Search Results (83)

Hydrodynamic slamming loads during water landing are one of the main concerns for the structural design and wave resistance performance of large amphibious aircraft. However, current existing sensors are not used for full-scale hydrodynamic load flight tests on complex models due to their large size, fragility, intrusiveness, limited range, frequency response limitations, accuracy issues, and low sampling frequency. Fibre-optic sensors’ small size, immunity to electromagnetic interference, and reduced susceptibility to environmental disturbances have led to their progressive development in maritime and aeronautic fields. This research proposes a novel hydrodynamic profile encapsulation method using ultra-thin surface-mounted micro-electromechanical system (MEMS) fibre-optic Fabry–Pérot pressure sensors (total thickness of 1 mm). The proposed sensor exhibits an exceptional linear response and low-temperature sensitivity in hydrostatic calibration tests and shows superior response and detection accuracy in water-entry tests of wedge-shaped bodies. This work exhibits significant potential for the in situ monitoring of hydrodynamic loads during water landing, contributing to the research of large amphibious aircraft. Furthermore, this research demonstrates, for the first time, the proposed surface-mounted pressure sensor in conjunction with a high-speed acquisition system for the in situ monitoring of hydrodynamic pressure on the hull of a large amphibious prototype. Following flight tests, the sensors remained intact throughout multiple high-speed hydrodynamic taxiing events and 12 full water landings, successfully acquiring the complete dataset. The flight test results show that this proposed pressure sensor exhibits superior robustness in extreme environments compared to traditional invasive electrical sensors and can be used for full-scale hydrodynamic load flight tests. Full article

Micro-electro-mechanical system (MEMS) electromagnetic actuators have rapidly evolved into critical components of various microscale applications, offering significant advantages including precision, controllability, high force density, and rapid responsiveness. Recent advancements in actuator design, fabrication methodologies, smart control integration, and emerging application domains have significantly broadened their capabilities and practical applications. This comprehensive review systematically analyzes the recent developments in MEMS electromagnetic actuators, highlighting core operating principles such as Lorentz force and magnetic attraction/repulsion mechanisms and examining state-of-the-art fabrication technologies, such as advanced microfabrication techniques, additive manufacturing, and innovative material applications. Additionally, we provide an in-depth discussion on recent enhancements in actuator performance through smart and adaptive integration strategies, focusing on improved reliability, accuracy, and dynamic responsiveness. Emerging application fields, particularly micro-optical systems, microrobotics, precision micromanipulation, and microfluidic components, are extensively explored, demonstrating how recent innovations have significantly impacted these sectors. Finally, critical challenges, including miniaturization constraints, integration complexities, power efficiency, and reliability issues, are identified, alongside a prospective outlook outlining promising future research directions. This review aims to serve as an authoritative resource, fostering further innovation and technological advancement in MEMS actuators and related interdisciplinary fields. Full article

We propose a micro-electromechanical system (MEMS)-integrated Fabry–Pérot (F–P) microcavity designed for a tunable single-photon source based on a single semiconductor quantum dot (QD). Through theoretical simulations, our design achieved a Purcell factor of 23, a photon extraction efficiency exceeding 88%, and an optical cavity mode tuning range of more than 30 nm. Experimentally, we fabricated initial device prototypes using a micro-transfer printing process and demonstrated a tuning range exceeding 15 nm. The device exhibits high mechanical stability, full reversibility, and minimal hysteresis, ensuring reliable operation over multiple tuning cycles. Our findings highlight the potential of MEMS-integrated F–P microcavities for scalable, tunable single-photon sources. Furthermore, reaching a strong coupling regime could enable efficient single-photon routing, opening new possibilities for integrated quantum photonic circuits. Full article

This study investigates the mechanical and optical characteristics of silicon nitride thin films deposited with PECVD at 80 °C for tunable silicon-rich SiN_x-SiO_y-based MEMS optical cavities. Varying the deposition parameters using SiH₄ and N₂ as precursor gases for silicon-rich SiN_x thin films allows us to tune the refractive index to a value as high as 2.40 ± 0.013 at an extinction coefficient of only 0.008, an extremely low surface roughness of only 0.26 nm, and a compressive stress of about 150 MPa. We deposited 6.5-layer pairs of silicon-rich SiN_x/SiO_y-distributed Bragg reflector (DBR) micro-electro-mechanical system (MEMS) mirror that covers the whole 1300 and 1550 nm range. Cavity architectures of 6.5 top and 6 bottom layer-pairs were fabricated in the clean room providing a variety of cavity lengths between 0.615 µm and 2.85 µm. These lengths were then simulated in order to estimate the Young’s Modulus of silicon-rich SiN_x, obtaining values from 56 to 92 GPa. One of the designs was characterised electro-thermally providing a tuning range of at least 86.7 nm centred at 1585 nm. The tunable filters are well suitable for implementation as tuning element in lasers for optical coherence tomography. Full article

This study addresses the need for a mechanical property characterization of films during Micro-Electro-Mechanical System (MEMS) processing by proposing a novel in situ on-wafer tensile strength testing method for film materials. This method integrates the film specimen with a bulk silicon test structure during fabrication, allowing for tensile strength measurements with a resolution of 0.05 MPa using only a probe and optical microscope. Utilizing this method, we successfully performed in situ on-wafer tensile strength tests on Al films of various sizes, demonstrating the impact of the process on film mechanical properties. The results validate the potential of this structure for characterizing material mechanical properties and monitoring process quality in mass production. Full article

Inertial navigation systems (INSs) provide autonomous position estimation capabilities independent of global navigation satellite systems (GNSSs). However, the high cost of traditional sensors, such as fiber-optic gyroscopes (FOGs), limits their widespread adoption. In contrast, micro-electromechanical system (MEMS)-based inertial measurement units (IMUs) offer a low-cost alternative; however, their lower accuracy and sensor bias issues, particularly in maritime environments, remain considerable obstacles. This study proposes an improved method for bias estimation by comparing the estimated values from a trajectory generator (TG)-based acceleration and angular-velocity estimation system with actual measurements. Additionally, for X- and Y-axis accelerations, we introduce a method that leverages the correlation between altitude differences derived from an INS/GNSS/gyrocompass (IGG) and those obtained during the TG estimation process to estimate the bias. Simulation datasets from experimental voyages validate the proposed method by evaluating the mean, median, normalized cross-correlation, least squares, and fast Fourier transform (FFT). The Butterworth filter achieved the smallest angular-velocity bias estimation error. For X- and Y-axis acceleration bias, altitude-based estimation achieved differences of 1.2 × 10⁻² m/s² and 1.0 × 10⁻⁴ m/s², respectively, by comparing the input bias using 30 min data. These methods enhance the positioning and attitude estimation accuracy of low-cost IMUs, providing a cost-effective maritime navigation solution. Full article

This article presents advancements in using Micro-Electro-Mechanical Systemsbased (MEMS-based) devices for measuring the calorific value and hydrogen content in hydrogenated gaseous fuels, such as natural gas. As hydrogen emerges as a pivotal clean energy source, blending it with natural gas becomes essential for a sustainable energy transition. However, precise monitoring of hydrogen concentrations in gas distribution networks is crucial to ensure safety and reliability. Traditional methods like gas chromatography and mass spectrometry, while accurate, are often too complex and costly for real-time applications. In contrast, MEMS technology offers innovative, cost-effective alternatives that exhibit miniaturization, ease of installation, and rapid measurement capabilities. The article discusses the development of a novel MEMS thermal conductivity detector (TCD) and a new ionization spectrometer with an optical readout, both of which enable accurate assessment of hydrogen content and calorific values in natural gas. The TCD has demonstrated a 3% uncertainty in calorific value measurement and an impressive accuracy in determining hydrogen concentrations ranging from 2% to 25%. The research detailed in this article highlights the feasibility of integrating these MEMS devices into existing infrastructure, paving the way for efficient hydrogen monitoring in real-world applications. Moreover, preliminary findings reveal the potential for robust online process control, positioning MEMS technology as a transformative solution in the future of energy measurement. The ongoing innovations could significantly impact residential heating, industrial processes, and broader energy management strategies, facilitating a sustainable transition to hydrogen-enriched energy systems. Full article

An innovative glass substrate surface technology including integrated micro-electro-mechanical systems (MEMS) is presented as an advanced light modulation, heat control, and energy management system. This smart technology is based on millions of metallic micromirrors per square meter fabricated on the glass surface, which are arranged in arrays and electrostatically actuated. The smart window application exploits an elaborate MEMS glass technology for active daylight steering and energy management in buildings, enabling energy saving, CO₂ emission reduction, a positive health impact, and improved well-being. When light interacts with a glass substrate that has regular, repetitive patterning at the microscopic scale on its surface, these microstructures can cause the diffraction of the transmitted light, resulting in the potential deterioration of the view quality through the smart glass. A reduction in optical artifacts for improved clear view is presented by using irregular geometric micromirror apertures. Several non-periodic, irregular micromirror aperture designs are compared with corresponding periodic regular designs. For each considered aperture geometry, the irregular array reveals a reduction in optical artifacts and, therefore, by far a clearer view than the corresponding regular array. A systematic and comprehensive study was conducted through design, simulation, technological fabrication, experimental characterization, and analysis. Full article

Adaptive optics (AO) systems are capable of correcting wavefront aberrations caused by transmission media or defects in optical systems. The deformable mirror (DM) plays a crucial role as a component of the adaptive optics system. In this study, our focus is on analyzing the ability of a 97-element MEMS (Micro-Electro-Mechanical System) DM to correct blurred images of extended sources affected by atmospheric turbulence. The RUN optimizer is employed as the control method to evaluate the correction capability of the DM through simulations and physical experiments. Simulation results demonstrate that within 100 iterations, both the normalized gray variance and Strehl Ratio can converge, leading to an improvement in image quality by approximately 30%. In physics experiments, we observe an increase in normalized gray variance (NGV) from 0.53 to 0.97 and the natural image quality evaluation (NIQE) from 15.35 to 19.73, representing an overall improvement in image quality of about 28%. These findings can offer theoretical and technical support for applying MEMS DMs in correcting imaging issues related to extended sources degraded by wavefront aberrations. Full article

Uncooled infrared (IR) sensors, including bolometers, thermopiles, and pyroelectrics, have traditionally dominated the market. Nevertheless, a new innovative technology, dubbed the TMOS sensor, has emerged. It is based on CMOS-SOI-MEMS (complementary-metal-oxide-semiconductor silicon-on-insulator micro-electromechanical systems) fabrication. This pioneering technology utilizes a suspended, micro-machined, thermally insulated transistor to directly convert absorbed infrared radiation into an electrical signal. The miniaturization of IR sensors, including the TMOS, is crucial for seamless integration into wearable and mobile technologies. However, this presents a significant challenge: balancing size reduction with sensor sensitivity. Smaller sensor footprints can often lead to decreased signal capture and, consequently, diminished performance. Metamaterial advancements offer a promising solution to this challenge. These engineered materials exhibit unique electromagnetic properties that can potentially boost sensor sensitivity while enabling miniaturization. The strategic integration of metamaterials into sensor design offers a pathway towards compact, high-sensitivity IR systems with diverse applications. This study explores the impact of electro-optical metal-insulator-metal (MIM) metamaterial absorbers on the thermal and electro-optical characteristics of CMOS-SOI-MEMS sensors in the mid-IR region. We target the key thermal properties critical to IR sensor performance: thermal conductance (Gth), thermal capacitance (Cth), and thermal time constant (τth). This study shows how material selection, layer thickness, and metamaterial geometry fill-factor affect the sensor’s thermal performance. An analytical thermal model is employed alongside 3D finite element software for precise numerical simulations. Full article

Autonomous Underwater Vehicles (AUVs) are widely used for hydrological monitoring, underwater exploration, and geological surveys. However, AUVs face limitations in underwater navigation due to the high costs associated with Strapdown Inertial Navigation System (SINS) and Doppler Velocity Log (DVL), hindering the development of low-cost vehicles. Micro Electro Mechanical System Inertial Measurement Units (MEMS IMUs) are widely used in industry due to their low cost and can output acceleration and angular velocity, making them suitable as an Attitude Heading Reference System (AHRS) for low-cost vehicles. However, poorly calibrated MEMS IMUs provide an inaccurate angular velocity, leading to rapid drift in orientation. In underwater environments where AUVs cannot use GPS for position correction, this drift can have severe consequences. To address this issue, this paper proposes Underwater Gyros Denoising Net (UGDN), a method based on dilated convolutions and LSTM that learns and extracts the spatiotemporal features of IMU sequences to dynamically compensate for the gyroscope’s angular velocity measurements, reducing attitude and heading errors. In the experimental section of this paper, we deployed this method on a dataset collected from field trials and achieved significant results. The experimental results show that the accuracy of MEMS IMU data denoised by UGDN approaches that of fiber-optic SINS, and when integrated with DVL, it can serve as a low-cost underwater navigation solution. Full article

The Casimir effect has been exploited in various MEMS (micro-electro-mechanical system) devices, especially to make sensitive force sensors and accelerometers. It has also been used to provide forces for a variety of purposes, for example, for the assembly of considerably small parts. Repulsive forces and torques have been produced using various configurations of media and materials. Just a few electronic devices have been explored that utilize the electrical properties of the Casimir effect. Recently, experimental results were presented that described the operation of an electronic device that employed a Casimir cavity attached to a standard MIM (metal–insulator–metal) structure. The DC (direct current) conductance of the novel MIM device was enhanced by the attached cavity and found to be directly proportional to the capacitance of the attached cavity. The phenomenological model proposed assumed that the cavity reduced the vacuum fluctuations, which resulted in a reduced injection of carriers. The analysis presented here indicates that the optical cavity actually enhances vacuum fluctuations, which would predict a current in the opposite direction from that observed. Further, the vacuum fluctuations near the electrode are shown to be approximately independent of the size of the optical cavity, in disagreement with the experimental data which show a dependence on the size. Thus, the proposed mechanism of operation does not appear correct. A more detailed theoretical analysis of these devices is needed, in particular, one that uses real material parameters and computes the vacuum fluctuations for the entire device. Such an analysis would reveal how these devices operate and might suggest design principles for a new genre of electronic devices that make use of vacuum fluctuations. Full article

Partial discharge is a fault that occurs at the site of insulation defects within a transformer. Dual instances of partial discharge origination discharging simultaneously embody a more intricate form of discharge, where the interaction between the discharge sources leads to more intricate and unpredictable insulation damage. Conventional piezoelectric transducers are magnetically affixed to the exterior metal tank of transformers. The ultrasonic signals emanating from partial discharge undergo deflection and reverberation upon traversing the windings, insulation paperboards, and the outer shell, resulting in signal attenuation and thus making it difficult to detect such faults. Furthermore, it is challenging to distinguish between simultaneous discharges from dual partial discharge sources and continuous discharges from a single source, often leading to missed detection and repairs of fault points, which increase the maintenance difficulty and cost of power equipment. With the advancement of MEMS (Micro-Electro-Mechanical System) technology, fiber-optic ultrasonic sensors have surfaced as an innovative technique for optically detecting partial discharges. These sensors are distinguished by their minute dimensions, heightened sensitivity, and robust immunity to electromagnetic disturbances. and excellent insulation properties, allowing for internal installation within power equipment for partial discharge monitoring. In this study, we developed an EFPI (Extrinsic Fabry Perot Interferometer) optical fiber ultrasonic sensor that can be installed inside transformers. Based on this sensor array, we also created a partial discharge ultrasonic detection system that estimates the directional information of single and dual partial discharge sources using the received signals from the sensor array. By utilizing the DOA (Direction of Arrival) as a feature recognition parameter, our system can effectively detect both simultaneous discharges from dual partial discharge sources and continuous discharges from a single source within transformer oil tanks, meeting practical application requirements. The detection methodology presented in this paper introduces an original strategy and resolution for pinpointing the types of partial discharges occurring under intricate conditions within power apparatus, effectively distinguishing between discharges from single and dual partial discharge sources. Full article

The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole probe with fiber optic sensing. The pressure-sensitive detection unit utilizes silicon-glass anodic bonding to achieve the integrated and batch-producible manufacturing of five pressure-sensitive Fabry–Perot (FP) cavities. The probe structure and parameters of the sensitive unit were optimized based on fluid and mechanical simulations. The non-scanning correlation demodulation technology was applied to extract specific cavity lengths from multiple interference surfaces. The sealing platform was established to analyze the sealing performance of the five-hole probe and the pressure-sensitive detection unit. The testing platform was established to test the pressure response characteristics of the probe. Experimental results indicate that the probe has good sealing performance between different air passages, making it suitable for detecting pressure from multiple directions. The pressure responses are linear within the range of 0–250 kPa, with the average pressure sensitivity of the five sensors ranging from 11.061 to 11.546 nm/kPa. The maximum non-linear error is ≤1.083%. Full article

This study presents a numerical simulation-based investigation of a MEMS (micro-electromechanical systems)technology-based deformable mirror employing a piezoelectric film for fundus examination in adaptive optics. Compared to the classical equal-area electrode arrangement model, we optimize the electrode array for higher-order aberrations. The optimized model centralizes electrodes around the mirror center, which realizes low-voltage driving with high-accuracy correction. The optimized models exhibited commendable correction abilities, achieving a unidirectional displacement of 5.74 μm with a driven voltage of 15 V. The voltage–displacement relationship demonstrated high linearity at 0.99. Furthermore, the deformable mirror’s influence matrix was computed, aligning with the Zernike standard surface shape of the order 1–3. To quantify aberration correction capabilities, fitting residuals for both models were calculated. The results indicate an average removal of 96.8% of aberrations to the human eye. This underscores that the optimized model outperforms the classical model in correcting high-order aberrations. Full article