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Keywords = nano-vacuum electronics

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29 pages, 8732 KiB  
Review
Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices
by Xinghui Li and Jinjun Feng
Micromachines 2024, 15(11), 1357; https://doi.org/10.3390/mi15111357 - 8 Nov 2024
Cited by 3 | Viewed by 2667
Abstract
Advances in manufacturing technology are allowing for the realization of interaction circuit with microstructures. The capability to produce small circuit structures is allowing new opportunities for vacuum electronic devices producing terahertz (THz) frequency radiation, which is impractical with traditional machining technology. This publication [...] Read more.
Advances in manufacturing technology are allowing for the realization of interaction circuit with microstructures. The capability to produce small circuit structures is allowing new opportunities for vacuum electronic devices producing terahertz (THz) frequency radiation, which is impractical with traditional machining technology. This publication reviews recent progress on advanced microfabrication technologies applicable to interaction circuits of THz vacuum electronic devices, including LIGA/UV-LIGA (Ultraviolet Lithographic, Galvonoformung and Abformung), deep reactive ion etching (DRIE), micro/nano computer numerical control (CNC) milling, three-dimension (3D) printing, etc., and describes the current State-of-the-Art of their applications. Full article
(This article belongs to the Special Issue Recent Advances in Terahertz Devices and Applications)
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8 pages, 2607 KiB  
Article
Fabrication of Electrospun Porous TiO2 Dielectric Film in a Ti–TiO2–Si Heterostructure for Metal–Insulator–Semiconductor Capacitors
by Jin-Uk Yoo, Tae-Min Choi and Sung-Gyu Pyo
Micromachines 2024, 15(10), 1231; https://doi.org/10.3390/mi15101231 - 30 Sep 2024
Cited by 1 | Viewed by 1156
Abstract
The development of metal–insulator–semiconductor (MIS) capacitors requires device miniaturization and excellent electrical properties. Traditional SiO2 gate dielectrics have reached their physical limits. In this context, high-k materials such as TiO2 are emerging as promising alternatives to SiO2. However, the [...] Read more.
The development of metal–insulator–semiconductor (MIS) capacitors requires device miniaturization and excellent electrical properties. Traditional SiO2 gate dielectrics have reached their physical limits. In this context, high-k materials such as TiO2 are emerging as promising alternatives to SiO2. However, the deposition of dielectric layers in MIS capacitors typically requires high-vacuum equipment and challenging processing conditions. Therefore, in this study, we present a new method to effectively fabricate a poly(vinylidene fluoride) (PVDF)-based TiO2 dielectric layer via electrospinning. Nano-microscale layers were formed via electrospinning by applying a high voltage to a polymer solution, and electrical properties were analyzed as a function of the TiO2 crystalline phase and residual amount of PVDF at different annealing temperatures. Improved electrical properties were observed with increasing TiO2 anatase content, and the residual amount of PVDF decreased with increasing annealing temperature. The sample annealed at 600 °C showed a lower leakage current than those annealed at 300 and 450 °C, with a leakage current density of 7.5 × 10−13 A/cm2 when Vg = 0 V. Thus, electrospinning-based coating is a cost-effective method to fabricate dielectric thin films. Further studies will show that it is flexible and dielectric tunable, thus contributing to improve the performance of next-generation electronic devices. Full article
(This article belongs to the Special Issue Thin Film Microelectronic Devices and Circuits)
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12 pages, 3963 KiB  
Article
Greatly Enhanced Thermoelectric Performance of Flexible Cu2−xS Composite Film on Nylon by Se Doping
by Xinru Zuo, Xiaowen Han, Zixing Wang, Ying Liu, Jiajia Li, Mingcheng Zhang, Changjun Huang and Kefeng Cai
Nanomaterials 2024, 14(11), 950; https://doi.org/10.3390/nano14110950 - 28 May 2024
Viewed by 1358
Abstract
In this work, flexible Cu2−xS films on nylon membranes are prepared by combining a simple hydrothermal synthesis and vacuum filtration followed by hot pressing. The films consist of Cu2S and Cu1.96S two phases with grain sizes from [...] Read more.
In this work, flexible Cu2−xS films on nylon membranes are prepared by combining a simple hydrothermal synthesis and vacuum filtration followed by hot pressing. The films consist of Cu2S and Cu1.96S two phases with grain sizes from nano to submicron. Doping Se on the S site not only increases the Cu1.96S content in the Cu2−xS to increase carrier concentration but also modifies electronic structure, thereby greatly improves the electrical properties of the Cu2−xS. Specifically, an optimal composite film with a nominal composition of Cu2−xS0.98Se0.02 exhibits a high power factor of ~150.1 μW m−1 K−2 at 300 K, which increases by ~138% compared to that of the pristine Cu2−xS film. Meanwhile, the composite film shows outstanding flexibility (~97.2% of the original electrical conductivity is maintained after 1500 bending cycles with a bending radius of 4 mm). A four-leg flexible thermoelectric (TE) generator assembled with the optimal film generates a maximum power of 329.6 nW (corresponding power density of 1.70 W m−2) at a temperature difference of 31.1 K. This work provides a simple route to the preparation of high TE performance Cu2−xS-based films. Full article
(This article belongs to the Special Issue Study on the Thermoelectric Properties of Nanostructured Materials)
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10 pages, 2281 KiB  
Article
Field-Emission Energy Distribution of Carbon Nanotube Film and Single Tube under High Current
by Lizhou Wang, Yiting Wu, Jun Jiang, Shuai Tang, Yanlin Ke, Yu Zhang and Shaozhi Deng
Nanomaterials 2024, 14(10), 888; https://doi.org/10.3390/nano14100888 - 20 May 2024
Cited by 2 | Viewed by 1591
Abstract
A narrow energy distribution is a prominent characteristic of field-emission cold cathodes. When applied in a vacuum electronic device, the cold cathode is fabricated over a large area and works under a high current and current density. It is interesting to see the [...] Read more.
A narrow energy distribution is a prominent characteristic of field-emission cold cathodes. When applied in a vacuum electronic device, the cold cathode is fabricated over a large area and works under a high current and current density. It is interesting to see the energy distribution of the field emitter under such a working situation. In this work, the energy distribution spectra of a single carbon nanotube (CNT) and a CNT film were investigated across a range of currents, spanning from low to high. A consistent result indicated that, at low current emission, the CNT film (area: 0.585 mm2) exhibited a narrow electron energy distribution as small as 0.5 eV, similar to that of a single CNT, while the energy distribution broadened with increased current and voltage, accompanied by a peak position shift. The influencing factors related to the electric field, Joule heating, Coulomb interaction, and emission site over a large area were discussed to elucidate the underlying mechanism. The results provide guidance for the electron source application of nano-materials in cold cathode devices. Full article
(This article belongs to the Section Nanophotonics Materials and Devices)
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16 pages, 7651 KiB  
Article
The Discharge Behavior and Mechanism of Polyimide Aerogel under Electron Irradiation
by Dandan Ju, You Wu, Hao Wang, Chengyue Sun, Yiyong Wu, Zhengli Cao, Xueqiang Wang, Guiru Jing and Changjiang Li
Polymers 2024, 16(6), 773; https://doi.org/10.3390/polym16060773 - 11 Mar 2024
Cited by 1 | Viewed by 1535
Abstract
The response and mechanism of polyimide aerogel under electron irradiations were investigated. The experimental results indicated that electron irradiation could not damage the skeleton polyimide in the aerogel due to its high stability, but could result in a discharge within. The morphology of [...] Read more.
The response and mechanism of polyimide aerogel under electron irradiations were investigated. The experimental results indicated that electron irradiation could not damage the skeleton polyimide in the aerogel due to its high stability, but could result in a discharge within. The morphology of the discharge shows some dendritic discharge patterns, and the material surrounding the discharge channels was carbonized. The numerical simulation results indicated that the incident electrons, and also large amount induced secondary electrons, would be deposited inhomogeneously within the nano-porous polyimide aerogel. This would result in forming an ultra-high electrical potential of up to about 8.5 × 1010 V/m (which is far higher than the breakdown strength (2 × 108 V/m) of bulk polyimide materials) in a local region. This may be the leading cause of the obvious discharge in the materials. Furthermore, it was found that the actual reason for the discharge is related to the residual gas within the nano-porous structure; namely, the more internal residual gas (as a shorter-time vacuum pumping in the irradiated chamber), the more serious the discharge phenomenon. Correspondingly, the phenomenon may largely consist of both residual-gas discharge and surface flashover due to ultra-high local potentials induced by unevenly deposited charges in the porous aerogel. Full article
(This article belongs to the Section Polymer Physics and Theory)
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11 pages, 3900 KiB  
Article
Physical Trace Gas Identification with the Photo Electron Ionization Spectrometer (PEIS)
by Theodor Doll, Victor M. Fuenzalida, Helmut Schütte, Stefan Gaßmann, Juan J. Velasco-Velez, Robert Köhler, Alex Kontschev, Thomas Haas, Bert Ungethüm, Andreas Walte, Jonas Oberröhrmann, Adrian Onken, Kasimir M. Philipp, Minh-Hai Nguyen, Thomas Lenarz, Achim Walter Hassel and Wolfgang Viöl
Sensors 2024, 24(4), 1256; https://doi.org/10.3390/s24041256 - 16 Feb 2024
Cited by 2 | Viewed by 1625
Abstract
Chemosensor technology for trace gases in the air always aims to identify these compounds and then measure their concentrations. For identification, traceable methods are sparse and relate to large appliances such as mass spectrometers. We present a new method that uses the alternative [...] Read more.
Chemosensor technology for trace gases in the air always aims to identify these compounds and then measure their concentrations. For identification, traceable methods are sparse and relate to large appliances such as mass spectrometers. We present a new method that uses the alternative traceable measurement of the ionization energies of trace gases in a way that can be miniaturized and energetically tuned. We investigate the achievable performance. Since tunable UV sources are not available for photoionization, we take a detour via impact ionization with electrons, which we generate using the photoelectric effect and bring to sharp, defined energies on a nanoscale in the air. Electron impact ionization is thus possible at air pressures of up to 900 hPa. The sensitivity of the process reaches 1 ppm and is equivalent to that of classic PID. With sharpened energy settings, substance identification is currently possible with an accuracy of 30 meV. We can largely explain the experimental observations with the known quantum mechanical models. Full article
(This article belongs to the Section Chemical Sensors)
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12 pages, 4040 KiB  
Article
Effect of Graphene on the Performance of Silicon–Carbon Composite Anode Materials for Lithium-Ion Batteries
by Chengyuan Ni, Chengdong Xia, Wenping Liu, Wei Xu, Zhiqiang Shan, Xiaoxu Lei, Haiqing Qin and Zhendong Tao
Materials 2024, 17(3), 754; https://doi.org/10.3390/ma17030754 - 4 Feb 2024
Cited by 12 | Viewed by 3479
Abstract
(Si/graphite)@C and (Si/graphite/graphene)@C were synthesized by coating asphalt-cracked carbon on the surface of a Si-based precursor by spray drying, followed by heat treatment at 1000 °C under vacuum for 2h. The impact of graphene on the performance of silicon–carbon composite-based anode materials for [...] Read more.
(Si/graphite)@C and (Si/graphite/graphene)@C were synthesized by coating asphalt-cracked carbon on the surface of a Si-based precursor by spray drying, followed by heat treatment at 1000 °C under vacuum for 2h. The impact of graphene on the performance of silicon–carbon composite-based anode materials for lithium-ion batteries (LIBs) was investigated. Transmission electron microscopy (TEM) and selected area electron diffraction (SAED) images of (Si/graphite/graphene)@C showed that the nano-Si and graphene particles were dispersed on the surface of graphite, and thermogravimetric analysis (TGA) curves indicated that the content of silicon in the (Si/graphite/graphene)@C was 18.91%. More bituminous cracking carbon formed on the surface of the (Si/graphite/graphene)@C due to the large specific surface area of graphene. (Si/Graphite/Graphene)@C delivered first discharge and charge capacities of 860.4 and 782.1 mAh/g, respectively, initial coulombic efficiency (ICE) of 90.9%, and capacity retention of 74.5% after 200 cycles. The addition of graphene effectively improved the cycling performance of the Si-based anode materials, which can be attributed to the reduction of electrochemical polarization due to the good structural stability and high conductivity of graphene. Full article
(This article belongs to the Section Electronic Materials)
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10 pages, 3656 KiB  
Article
Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics
by Lu Wang, Zejing Guo, Qing Lan, Wenqing Song, Zhipeng Zhong, Kunlin Yang, Tuoyu Zhao, Hai Huang, Cheng Zhang and Wu Shi
Micromachines 2023, 14(11), 2125; https://doi.org/10.3390/mi14112125 - 19 Nov 2023
Cited by 2 | Viewed by 2802
Abstract
Two-dimensional (2D) materials, characterized by their atomically thin nature and exceptional properties, hold significant promise for future nano-electronic applications. The precise control of carrier density in these 2D materials is essential for enhancing performance and enabling complex device functionalities. In this study, we [...] Read more.
Two-dimensional (2D) materials, characterized by their atomically thin nature and exceptional properties, hold significant promise for future nano-electronic applications. The precise control of carrier density in these 2D materials is essential for enhancing performance and enabling complex device functionalities. In this study, we present an electron-beam (e-beam) doping approach to achieve controllable carrier doping effects in graphene and MoS2 field-effect transistors (FETs) by leveraging charge-trapping oxide dielectrics. By adding an atomic layer deposition (ALD)-grown Al2O3 dielectric layer on top of the SiO2/Si substrate, we demonstrate that controllable and reversible carrier doping effects can be effectively induced in graphene and MoS2 FETs through e-beam doping. This new device configuration establishes an oxide interface that enhances charge-trapping capabilities, enabling the effective induction of electron and hole doping beyond the SiO2 breakdown limit using high-energy e-beam irradiation. Importantly, these high doping effects exhibit non-volatility and robust stability in both vacuum and air environments for graphene FET devices. This methodology enhances carrier modulation capabilities in 2D materials and holds great potential for advancing the development of scalable 2D nano-devices. Full article
(This article belongs to the Special Issue 2D Materials: Devices and Functionalities)
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12 pages, 1683 KiB  
Article
Multiplexing Quadrupole and Ion Trap Operation Modes on a “Brick” Miniature Mass Spectrometer
by Chaohong Feng, Siyu Liu, Ting Jiang and Wei Xu
Molecules 2023, 28(22), 7640; https://doi.org/10.3390/molecules28227640 - 17 Nov 2023
Cited by 1 | Viewed by 2465
Abstract
Although a quadruple mass analyzer and an ion trap mass analyzer have complementary analytical features, they usually have different geometries, operational modes, and electronic control systems. As a continuous effort to extend its coverage, both quadrupole and ion trap operation modes were realized [...] Read more.
Although a quadruple mass analyzer and an ion trap mass analyzer have complementary analytical features, they usually have different geometries, operational modes, and electronic control systems. As a continuous effort to extend its coverage, both quadrupole and ion trap operation modes were realized on a “brick” miniature mass spectrometer with a single mass analyzer. In the quadrupole operation mode, low-mass ions ranging from 31 to 502 Th can be analyzed. On the other hand, the ion trap mode can be utilized to cover ions with higher mass to charge ratios (up to 922 Th), as well as performing tandem mass spectrometry. To realize the multiplexing of both operation modes, a printed circuit board (PCB)-based multi-electrode quadrupole–ion trap mass analyzer was designed and integrated in the system. To cover both volatile and non-volatile molecules, two ionization sources were also implemented, including a nano electrospray ionization source and an in-vacuum plasma ionization source. Performances of the instrument operated in these two modes were characterized, such as mass resolution, sensitivity, and mass range. Results demonstrate that the combination of the quadrupole and ion trap operation modes can provide new capabilities when solving analytical problems. Full article
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12 pages, 4792 KiB  
Article
Largely Enhanced Thermoelectric Power Factor of Flexible Cu2−xS Film by Doping Mn
by Xinru Zuo, Xiaowen Han, Yiming Lu, Ying Liu, Zixing Wang, Jiajia Li and Kefeng Cai
Materials 2023, 16(22), 7159; https://doi.org/10.3390/ma16227159 - 14 Nov 2023
Cited by 5 | Viewed by 1536
Abstract
Copper-sulfide-based materials have attracted noteworthy attention as thermoelectric materials due to rich elemental reserves, non-toxicity, low thermal conductivity, and adjustable electrical properties. However, research on the flexible thermoelectrics of copper sulfide has not yet been reported. In this work, we developed a facile [...] Read more.
Copper-sulfide-based materials have attracted noteworthy attention as thermoelectric materials due to rich elemental reserves, non-toxicity, low thermal conductivity, and adjustable electrical properties. However, research on the flexible thermoelectrics of copper sulfide has not yet been reported. In this work, we developed a facile method to prepare flexible Mn-doped Cu2−xS films on nylon membranes. First, nano to submicron powders with nominal compositions of Cu2−xMnyS (y = 0, 0.01, 0.03, 0.05, 0.07) were synthesized by a hydrothermal method. Then, the powders were vacuum-filtrated on nylon membranes and finally hot-pressed. Phase composition and microstructure analysis revealed that the films contained both Cu2S and Cu1.96S, and the size of the grains was ~20–300 nm. By Mn doping, there was an increase in carrier concentration and mobility, and ultimately, the electrical properties of Cu2−xS were improved. Eventually, the Cu2−xMn0.05S film showed a maximum power factor of 113.3 μW m−1 K−2 and good flexibility at room temperature. Moreover, an assembled four-leg flexible thermoelectric generator produced a maximum power of 249.48 nW (corresponding power density ~1.23 W m−2) at a temperature difference of 30.1 K, and had good potential for powering low-power-consumption wearable electronics. Full article
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13 pages, 39227 KiB  
Article
Impacts of Temperature and Time on Direct Nitridation of Aluminium Powders for Preparation of AlN Reinforcement
by Samuel Rogers, Matthew Dargusch and Damon Kent
Materials 2023, 16(4), 1583; https://doi.org/10.3390/ma16041583 - 14 Feb 2023
Cited by 6 | Viewed by 3857
Abstract
Aluminium nitride (AlN) is an important technical ceramic with outstanding strength and thermal conductivity that has important applications for advanced heat sink materials and as a reinforcement for metal-based composites. In this study, we report a novel, straightforward and low-cost method to prepare [...] Read more.
Aluminium nitride (AlN) is an important technical ceramic with outstanding strength and thermal conductivity that has important applications for advanced heat sink materials and as a reinforcement for metal-based composites. In this study, we report a novel, straightforward and low-cost method to prepare AlN powder using a vacuum tube furnace for the direct nitridation of loose aluminium powder at low temperatures (down to 500 C) under flowing high-purity nitrogen. Small amounts of magnesium powder (1 wt.%), combined with aluminium, promote nitridation. Here, we characterise the effects of time (up to 12 h) and temperature (490 to 560 C) on nitridation with the aim to establish an effective regimen for the controlled synthesis of an aluminium nitride reinforcement powder for the production of metal matrix composites. The extent of nitridation and the morphology of the reaction products were assessed using scanning electron microscopy and X-ray diffraction analyses. AlN was detected for all nitriding temperatures ≥ 500 C, with the highest yields of 80% to 85% obtained at 530 C for times ≥ 1 h. At this temperature, nitridation proceeded rapidly, and there was extensive agglomeration of the reaction products making it difficult to reprocess into powder. At lower temperatures around 510 C, a relatively high proportion of AlN was attained (>73% after 6 h) while retaining excellent friability so that it could be manually reprocessed to powder. The synthesised reinforcement consisted of micro- or nano-crystalline AlN comingled with metallic aluminium. The ratio of AlN and metallic aluminium can be readily controlled by varying the nitriding temperature. This provides a flexible and accessible method for the production of AlN-reinforcement powders suited to the production of metal matrix composites. Full article
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18 pages, 7947 KiB  
Article
Flexible and Robust Triboelectric Nanogenerators with Chemically Prepared Metal Electrodes and a Plastic Contact Interface Based on Low-Cost Pressure-Sensitive Adhesive
by Shuai-Chen Wang, Binbin Zhang, Lijing Kang, Cunman Liang, Dongdong Chen, Guoqiang Liu and Xuyun Guo
Sensors 2023, 23(4), 2021; https://doi.org/10.3390/s23042021 - 10 Feb 2023
Cited by 4 | Viewed by 3827
Abstract
Triboelectric nanogenerators (TENGs) are devices that can harvest energy from mechanical motions; such devices can be used to power wearable sensors and various low-power electronics. To increase the lifetime of the device, scientists mainly use the method of making TENG in a hard [...] Read more.
Triboelectric nanogenerators (TENGs) are devices that can harvest energy from mechanical motions; such devices can be used to power wearable sensors and various low-power electronics. To increase the lifetime of the device, scientists mainly use the method of making TENG in a hard skeleton to simplify the complex possible relative movements between two triboelectric parts. However, the hard skeletons cannot be embedded in soft and lightweight clothing. To make matters worse, the materials used in the garments must be able to withstand high mechanical forces when worn, such as the pressure of more than 100 KPa exerted by body pressure or everyday knocks. Notably, the TENGs are usually made of fragile materials, such as vacuum-evaporated metal electrodes and nano-sized coatings, on the contact interface; these electrodes and coatings often chip or wear off under the action of external loads. In this work, we succeeded in creating a thin, light-weight, but extremely robust garment-integrated triboelectric nanogenerator (G-TENG) that can be embedded in clothing and pass the water wash test. First, we chemically deposited a durable electrode with flexible properties for G-TENG using a novel technique called polymer-assisted metal deposition (PAMD). The as-formed metal electrodes are firmly bonded to the plastic substrate by a sub-10 nm adhesive polymer brush and can withstand a pressure of 22.5 MPa and a tear force of 0.7 MPa. We then removed the traditionally used fragile nanoparticle materials and the non-durable poly-dimethylsiloxane (PDMS) layer at the triboelectric interface, and then used a cost-effective, durable and slightly flowable pressure-sensitive adhesive to form a plastic contact interface. Such a soft plastic interface can ensure full contact of the triboelectric materials, which is excellent in complex environments and ultimately improves the power generation efficiency of the devices. The as-formed low-cost energy harvesting device could become an industry standard for future smart clothing. Full article
(This article belongs to the Special Issue Sensors for Health and Environment Monitoring)
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12 pages, 2655 KiB  
Article
Hybrid Nano Flake-like Vanadium Diselenide Combined on Multi-Walled Carbon Nanotube as a Binder-Free Electrode for Sodium-Ion Batteries
by Youngho Jin, Min Eui Lee, Geongil Kim, Honggyu Seong, Wonbin Nam, Sung Kuk Kim, Joon Ha Moon and Jaewon Choi
Materials 2023, 16(3), 1253; https://doi.org/10.3390/ma16031253 - 1 Feb 2023
Cited by 12 | Viewed by 3550
Abstract
As the market for electric vehicles and portable electronic devices continues to grow rapidly, sodium-ion batteries (SIBs) have emerged as energy storage systems to replace lithium-ion batteries (LIBs). However, sodium-ion is heavier and larger than lithium-ion, resulting in volume expansion and slower ion [...] Read more.
As the market for electric vehicles and portable electronic devices continues to grow rapidly, sodium-ion batteries (SIBs) have emerged as energy storage systems to replace lithium-ion batteries (LIBs). However, sodium-ion is heavier and larger than lithium-ion, resulting in volume expansion and slower ion transfer. It is necessary to find suitable anode materials with high capacity and stability. In addition, wearable electronics are starting to be commercialized, requiring a binder-free electrode used in flexible batteries. In this work, we synthesized nano flake-like VSe2 using organic precursor and combined it with MWCNT as carbonaceous material. VSe2@MWCNT was mixed homogenously using sonication and fabricated film electrodes without a binder and substrate via vacuum filter. The hybrid electrode exhibited high-rate capability and stable cycling performance with a discharge capacity of 469.1 mAhg−1 after 200 cycles. Furthermore, VSe2@MWCNT exhibited coulombic efficiency of ~99.7%, indicating good cycle stability. Additionally, VSe2@MWCNT showed a predominant 85.5% of capacitive contribution at a scan rate of 1 mVs−1 in sodiation/desodiation process. These results showed that VSe2@MWCNT is a suitable anode material for flexible SIBs. Full article
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10 pages, 1952 KiB  
Article
Vertical Nanoscale Vacuum Channel Triodes Based on the Material System of Vacuum Electronics
by Panyang Han, Xinghui Li, Jun Cai and Jinjun Feng
Micromachines 2023, 14(2), 346; https://doi.org/10.3390/mi14020346 - 30 Jan 2023
Cited by 6 | Viewed by 2331
Abstract
Nanoscale vacuum channel triodes realize the vacuum-like transmission of electrons in the atmosphere because the transmission distance is less than the mean free path of electrons in air. This new hybrid device is the deep integration of vacuum electronics technology, micro-nano electronics technology, [...] Read more.
Nanoscale vacuum channel triodes realize the vacuum-like transmission of electrons in the atmosphere because the transmission distance is less than the mean free path of electrons in air. This new hybrid device is the deep integration of vacuum electronics technology, micro-nano electronics technology, and optoelectronic technology. It has the advantages of both vacuum and solid-state devices and is considered to be the next generation of vacuum electronic devices. In this work, vertical nanoscale vacuum channel diodes and triodes with edge emission were fabricated using advanced micro-nano processing technology. The device materials were all based on the vacuum electronics material system. The field emission characteristics of the devices were investigated. The diode continued emitting at a bias voltage from 0 to 50 V without failure, and the current variation under different vacuum degrees was better than 2.1%. The field emission characteristics of the devices were evaluated over a wide pressure range of between 10−7 Pa and 105 Pa, and the results could explain the vacuum-like behavior of the devices when operating in air. The current variation of the triode is better than 6.1% at Vg = 8 V and Va = 10 V. Full article
(This article belongs to the Special Issue On-Chip Electron Emission and Related Devices)
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12 pages, 2733 KiB  
Article
High-Energy Excimer Annealing of Nanodiamond Layers
by Klaudia Hurtuková, Nikola Slepičková Kasálková, Dominik Fajstavr, Ladislav Lapčák, Václav Švorčík and Petr Slepička
Nanomaterials 2023, 13(3), 557; https://doi.org/10.3390/nano13030557 - 30 Jan 2023
Cited by 2 | Viewed by 2118
Abstract
Here, we aimed to achieve exposure of a nanodiamond layer to a high-energy excimer laser. The treatment was realized in high-vacuum conditions. The carbon, in the form of nanodiamonds (NDs), underwent high-temperature changes. The induced changes in carbon form were studied with Raman [...] Read more.
Here, we aimed to achieve exposure of a nanodiamond layer to a high-energy excimer laser. The treatment was realized in high-vacuum conditions. The carbon, in the form of nanodiamonds (NDs), underwent high-temperature changes. The induced changes in carbon form were studied with Raman spectroscopy, X-ray photoelectron spectroscopy, and X-ray diffraction (XRD) and we searched for the Q-carbon phase in the prepared structure. Surface morphology changes were detected by atomic force microscopy (AFM) and scanning electron microscopy (SEM). NDs were exposed to different laser energy values, from 1600 to 3000 mJ cm−2. Using the AFM and SEM methods, we found that the NDs layer was disrupted with increasing beam energy, to create a fibrous structure resembling Q-carbon fibers. Layered micro-/nano-spheres, representing the role of diamonds, were created at the junction of the fibers. A Q-carbon structure (fibers) consisting of 80% sp3 hybridization was prepared by melting and quenching the nanodiamond film. Higher energy values of the laser beam (2000 and 3000 mJ cm−2), in addition to oxygen bonds, also induced carbide bonds characteristic of Q-carbon. Raman spectroscopy confirmed the presence of a diamond (sp3) phase and a low-intensity graphitic (G) peak occurring in the Q-carbon form samples. Full article
(This article belongs to the Special Issue Processing, Surfaces and Interfaces of Nanomaterials)
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