Search Results (36)

This paper presents a novel approach employing localized annealing through Joule heating to enhance the performance of Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS resonators that are crucial for applications in sensing, energy harvesting, frequency filtering, and timing control. Despite recent advancements, piezoelectric MEMS resonators still suffer from anchor-related energy losses and limited quality factors (Qs), posing significant challenges for high-performance applications. This study investigates interface modification to boost the quality factor (Q) and reduce the motional resistance, thus improving the electromechanical coupling coefficient and reducing insertion loss. To balance the trade-off between device miniaturization and performance, this work uniquely applies DC current-induced localized annealing to TPoS MEMS resonators, facilitating metal diffusion at the interface. This process results in the formation of platinum silicide, modifying the resonator’s stiffness and density, consequently enhancing the acoustic velocity and mitigating the side-supporting anchor-related energy dissipations. Experimental results demonstrate a Q-factor enhancement of over 300% (from 916 to 3632) and a reduction in insertion loss by more than 14 dB, underscoring the efficacy of this method for reducing anchor-related dissipations due to the highest annealing temperature at the anchors. The findings not only confirm the feasibility of Joule heating for interface modifications in MEMS resonators but also set a foundation for advancements of this post-fabrication thermal treatment technology. Full article

Glancing Angle Deposition (GLAD) has emerged as a versatile and powerful nanofabrication technique for developing next-generation gas sensors by enabling precise control over nanostructure geometry, porosity, and material composition. Through dynamic substrate tilting and rotation, GLAD facilitates the fabrication of highly porous, anisotropic nanostructures, such as aligned, tilted, zigzag, helical, and multilayered nanorods, with tunable surface area and diffusion pathways optimized for gas detection. This review provides a comprehensive synthesis of recent advances in GLAD-based gas sensor design, focusing on how structural engineering and material integration converge to enhance sensor performance. Key materials strategies include the construction of heterojunctions and core–shell architectures, controlled doping, and nanoparticle decoration using noble metals or metal oxides to amplify charge transfer, catalytic activity, and redox responsiveness. GLAD-fabricated nanostructures have been effectively deployed across multiple gas sensing modalities, including resistive, capacitive, piezoelectric, and optical platforms, where their high aspect ratios, tailored porosity, and defect-rich surfaces facilitate enhanced gas adsorption kinetics and efficient signal transduction. These devices exhibit high sensitivity and selectivity toward a range of analytes, including NO₂, CO, H₂S, and volatile organic compounds (VOCs), with detection limits often reaching the parts-per-billion level. Emerging innovations, such as photo-assisted sensing and integration with artificial intelligence for data analysis and pattern recognition, further extend the capabilities of GLAD-based systems for multifunctional, real-time, and adaptive sensing. Finally, current challenges and future research directions are discussed, emphasizing the promise of GLAD as a scalable platform for next-generation gas sensing technologies. Full article

Human–machine interface (HMI) systems are increasingly utilized to develop assistive technologies for individuals with disabilities and older adults. This study proposes two HMI systems using piezoelectric sensors to detect facial muscle activations from eye and tongue movements, and accelerometers to monitor head movements. This system enables hands-free wheelchair control for those with physical disabilities and speech impairments. A prototype wearable sensing device was also designed and implemented. Four commands can be generated using each sensor to steer the wheelchair. We conducted tests in offline and real-time scenarios to assess efficiency and usability among older volunteers. The head–machine interface achieved greater efficiency than the face–machine interface. The simulated wheelchair control tests showed that the head–machine interface typically required twice the time of joystick control, whereas the face–machine interface took approximately four times longer. Participants noted that the head-mounted wearable device was flexible and comfortable. Both modalities can be used for wheelchair control, especially the head–machine interface for patients retaining head movement. In severe cases, the face–machine interface can be used. Moreover, hybrid control can be employed to satisfy specific requirements. Compared to current commercial devices, the proposed HMIs provide lower costs, easier fabrication, and greater adaptability for real-world applications. We will further verify and improve the proposed devices for controlling a powered wheelchair, ensuring practical usability for people with paralysis and speech impairments. Full article

Biosensing shows promise in detecting cancer, renal disease, and other illnesses. Depending on their transducing processes, varieties of biosensors can be divided into electrochemical, optical, piezoelectric, and thermal biosensors. Advancements in material production techniques, enzyme/protein designing, and immobilization/conjugation approaches can yield novel nanoparticles with further developed functionality. Research in cutting-edge biosensing with multifunctional nanomaterials, and the advancement of practical biochip plans utilizing nano-based sensing material, are of current interest. The miniaturization of electronic devices has enabled the growth of ultracompact, compassionate, rapid, and low-cost sensing technologies. Some sensors can recognize analytes at the molecule, particle, and single biological cell levels. Nanomaterial-based sensors, which can be used for biosensing quickly and precisely, can replace toxic materials in real-time diagnostics. Many metal-based NPs and nanocomposites are favorable for biosensing. Through direct and indirect labeling, metal-oxide NPs are extensively employed in detecting metabolic disorders, such as cancer, diabetes, and kidney-disease biomarkers based on electrochemical, optical, and magnetic readouts. The present review focused on recent developments across multiple biosensing modalities using metal/metal-oxide-based NPs; in particular, we highlighted the specific advancements of biosensing of key nanomaterials like ZnO, CeO₂, and TiO₂ and their applications in disease diagnostics and environmental monitoring. For example, ZnO-based biosensors recognize uric acid, glucose, cholesterol, dopamine, and DNA; TiO₂ is utilized for SARS-CoV-19; and CeO₂ for glucose detection. Full article

As one of the most promising electronic devices in the post-Moore era, nanoscale vacuum field emission transistors (VFETs) have garnered significant attention due to their unique electron transport mechanism featuring ballistic transport within vacuum channels. Existing research on these nanoscale vacuum channel devices has primarily focused on structural design for logic circuits. Studies exploring their application potential in other vital fields, such as sensors based on VFET, are more limited. In this study, for the first time, the design of a vacuum field emission transistor (VFET) coupled with a piezoelectric microelectromechanical (MEMS) sensing unit is proposed as the artificial mechanoreceptor for sensing purposes. With a negative threshold voltage similar to an N-channel depletion-mode metal oxide silicon field effect transistor, the proposed VFET has its continuous current tuned by the piezoelectric potential generated by the sensing unit, amplifying the magnitude of signals resulting from electromechanical coupling. Simulations have been conducted to validate the feasibility of such a configuration. As indictable from the simulation results, the proposed piezoelectric VFET exhibits high sensitivity and an electrically adjustable measurement range. Compared to the traditional combination of piezoelectric MEMS sensors and solid-state field effect transistors (FETs), the piezoelectric VFET design has a significantly reduced power consumption thanks to its continuous current that is orders of magnitude smaller. These findings reveal the immense potential of piezoelectric VFET in sensing applications, building up the basis for using VFETs for simple, effective, and low-power pre-amplification of piezoelectric MEMS sensors and broadening the application scope of VFET in general. Full article

Polyimides (PIs) have been extensively used in thin film and micro-electromechanical system (MEMS) processes based on their excellent thermal and mechanical stability and high glass transition temperature. This research explores the development of a novel multilayer and multifunctional polymer composite electro-piezomagnetic device that can function as an energy harvester or sensor for current-carrying wires or magnetic field sensing. The devices consist of four layers of composite materials with a polyimide matrix. The composites have various nanoparticles to alter the functionality of each layer. Nanoparticles of Ag were used to increase the electrical conductivity of polyimide and act as electrodes; lead zirconate titanate was used to make the piezoelectric composite layer; and either neodymium iron boron (NdFeB) or Terfenol-D was used to make the magnetic and magnetostrictive composite layer, which was used as the proof mass. A novel all-polymer multifunctional polyimide composite cantilever was developed to operate at low frequencies. This paper compares the performance of the different magnetic masses, shapes, and concentrations, as well as the development of an all-magnetostrictive device to detect voltage or current changes when coupled to the magnetic field from a current-carrying wire. The PI/PZT cantilever with the PI/NdFeB proof mass demonstrated higher voltage output compared to the PI/Terfenol-D proof mass device. However, the magnetostrictive composite film could be operated without a piezoelectric film based on the Villari effect, which consisted of a single PI-Terfenol-D film. The paper illustrates the potential to develop an all-polymer composite MEMS device capable of acting as a magnetic field or current sensor. Full article

This study investigates a hybrid microelectromechanical system (MEMS) acoustic resonator through a hybrid approach to combine capacitive and piezoelectric transduction mechanisms, thus harnessing the advantages of both transducer technologies within a single device. By seamlessly integrating both piezoelectric and capacitive transducers, the newly designed hybrid resonators mitigate the limitations of capacitive and piezoelectric resonators. The unique hybrid configuration holds promise to significantly enhance overall device performance, particularly in terms of quality factor (Q-factor), insertion loss, and motional impedance. Moreover, the dual-transduction approach improves the signal-to-noise ratio and reduces feedthrough noise levels at higher frequencies. In this paper, the detailed design, complex fabrication processes, and thorough experimental validation are presented, demonstrating substantial performance enhancement potentials. A hybrid disk resonator with a single side-supporting anchor achieved an outstanding loaded Q-factor higher than 28,000 when operating under a capacitive drive and piezoelectric sense configuration. This is comparably higher than the measured Q-factor of 7600 for another disk resonator with two side-supporting anchors. The hybrid resonator exhibits a high Q-factor at its resonance frequency at 20 MHz, representing 2-fold improvement over the highest reported Q-factor for similar MEMS resonators in the literature. Also, the dual-transduction approach resulted in a more than 30 dB improvement in feedthrough suppression for devices with a 500 nm-thick ZnO layer, while hybrid resonators with a thicker piezoelectric layer of 1300 nm realized an even greater feedthrough suppression of more than 50 dB. The hybrid resonator integration strategy discussed offers an innovative solution for current and future advanced RF front-end applications, providing a versatile platform for future innovations in on-chip resonator technology. This work has the potential to lead to advancements in MEMS resonator technology, facilitating some significant improvements in multi-frequency and frequency agile RF applications through the original designs equipped with integrated capacitive and piezoelectric transduction mechanisms. The hybrid design also results in remarkable performance metrics, making it an ideal candidate for integrating next-generation wireless communication devices where size, cost, and energy efficiency are critical. Full article

Films of piezoelectric poly(vinylidene fluoride) (PVDF) and its copolymer P(VDF-TrFE) have been studied intensively for their potential application in piezoelectric sensing devices. The present work focuses on tuning the piezoelectric properties of P(VDF-TrFE) films via incorporating Ag and polydopamine co-decorated PZT (Ag@PDA@PZT) particles. Ag@PDA@PZT particles can effectively improve the β-phase content and piezoelectric properties of P(VDF-TrFE) films. The highest open-circuit voltage and short-circuit current of P(VDF-TrFE)-based flexible pressure sensors incorporating Ag@PDA@PZT particles are ~30 V and ~2.4 μA, respectively. The flexible sensors exhibit a response to different body movements, providing a practical and potentially useful basis for human−machine interface applications. Full article

In recent years, there has been a notable rise in the number of patients afflicted with laryngeal diseases, including cancer, trauma, and other ailments leading to voice loss. Currently, the market is witnessing a pressing demand for medical and healthcare products designed to assist individuals with voice defects, prompting the invention of the artificial throat (AT). This user-friendly device eliminates the need for complex procedures like phonation reconstruction surgery. Therefore, in this review, we will initially give a careful introduction to the intelligent AT, which can act not only as a sound sensor but also as a thin-film sound emitter. Then, the sensing principle to detect sound will be discussed carefully, including capacitive, piezoelectric, electromagnetic, and piezoresistive components employed in the realm of sound sensing. Following this, the development of thermoacoustic theory and different materials made of sound emitters will also be analyzed. After that, various algorithms utilized by the intelligent AT for speech pattern recognition will be reviewed, including some classical algorithms and neural network algorithms. Finally, the outlook, challenge, and conclusion of the intelligent AT will be stated. The intelligent AT presents clear advantages for patients with voice impairments, demonstrating significant social values. Full article

A rapidly expanding global population and a sizeable portion of it that is aging are the main causes of the significant increase in healthcare costs. Healthcare in terms of monitoring systems is undergoing radical changes, making it possible to gauge or monitor the health conditions of people constantly, while also removing some minor possibilities of going to the hospital. The development of automated devices that are either attached to organs or the skin, continually monitoring human activity, has been made feasible by advancements in sensor technologies, embedded systems, wireless communication technologies, nanotechnologies, and miniaturization being ultra-thin, lightweight, highly flexible, and stretchable. Wearable sensors track physiological signs together with other symptoms such as respiration, pulse, and gait pattern, etc., to spot unusual or unexpected events. Help may therefore be provided when it is required. In this study, wearable sensor-based activity-monitoring systems for people are reviewed, along with the problems that need to be overcome. In this review, we have shown smart detecting and versatile wearable electrical sensing mediums in healthcare. We have compiled piezoelectric-, electrostatic-, and thermoelectric-based wearable sensors and their working mechanisms, along with their principles, while keeping in view the different medical and healthcare conditions and a discussion on the application of these biosensors in human health. A comparison is also made between the three types of wearable energy-harvesting sensors: piezoelectric-, electrostatic-, and thermoelectric-based on their output performance. Finally, we provide a future outlook on the current challenges and opportunities. Full article

Acceleration sensors are tools for detecting acceleration and serve purposes like fault monitoring and behavior recognition. It is extensively employed in a variety of industries, including aerospace, artificial intelligence, biology, and many more. Among these, one of the major research hotspots and challenges is the development of low-energy, self-powered, miniature, mass-produced sensors. Due to its capacity to perceive human behavior and identify errors, the flexible acceleration sensor offers a distinct advantage in the use of flexible and miniaturized sensing systems. This review analyzes the current state of piezoelectric flexible acceleration sensors’ applications in the areas of sensitive materials, processing technology, and device structure and briefly summarizes the fundamental properties of these sensors. Additionally, it ends with a prognosis for the future growth of flexible piezoelectric acceleration sensors. Full article

Anthropogenetic environmental deterioration and climate change caused by energy production and consumption pose a significant threat to the future of humanity. Renewable, environmentally friendly, and cost-effective energy sources are becoming increasingly important for addressing future energy demands. Mechanical power is the most common type of external energy that can be converted into useful electric power. Because of its strong electromechanical coupling ability, the piezoelectric mechanism is a far more successful technique for converting mechanics energy to electrical energy when compared to electrostatic, electromagnetic, and triboelectric transduction systems. Currently, the scientific community has maintained a strong interest in piezoelectric micro-power generators because of their great potential for powering a sensor unit in the distributed network nodes. A national network usually has a large mass of sensor units distributed in each city, and a self-powered sensor network is eagerly required. This paper presents a comprehensive review of the development of piezoelectric micro-power generators. The fundamentals of piezoelectric energy conversion, including operational modes and working mechanisms, are introduced. Current research progress in piezoelectric materials including zinc oxide, ceramics, single crystals, organics, composite, bio-inspired and foam materials are reviewed. Piezoelectric energy harvesting at the nano- and microscales, and its applications in a variety of fields such as wind, liquid flow, body movement, implantable and sensing devices are discussed. Finally, the future development of multi-field coupled, hybrid piezoelectric micropower generators and their potential applications are discussed. Full article

Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended silicon nitride waveguides enables the precise alignment of these waveguides to other photonic integrated circuits (PICs). This requires both in-plane and out-of-plane actuators to ensure high-precision optical alignment. However, most current out-of-plane electrostatic actuators are bulky, while electrothermal actuators consume high power. Thus, piezoelectric actuators, thanks to their moderate actuation voltages and low power consumption, could be used as alternatives. Furthermore, piezoelectric actuators can provide displacements in two opposite directions. This study presents a novel aluminum nitride-based out-of-plane piezoelectric MEMS actuator equipped with a capacitive sensing mechanism to track its displacement. This actuator could be integrated within PICs to align different chips. Prototypes of the device were tested over the range of ±60 V, where they provided upward and downward displacements, and achieved a total average out-of-plane displacement of 1.30 ± 0.04 μm. Capacitance measurement showed a linear relation with the displacement, where at −60 V, the average change in capacitance was found to be −13.10 ± 0.89 fF, whereas at 60 V the change was 11.09 ± 0.73 fF. This study also investigates the effect of the residual stress caused by the top metal electrode, on the linearity of the displacement–voltage relation. The simulation predicts that the prototype could be modified to accommodate waveguide routing above it without affecting its performance, and it could also incorporate in-plane lateral actuators. Full article

With the development of technology, systems gravitate towards increasing in their complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic devices have adhered to this trend of advancement. Ultrasonic systems require transducers to generate and sense ultrasonic signals. These transducers heavily impact the system’s performance. Advancements in microelectromechanical systems have led to the development of micromachined ultrasonic transducers (MUTs), which are utilized in miniaturized ultrasound systems. Piezoelectric micromachined ultrasonic transducers (PMUTs) exhibit higher capacitance and lower electrical impedance, which enhances the transducer’s sensitivity by minimizing the effect of parasitic capacitance and facilitating their integration with low-voltage electronics. PMUTs utilize high-yield batch microfabrication with the use of thin piezoelectric films. The deposition of thin piezoelectric material compatible with complementary metal-oxide semiconductors (CMOS) has opened novel avenues for the development of miniaturized compact systems with the same substrate for application and control electronics. PMUTs offer a wide variety of applications, including medical imaging, fingerprint sensing, range-finding, energy harvesting, and intrabody and underwater communication links. This paper reviews the current research and recent advancements on PMUTs and their applications. This paper investigates in detail the important transduction metrics and critical design parameters for high-performance PMUTs. Piezoelectric materials and microfabrication processes utilized to manufacture PMUTs are discussed. Promising PMUT applications and outlook on future advancements are presented. Full article

Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing. However, the sensing distance of currently reported miniaturized ultrasonic sensors (e.g., PMUTs or CMUT) is still limited up to a certain range (e.g., ≤5 m) compared to conventional bulk ultrasonic devices. This paper reports a PMUT array design using scandium-doped aluminum nitride (AlScN) as its piezoelectric layer for an extended long-range detection purpose. To minimize air attenuation, our device is resonating at 66 kHz for a high receive sensitivity of 5.7 mV/Pa. The proposed PMUT array can generate a sound pressure level (SPL) as high as 120 dB at a distance of 10 cm without beam forming. This PMUT design is catered for a pin-to-pin replacement of the current commercial bulk ultrasonic ranging sensor and works directly with the conventional range finding system (e.g., TI PGA460). In comparison with the common bulk transducer, the size of our device is 80% smaller. With the identical ranging detection setup, the proposed PMUT array improves the system SNR by more than 5 dB even at a distance as far as 6.8 m. The result of extended sensing distance validates our miniaturized PMUT array as the optimized candidate for most ultrasonic ranging applications. With the progressive development of piezoelectric MEMS, we believe that the PMUT technology could be a game changer in future long-range sensing applications. Full article