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19 pages, 2581 KB  
Article
Impact of LED Light Spatial Distribution on Photosynthetic Radiation Uniformity in Indoor Crops
by Ricardo Romero-Lomeli, Nivia Escalante-Garcia, Arturo Díaz-Ponce, Ernesto Olvera-Gonzalez and Manuel I. Peña-Cruz
Appl. Sci. 2025, 15(21), 11768; https://doi.org/10.3390/app152111768 - 4 Nov 2025
Viewed by 213
Abstract
The integration of LED lighting enables precise radiation control in plant factory cultivation systems. While LEDs offer energy efficiency and spectral tuning, achieving a uniform photosynthetic photon flux density (PPFD) remains a critical technical challenge. This study evaluated the impact of three spatial [...] Read more.
The integration of LED lighting enables precise radiation control in plant factory cultivation systems. While LEDs offer energy efficiency and spectral tuning, achieving a uniform photosynthetic photon flux density (PPFD) remains a critical technical challenge. This study evaluated the impact of three spatial LED configurations on irradiance uniformity using commercial horticultural LEDs and a light recipe of 75% red and 25% blue. Optical simulations in TracePro® 2017 were conducted to analyze radiant flux, optical efficiency, and uniformity, along with LED quantity, system cost, and electrical consumption under two environmental scenarios: open (without reflective walls) and closed (with reflective walls). Results show that distribution 3, which featured reduced central LED density, achieved 4–8% higher homogeneity in the open scenario, and 2.7–6.5% in the closed scenario, compared to symmetric layouts (distribution 1 and 2). Reflective walls increased average PPFD by up to 20% and optical efficiency by around 9%, with a minimal effect on uniformity. Lowering the lamp-to-canopy distance from 35 cm to 30 cm resulted in a 10% increase in PPFD. Despite a reduction in total photon flux, distribution 3 exhibited superior irradiance homogeneity. One-way ANOVA confirmed significant effects of environment, height, and LED model (p < 0.05), but not of spatial alone. This simulation-based methodology offers a robust framework for optimizing energy-efficient lighting systems. Future work will explore the integrating of non-visible wavelengths and experimental validations to extend practical applicability. Full article
(This article belongs to the Section Applied Physics General)
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16 pages, 844 KB  
Article
Curvilinear Sub-Resolution Assist Feature Placement Through a Data-Driven U-Net Model
by Jiale Liu, Wenjing He, Wenhao Ding, Yuhang Wang and Yijiang Shen
Micromachines 2025, 16(11), 1229; https://doi.org/10.3390/mi16111229 - 29 Oct 2025
Viewed by 308
Abstract
In advanced semiconductor manufacturing, computational lithography, particularly sub-resolution assist features (SRAFs), is crucial for enhancing the process window. However, conventional SRAF placement methodologies are hampered by a critical trade-off between speed and pattern fidelity, and they largely fail to optimize the complex, curvilinear [...] Read more.
In advanced semiconductor manufacturing, computational lithography, particularly sub-resolution assist features (SRAFs), is crucial for enhancing the process window. However, conventional SRAF placement methodologies are hampered by a critical trade-off between speed and pattern fidelity, and they largely fail to optimize the complex, curvilinear layouts essential for advanced nodes. This study develops a deep learning framework to replace and drastically accelerate the optical refinement of SRAF shapes. We established a large-scale dataset with coarse, binarized SRAF patterns as inputs. Ground-truth labels were generated via an Level-Set Method (LSM) optimized purely for optical performance. A U-Net convolutional neural network was then trained to learn the mapping from the coarse inputs to the optically optimized outputs. Experimental results demonstrate a dual benefit: the model provides a multi-order-of-magnitude acceleration over traditional CPU-based methods and is significantly faster than modern GPU-accelerated algorithms while achieving a final pattern fidelity highly comparable to the computationally expensive LSM. The U-Net-generated SRAFs exhibit high fidelity to the ground-truth layouts and comparable optical performance. Our findings demonstrate that a data-driven surrogate can serve as an effective alternative to traditional algorithms for SRAF optical refinement. This represents a promising approach to mitigating computational costs in mask synthesis and provides a solid foundation for future integrated optimization solutions. Full article
(This article belongs to the Special Issue Recent Advances in Lithography)
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12 pages, 7957 KB  
Article
Athermal Design of Star Tracker Optics with Factor Analysis on Lens Power Distribution and Glass Thermal Property
by Kuo-Chuan Wang and Cheng-Huan Chen
Photonics 2025, 12(11), 1057; https://doi.org/10.3390/photonics12111057 - 25 Oct 2025
Viewed by 279
Abstract
A star tracker lens works in the environment with the temperatures ranging from −40 °C to 80 °C (a range of 120 °C), which makes athermalization a crucial step in the design. Traditional approaches could spend quite an amount of iterative process in [...] Read more.
A star tracker lens works in the environment with the temperatures ranging from −40 °C to 80 °C (a range of 120 °C), which makes athermalization a crucial step in the design. Traditional approaches could spend quite an amount of iterative process in between the optimization for nominal condition and athermalization. It is highly desired that the optimization can start with a thermally robust layout to improve the design efficiency. This study takes the star tracker lens module with seven elements as the base for investigating the possible layout variation on dioptric power distribution and thermo-optic coefficient dn/dT of the material, which are the two major factors of the layout interacting with each other to influence the thermal stability of the overall lens module. All the possible layouts are optimized firstly for the nominal condition at T = 20 °C, and only those meeting the optical performance specifications are selected for thermal performance evaluation. A merit function based on a thin lens model which represents the focal plane drift over a temperature range of 120 °C is then used as the criteria for ranking the layout variations passing the first stage. The layouts at top ranking exhibiting low focal plane drift become potential candidates as the final solution. The proposed methodology provides an efficient approach for designing thermally resilient star tracker optics, especially addressing the harsh thermal conditions encountered in Low Earth Orbit missions. Full article
(This article belongs to the Special Issue Optical Systems and Design)
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22 pages, 4655 KB  
Article
Rural Settlement Mapping and Its Spatiotemporal Dynamics Monitoring in the Yellow River Delta Using Multi-Modal Fusion of Landsat Optical and Sentinel-1 SAR Polarimetric Decomposition Data by Leveraging Deep Learning
by Jiantao Liu, Yan Zhang, Fei Meng, Jianhua Gong, Dong Zhang, Yu Peng and Can Zhang
Remote Sens. 2025, 17(21), 3512; https://doi.org/10.3390/rs17213512 - 22 Oct 2025
Viewed by 313
Abstract
The Yellow River Delta (YRD) is a vital agricultural and ecologically fragile zone in China. Understanding the spatial pattern and evolutionary characteristics of Rural Settlements Area (RSA) in this region is crucial for both ecological protection and sustainable development. This study focuses on [...] Read more.
The Yellow River Delta (YRD) is a vital agricultural and ecologically fragile zone in China. Understanding the spatial pattern and evolutionary characteristics of Rural Settlements Area (RSA) in this region is crucial for both ecological protection and sustainable development. This study focuses on Dongying, a key YRD city, and compares four advanced deep learning models—U-Net, DeepLabv3+, TransUNet, and TransDeepLab—using fused Sentinel-1 radar and Landsat optical imagery to identify the optimal method for RSA mapping. Results show that TransUNet, integrating polarization and optical features, achieves the highest accuracy, with Precision, Recall, F1 score, and mIoU of 89.27%, 80.70%, 84.77%, and 85.39%, respectively. Accordingly, TransUNet was applied for the spatiotemporal extraction of RSA in 2002, 2008, 2015, 2019, and 2023. The results indicate that medium-sized settlements dominate, showing a “dense in the west/south, sparse in the east/north” pattern with clustered distribution. Settlement patches are generally regular but grow more complex over time while maintaining strong connectivity. In summary, the proposed method offers technical support for RSA identification in the YRD, and the extracted multi-temporal settlement data can serve as a valuable reference for optimizing settlement layout in the region. Full article
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17 pages, 2060 KB  
Article
Continuous Optical Biosensing of IL-8 Cancer Biomarker Using a Multimodal Platform
by A. L. Hernandez, K. Mandal, B. Santamaria, S. Quintero, M. R. Dokmeci, V. Jucaud and M. Holgado
Bioengineering 2025, 12(10), 1115; https://doi.org/10.3390/bioengineering12101115 - 17 Oct 2025
Viewed by 613
Abstract
In this work, we used a label-free biosensor that provides optical readouts to perform continuous detection of human interleukin 8 (IL-8), which is especially overexpressed in certain cancers and, thus, could be an effective biomarker for cancer prognosis estimation and therapy evaluation. For [...] Read more.
In this work, we used a label-free biosensor that provides optical readouts to perform continuous detection of human interleukin 8 (IL-8), which is especially overexpressed in certain cancers and, thus, could be an effective biomarker for cancer prognosis estimation and therapy evaluation. For this purpose, we engineered a compact, portable, and easy-to-assemble biosensing module device. It combines a fluidic chip for reagent flow, a biosensing chip for signal transduction, and an optical readout head based on fiber optics in a single module. The biosensing chip is based on independent arrays of resonant nanopillar transducer (RNP) networks. We integrated the biosensing chip with the RNPs facing down in a simple and rapidly fabricated polydimethyl siloxane (PDMS) microfluidic chip, with inlet and outlet channels for the sample flowing through the RNPs. The RNPs were vertically oriented from the backside through an optical fiber mounted on a holder head fabricated ad hoc on polytetrafluoroethylene (PTFE). The optical fiber was connected to a visible spectrometer for optical response analysis and consecutive biomolecule detection. We obtained a sensogram showing anti-IL-8 immobilization and the specific recognition of IL-8. This unique portable and easy-to-handle module can be used for biomolecule detection within minutes and is particularly suitable for in-line sensing of physiological and biomimetic organ-on-a-chip systems. Cancer biomarkers’ continuous monitoring arises as an efficient and non-invasive alternative to classical tools (imaging, immunohistology) for determining clinical prognostic factors and therapeutic responses to anticancer drugs. In addition, the multiplexed layout of the optical transducers and the simplicity of the monolithic sensing module yield potential high-throughput screening of a combination of different biomarkers, which, together with other medical exams (such as imaging and/or patient history), could become a cutting-edge technology for further and more accurate diagnosis and prediction of cancer and similar diseases. Full article
(This article belongs to the Section Biosignal Processing)
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45 pages, 2671 KB  
Article
Mathematical Model for Economic Optimization of Tower-Type Solar Thermal Power Generation Systems via Coupled Monte Carlo Ray-Tracing and Multi-Mechanism Heat Loss Equations
by Juanen Li, Yao Chen and Huanhao Su
Mathematics 2025, 13(19), 3132; https://doi.org/10.3390/math13193132 - 30 Sep 2025
Viewed by 357
Abstract
With the global energy transition and decarbonization goals, tower-type solar thermal power generation is increasingly important for dispatchable clean energy due to its high efficiency, thermal storage capacity, and regulation performance. However, current research focuses on ideal conditions, ignoring real geographical constraints on [...] Read more.
With the global energy transition and decarbonization goals, tower-type solar thermal power generation is increasingly important for dispatchable clean energy due to its high efficiency, thermal storage capacity, and regulation performance. However, current research focuses on ideal conditions, ignoring real geographical constraints on heliostat layout and environmental impacts on receiver performance. More practical scene modeling and performance evaluation methods are urgently needed. To address these issues, we propose a heliostat field simulation algorithm based on heat loss mechanisms and real site characteristics. The algorithm includes optical performance evaluation (cosine efficiency, shading, truncation, atmospheric transmittance) and heat loss mechanisms (radiation, convection, conduction) for realistic net heat output estimation. Experiments revealed the following: (1) higher central towers improve optical efficiency by increasing solar elevation angle; (2) radiation losses dominate at high power and tower height, while convection losses dominate at low power and tower height. Using the Economic-Integrated Score (EIS) optimization algorithm, we achieved optimal tower and receiver configuration with 40.22% average improvement over other configurations (maximum 3.9× improvement). This provides a scientific design basis for improving tower-type solar thermal systems’ adaptability and economy in different geographical environments. Full article
(This article belongs to the Special Issue Advances and Applications in Intelligent Computing)
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17 pages, 8378 KB  
Article
Integrated Optomechanical Analysis of the Impact of an Ø 800 mm Primary Mirror on the Imaging Quality of an Optical System
by Ruijing Liu, Yi Zhang, Yu Liu and Qingya Li
Sensors 2025, 25(18), 5759; https://doi.org/10.3390/s25185759 - 16 Sep 2025
Viewed by 520
Abstract
With the rapid advancements that are occurring in space technology, there is an increasing demand for improvements in the image quality of high-resolution space optical telescopes. The optical performance of the primary mirror plays a crucial role in determining the overall image quality [...] Read more.
With the rapid advancements that are occurring in space technology, there is an increasing demand for improvements in the image quality of high-resolution space optical telescopes. The optical performance of the primary mirror plays a crucial role in determining the overall image quality of these optical systems. In this study, we analyze the rigid-body displacement and mirror deformation of an optical mirror in terms of the entire satellite hierarchy, utilizing integrated optomechanical analysis methods to assess the modulation transfer function (MTF) of the optical system. Additionally, we simulate MTF degradation under gravitational effects. Further, we conduct an experimental optical detection test on the main mirror assembly to validate our simulation analysis. This study provides valuable insights into structuring whole-satellite layouts and designing mirror support structures. Full article
(This article belongs to the Section Optical Sensors)
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16 pages, 3496 KB  
Article
A CMOS Bandgap-Based VCSEL Driver for Temperature-Robust Optical Applications
by Juntong Li and Sung-Min Park
Photonics 2025, 12(9), 902; https://doi.org/10.3390/photonics12090902 - 9 Sep 2025
Viewed by 684
Abstract
This paper presents a temperature-robust current-mode vertical-cavity surface-emitting laser (VCSEL) driver (or CMVD) fabricated in a standard 180 nm CMOS process. While prior art relies on conventional current-mirror circuits for bias generation, the proposed CMVD integrates a bandgap-based biasing architecture to achieve high [...] Read more.
This paper presents a temperature-robust current-mode vertical-cavity surface-emitting laser (VCSEL) driver (or CMVD) fabricated in a standard 180 nm CMOS process. While prior art relies on conventional current-mirror circuits for bias generation, the proposed CMVD integrates a bandgap-based biasing architecture to achieve high thermal stability and process insensitivity. The bandgap core yields a temperature-compensated reference voltage and is then converted into both stable bias and modulation currents through a cascode current-mirror and switching logic. Post-layout simulations of the proposed CMVD show that the reference voltage variation remains within ±2%, and the bias current deviation is under 10% across full PVT conditions. Furthermore, the output current variation is limited to 7.4%, even under the worst-case corners (SS, 125 °C), demonstrating the reliability of the proposed architecture. The implemented chip occupies a compact core area of 0.0623 mm2 and consumes an average power of 18 mW from a single 3.3 V supply, suggesting that the bandgap-stabilized CMVD is a promising candidate for compact, power-sensitive optical systems requiring reliable and temperature-stable performance. Full article
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13 pages, 9516 KB  
Article
Rapid Full-Field Surface Topography Measurement of Large-Scale Wafers Using Interferometric Imaging
by Ruifang Ye, Jiarui Zeng, Heyan Zhang, Yujie Su and Huihui Li
Photonics 2025, 12(9), 835; https://doi.org/10.3390/photonics12090835 - 22 Aug 2025
Viewed by 902
Abstract
Rapid full-field surface topography measurement for large-scale wafers remains challenging due to limitations in speed, system complexity, and scalability. This work presents a interferometric system based on thin-film interference for high-precision wafer profiling. An optical flat serves as the reference surface, forming a [...] Read more.
Rapid full-field surface topography measurement for large-scale wafers remains challenging due to limitations in speed, system complexity, and scalability. This work presents a interferometric system based on thin-film interference for high-precision wafer profiling. An optical flat serves as the reference surface, forming a parallel air-gap structure with the wafer under test. A large-aperture collimated beam is introduced via an off-axis parabolic mirror to generate high-contrast interference fringes across the entire field of view. Once the wafer is fully illuminated, topographic information is directly extracted from the fringe pattern. Comparative measurements with a commercial interferometer show relative deviations below 3% in bow and warp, confirming the system’s accuracy and stability. With its simple optical layout, low cost, and robust performance, the proposed method shows strong potential for industrial applications in wafer inspection and online surface monitoring. Full article
(This article belongs to the Special Issue Advances in Interferometric Optics and Applications)
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22 pages, 2382 KB  
Article
Spatiotemporal Anomaly Detection in Distributed Acoustic Sensing Using a GraphDiffusion Model
by Seunghun Jeong, Huioon Kim, Young Ho Kim, Chang-Soo Park, Hyoyoung Jung and Hong Kook Kim
Sensors 2025, 25(16), 5157; https://doi.org/10.3390/s25165157 - 19 Aug 2025
Viewed by 1130
Abstract
Distributed acoustic sensing (DAS), which can provide dense spatial and temporal measurements using optical fibers, is quickly becoming critical for large-scale infrastructure monitoring. However, anomaly detection in DAS data is still challenging owing to the spatial correlations between sensing channels and nonlinear temporal [...] Read more.
Distributed acoustic sensing (DAS), which can provide dense spatial and temporal measurements using optical fibers, is quickly becoming critical for large-scale infrastructure monitoring. However, anomaly detection in DAS data is still challenging owing to the spatial correlations between sensing channels and nonlinear temporal dynamics. Recent approaches often disregard the explicit sensor layout and instead handle DAS data as two-dimensional images or flattened sequences, eliminating the spatial topology. This work proposes GraphDiffusion, a novel generative anomaly-detection model that combines a conditional denoising diffusion probabilistic model (DDPM) and a graph neural network (GNN) to overcome these limitations. By treating each channel as a graph node and building edges based on Euclidean proximity, the GNN explicitly models the spatial arrangement of DAS sensors, allowing the network to capture local interchannel dependencies. The conditional DDPM uses iterative denoising to model the temporal dynamics of standard signals, enabling the system to detect deviations without the need for anomalies. The performance evaluations based on real-world DAS datasets reveal that GraphDiffusion achieves 98.2% and 98.0% based on the area under the curve (AUC) of the F1-score at K different levels (F1K-AUC), an AUC of receiver operating characteristic (ROC) at K different levels (ROCK-AUC), outperforming other comparative models. Full article
(This article belongs to the Section Intelligent Sensors)
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32 pages, 3669 KB  
Article
A Quantifiable Comprehensive Evaluation Method Combining Optical Motion Capture and Simulation—Assessing the Layout Design of Special Vehicle Cabins
by Sen Gu, Tianyi Zhang, Hanyu Wang and Qingbin Wang
Sensors 2025, 25(16), 5053; https://doi.org/10.3390/s25165053 - 14 Aug 2025
Viewed by 658
Abstract
Ergonomic assessments for specialized vehicle cockpits are often costly, subjective, or fragmented. To address these issues, this study proposes and validates a quantifiable comprehensive evaluation method combining optical motion capture with simulation. The methodology uses motion capture to acquire accurate, dynamic operator posture [...] Read more.
Ergonomic assessments for specialized vehicle cockpits are often costly, subjective, or fragmented. To address these issues, this study proposes and validates a quantifiable comprehensive evaluation method combining optical motion capture with simulation. The methodology uses motion capture to acquire accurate, dynamic operator posture data, which drives a digital human model in a virtual environment. A novel assessment framework then integrates the results from six ergonomic tools into a single, comprehensive score using a multi-criteria weighting model, overcoming the ‘information silo’ problem of traditional software. In a case study optimizing a flatbed transporter cockpit, the method guided a redesign that significantly improved the overall ergonomic score from 0.422 to 0.277. The effectiveness of the optimization was validated by a 40% increase in key control accessibility and a significant reduction in electromyography (EMG) signals in the neck, shoulder, and lumbar regions. This study provides an innovative, data-driven methodology for the objective design and evaluation of customized human–machine systems, demonstrating its utility in reducing physical strain and enhancing operator comfort, with broad applicability to other complex industrial environments. Full article
(This article belongs to the Section Optical Sensors)
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20 pages, 983 KB  
Article
A Library-Oriented Large Language Model Approach to Cross-Lingual and Cross-Modal Document Retrieval
by Wang Yi, Xiahuan Cai, Hongtao Ma, Zhengjie Fu and Yan Zhan
Electronics 2025, 14(15), 3145; https://doi.org/10.3390/electronics14153145 - 7 Aug 2025
Viewed by 1188
Abstract
Under the growing demand for processing multimodal and cross-lingual information, traditional retrieval systems have encountered substantial limitations when handling heterogeneous inputs such as images, textual layouts, and multilingual language expressions. To address these challenges, a unified retrieval framework has been proposed, which integrates [...] Read more.
Under the growing demand for processing multimodal and cross-lingual information, traditional retrieval systems have encountered substantial limitations when handling heterogeneous inputs such as images, textual layouts, and multilingual language expressions. To address these challenges, a unified retrieval framework has been proposed, which integrates visual features from images, layout-aware optical character recognition (OCR) text, and bilingual semantic representations in Chinese and English. This framework aims to construct a shared semantic embedding space that mitigates semantic discrepancies across modalities and resolves inconsistencies in cross-lingual mappings. The architecture incorporates three main components: a visual encoder, a structure-aware OCR module, and a multilingual Transformer. Furthermore, a joint contrastive learning loss has been introduced to enhance alignment across both modalities and languages. The proposed method has been evaluated on three core tasks: a single-modality retrieval task from image → OCR, a cross-lingual retrieval task between Chinese and English, and a joint multimodal retrieval task involving image, OCR, and language inputs. Experimental results demonstrate that, in the joint multimodal setting, the proposed model achieved a Precision@10 of 0.693, Recall@10 of 0.684, nDCG@10 of 0.672, and F1@10 of 0.685, substantially outperforming established baselines such as CLIP, LayoutLMv3, and UNITER. Ablation studies revealed that removing either the structure-aware OCR module or the cross-lingual alignment mechanism resulted in a decrease in mean reciprocal rank (MRR) to 0.561, thereby confirming the critical role of these components in reinforcing semantic consistency across modalities. This study highlights the powerful potential of large language models in multimodal semantic fusion and retrieval tasks, providing robust solutions for large-scale semantic understanding and application scenarios in multilingual and multimodal contexts. Full article
(This article belongs to the Section Artificial Intelligence)
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16 pages, 1651 KB  
Article
Modular Pipeline for Text Recognition in Early Printed Books Using Kraken and ByT5
by Yahya Momtaz, Lorenza Laccetti and Guido Russo
Electronics 2025, 14(15), 3083; https://doi.org/10.3390/electronics14153083 - 1 Aug 2025
Cited by 1 | Viewed by 2672
Abstract
Early printed books, particularly incunabula, are invaluable archives of the beginnings of modern educational systems. However, their complex layouts, antique typefaces, and page degradation caused by bleed-through and ink fading pose significant challenges for automatic transcription. In this work, we present a modular [...] Read more.
Early printed books, particularly incunabula, are invaluable archives of the beginnings of modern educational systems. However, their complex layouts, antique typefaces, and page degradation caused by bleed-through and ink fading pose significant challenges for automatic transcription. In this work, we present a modular pipeline that addresses these problems by combining modern layout analysis and language modeling techniques. The pipeline begins with historical layout-aware text segmentation using Kraken, a neural network-based tool tailored for early typographic structures. Initial optical character recognition (OCR) is then performed with Kraken’s recognition engine, followed by post-correction using a fine-tuned ByT5 transformer model trained on manually aligned line-level data. By learning to map noisy OCR outputs to verified transcriptions, the model substantially improves recognition quality. The pipeline also integrates a preprocessing stage based on our previous work on bleed-through removal using robust statistical filters, including non-local means, Gaussian mixtures, biweight estimation, and Gaussian blur. This step enhances the legibility of degraded pages prior to OCR. The entire solution is open, modular, and scalable, supporting long-term preservation and improved accessibility of cultural heritage materials. Experimental results on 15th-century incunabula show a reduction in the Character Error Rate (CER) from around 38% to around 15% and an increase in the Bilingual Evaluation Understudy (BLEU) score from 22 to 44, confirming the effectiveness of our approach. This work demonstrates the potential of integrating transformer-based correction with layout-aware segmentation to enhance OCR accuracy in digital humanities applications. Full article
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26 pages, 3625 KB  
Article
Deep-CNN-Based Layout-to-SEM Image Reconstruction with Conformal Uncertainty Calibration for Nanoimprint Lithography in Semiconductor Manufacturing
by Jean Chien and Eric Lee
Electronics 2025, 14(15), 2973; https://doi.org/10.3390/electronics14152973 - 25 Jul 2025
Cited by 1 | Viewed by 921
Abstract
Nanoimprint lithography (NIL) has emerged as a promising sub-10 nm patterning at low cost; yet, robust process control remains difficult because of time-consuming physics-based simulators and labeled SEM data scarcity. We propose a data-efficient, two-stage deep-learning framework here that directly reconstructs post-imprint SEM [...] Read more.
Nanoimprint lithography (NIL) has emerged as a promising sub-10 nm patterning at low cost; yet, robust process control remains difficult because of time-consuming physics-based simulators and labeled SEM data scarcity. We propose a data-efficient, two-stage deep-learning framework here that directly reconstructs post-imprint SEM images from binary design layouts and delivers calibrated pixel-by-pixel uncertainty simultaneously. First, a shallow U-Net is trained on conformalized quantile regression (CQR) to output 90% prediction intervals with statistically guaranteed coverage. Moreover, per-level errors on a small calibration dataset are designed to drive an outlier-weighted and encoder-frozen transfer fine-tuning phase that refines only the decoder, with its capacity explicitly focused on regions of spatial uncertainty. On independent test layouts, our proposed fine-tuned model significantly reduces the mean absolute error (MAE) from 0.0365 to 0.0255 and raises the coverage from 0.904 to 0.926, while cutting the labeled data and GPU time by 80% and 72%, respectively. The resultant uncertainty maps highlight spatial regions associated with error hotspots and support defect-aware optical proximity correction (OPC) with fewer guard-band iterations. Extending the current perspective beyond OPC, the innovatively model-agnostic and modular design of the pipeline here allows flexible integration into other critical stages of the semiconductor manufacturing workflow, such as imprinting, etching, and inspection. In these stages, such predictions are critical for achieving higher precision, efficiency, and overall process robustness in semiconductor manufacturing, which is the ultimate motivation of this study. Full article
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18 pages, 4910 KB  
Article
Experiment and Numerical Study on the Flexural Behavior of a 30 m Pre-Tensioned Concrete T-Beam with Polygonal Tendons
by Bo Yang, Chunlei Zhang, Hai Yan, Ding-Hao Yu, Yaohui Xue, Gang Li, Mingguang Wei, Jinglin Tao and Huiteng Pei
Buildings 2025, 15(15), 2595; https://doi.org/10.3390/buildings15152595 - 22 Jul 2025
Viewed by 711
Abstract
As a novel prefabricated structural element, the pre-tensioned, prestressed concrete T-beam with polygonal tendons layout demonstrates advantages including reduced prestress loss, streamlined construction procedures, and stable manufacturing quality, showing promising applications in medium-span bridge engineering. This paper conducted a full-scale experiment and numerical [...] Read more.
As a novel prefabricated structural element, the pre-tensioned, prestressed concrete T-beam with polygonal tendons layout demonstrates advantages including reduced prestress loss, streamlined construction procedures, and stable manufacturing quality, showing promising applications in medium-span bridge engineering. This paper conducted a full-scale experiment and numerical simulation research on a 30 m pre-tensioned, prestressed concrete T-beam with polygonal tendons practically used in engineering. The full-scale experiment applied symmetrical four-point bending to create a pure bending region and used embedded strain gauges, surface sensors, and optical 3D motion capture systems to monitor the beam’s internal strain, surface strain distribution, and three-dimensional displacement patterns during loading. The experiment observed that the test beam underwent elastic, crack development, and failure phases. The design’s service-load bending moment induced a deflection of 18.67 mm (below the 47.13 mm limit). Visible cracking initiated under a bending moment of 7916.85 kN·m, which exceeded the theoretical cracking moment of 5928.81 kN·m calculated from the design parameters. Upon yielding of the bottom steel reinforcement, the maximum of the crack width reached 1.00 mm, the deflection in mid-span measured 148.61 mm, and the residual deflection after unloading was 10.68 mm. These results confirmed that the beam satisfied design code requirements for serviceability stiffness and crack control, exhibiting favorable elastic recovery characteristics. Numerical simulations using ABAQUS further verified the structural performance of the T-beam. The finite element model accurately captured the beam’s mechanical response and verified its satisfactory ductility, highlighting the applicability of this beam type in bridge engineering. Full article
(This article belongs to the Special Issue Structural Vibration Analysis and Control in Civil Engineering)
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