectromechanical systems (MEMS), transformers, and precision machinery. For example, when photoacoustic spectroscopy is performed to detect oil-soluble gas in transformers, a micro-cantilever beam can be used to detect gas content. The dynamic characteristics of piezoelectric bimorph beams, such as resonant frequency, are important indexes in the applications of these beams. The equivalent circuit model for a piezoelectric bimorph beam is examined in this study and an admittance test is performed on the beam to accurately, quickly, and economically measure and analyze its dynamic characteristics. Then, the least squares method is applied to obtain the characteristic curves of the admittance circle, amplitude frequency, and phase frequency; identify the dynamic characteristics of the piezoelectric bimorph beam (e.g., resonant frequency); and determine the parameters of the equivalent circuit. The resonant frequency of the piezoelectric bimorph beam is 207.67 Hz based on the result of the admittance circle test, which is basically consistent with the results of microscope image method (i.e., 207.85 Hz) and the theoretical calculation (i.e., 222.03 Hz). This finding proves the validity of the proposed test method. This method cannot only improve the detection speed of piezoelectric bimorph beams, but can also provide a fast detection strategy for testing the characteristics of such beams during photoacoustic spectroscopy. Full article

This work demonstrates the improvement of mass detection sensitivity and time response using a simple sensor structure. Indeed, complicated technological processes leading to very brittle sensing structures are often required to reach high sensitivity when we want to detect specific molecules in biological fields. These developments constitute an obstacle to the early diagnosis of diseases. An alternative is the design of coupled structures. In this study, the device is based on the piezoelectric excitation and detection of two GaAs microstructures vibrating in antisymmetric modes. GaAs is a crystal which has the advantage to be micromachined easily using typical clean room processes. Moreover, we showed its high potential in direct biofunctionalisation for use in the biological field. A specific design of the device was performed to improve the detection at low mass and an original detection method has been developed. The principle is to exploit the variation in amplitude at the initial resonance frequency which has in the vicinity of weak added mass the greatest slope. Therefore, we get a very good resolution for an infinitely weak mass: relative voltage variation of 8%/1 fg. The analysis is based on results obtained by finite element simulation. Full article

Detection of ultrasmall masses such as proteins and pathogens has been made possible as a result of advancements in nanotechnology. Development of label-free and highly sensitive biosensors has enabled the transduction of molecular recognition into detectable physical quantities. Microcantilever (MC)-based systems have played a widespread role in developing such biosensors. One of the most important drawbacks of all of the available biosensors is that they all come at a very high cost. Moreover, there are certain limitations in the measurement equipments attached to the biosensors which are mostly optical measurement systems. A unique self-sensing detection technique is proposed in this paper in order to address most of the limitations of the current measurement systems. A self-sensing bridge is used to excite piezoelectric MC-based sensor functioning in dynamic mode, which simultaneously measures the system’s response through the self-induced voltage generated in the piezoelectric material. As a result, the need for bulky, expensive read-out equipment is eliminated. A comprehensive mathematical model is presented for the proposed self-sensing detection platform using distributed-parameters system modeling. An adaptation strategy is then implemented in the second part in order to compensate for the time-variation of piezoelectric properties which dynamically improves the behavior of the system. Finally, results are reported from an extensive experimental investigation carried out to prove the capability of the proposed platform. Experimental results verified the proposed mathematical modeling presented in the first part of the study with accuracy of 97.48%. Implementing the adaptation strategy increased the accuracy to 99.82%. These results proved the measurement capability of the proposed self-sensing strategy. It enables development of a cost-effective, sensitive and miniaturized mass sensing platform. Full article