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Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications
- Zhihong Lei,
- Yan Chen,
- Guisheng Xu,
- Jinfeng Liu,
- Maodan Yuan,
- Lvming Zeng,
- Xuanrong Ji and
- Dawei Wu
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)–x%PbTiO3 (PMN–x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized ke...