Next Article in Journal
Adaptive Weibull Multiplicative Model and Multilayer Perceptron Neural Networks for Dark-Spot Detection from SAR Imagery
Next Article in Special Issue
An Open-Source and Low-Cost Monitoring System for Precision Enology
Previous Article in Journal
Design, Characterization and Analysis of a 0.35 μm CMOS SPAD
Previous Article in Special Issue
Virtualization of Event Sources in Wireless Sensor Networks for the Internet of Things
Article Menu

Export Article

Open AccessArticle
Sensors 2014, 14(12), 22785-22797;

GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection

FEMTO-ST Institute, Université de Franche-Comté, 15B avenue des Montboucons, 25030 Besançon Cedex, France
Institute for Interdisciplinary Innovations in Technology (3IT), Faculty of Engineering, Université de Sherbrooke, 3000 Boulevard de l'Université, Sherbrooke, QC J1K OA5, Canada
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Received: 15 October 2014 / Revised: 17 November 2014 / Accepted: 25 November 2014 / Published: 2 December 2014
Full-Text   |   PDF [1692 KB, uploaded 2 December 2014]


This work demonstrates the improvement of mass detection sensitivity and time response using a simple sensor structure. Indeed, complicated technological processes leading to very brittle sensing structures are often required to reach high sensitivity when we want to detect specific molecules in biological fields. These developments constitute an obstacle to the early diagnosis of diseases. An alternative is the design of coupled structures. In this study, the device is based on the piezoelectric excitation and detection of two GaAs microstructures vibrating in antisymmetric modes. GaAs is a crystal which has the advantage to be micromachined easily using typical clean room processes. Moreover, we showed its high potential in direct biofunctionalisation for use in the biological field. A specific design of the device was performed to improve the detection at low mass and an original detection method has been developed. The principle is to exploit the variation in amplitude at the initial resonance frequency which has in the vicinity of weak added mass the greatest slope. Therefore, we get a very good resolution for an infinitely weak mass: relative voltage variation of 8%/1 fg. The analysis is based on results obtained by finite element simulation. View Full-Text
Keywords: GaAs piezoelectric transducer; microcantilever; acoustic coupling; ultra-sensitivity; finite element method; biological sensing GaAs piezoelectric transducer; microcantilever; acoustic coupling; ultra-sensitivity; finite element method; biological sensing
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Chopard, T.; Lacour, V.; Leblois, T. GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection. Sensors 2014, 14, 22785-22797.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top