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Keywords = holographic lithography

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29 pages, 10085 KB  
Article
Wide-Swath High-Resolution Immersed Grating Spectrometer for Greenhouse Gas Monitoring: Optical Design and Fabrication
by Tuotuo Yang, Xinhua Chen, Qiao Pan, Zhicheng Zhao, Quan Liu and Weimin Shen
Sensors 2026, 26(13), 4203; https://doi.org/10.3390/s26134203 - 3 Jul 2026
Viewed by 55
Abstract
Spaceborne spectrometers are key optical payloads for global and regional greenhouse gas (GHGs) monitoring. With the increasing demands for high-precision and high-efficiency monitoring, spectrometers are required to provide a wide swath, high spatial resolution, and high spectral resolution. However, existing spaceborne grating spectrometers [...] Read more.
Spaceborne spectrometers are key optical payloads for global and regional greenhouse gas (GHGs) monitoring. With the increasing demands for high-precision and high-efficiency monitoring, spectrometers are required to provide a wide swath, high spatial resolution, and high spectral resolution. However, existing spaceborne grating spectrometers still face a trade-off between swath width and spatial resolution. To address this issue, this paper presents the optical design and fabrication of an immersed-grating spectrometer for GHG monitoring. The proposed spectrometer achieves a swath width of 100 km and a spatial resolution of 3 km × 3 km while providing high spectral resolution. It operates in four channels centered at 0.76, 1.61, 2.06, and 2.30 μm, covering the O2-A band and the main absorption bands of CO2 and CH4, with corresponding spectral resolutions of 0.04, 0.07, 0.09, and 0.10 nm, respectively. The four channels share a common slit, which reduces system volume and inter-channel spatial registration errors. Immersed gratings are used as the core dispersive elements, enabling high spectral resolution in a compact optical configuration. To correct the smile and anamorphic beam compression induced by high-angular-dispersion immersed gratings, a prism-based simultaneous correction method is proposed. Based on this method, the initial parameters of the dispersion module are determined, and the optical design of the spectrometer is completed. Large-sized immersed gratings with high groove density are precisely fabricated using holographic lithography and ion-beam etching, after which the spectrometer is aligned and tested. The test MTF at the Nyquist frequency of the spatial dimension exceeds 0.72, indicating good imaging quality. The test spectral resolution of the four channels is all better than the design value, and the maximum smile and trapezoidal distortion are both within one pixel. This spectrometer provides an effective technical solution for achieving wide-swath, high-spatial-resolution, and high-spectral-resolution GHG monitoring under constraints imposed by detector size, signal-to-noise ratio, and payload size and mass. Full article
(This article belongs to the Section Optical Sensors)
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20 pages, 19282 KB  
Article
Single-Exosome SERS Detection by Means of a Flexible Metasurface
by Konstantin Mochalov, Denis Korzhov, Milena Shestopalova, Andrey Ivanov, Konstantin Afanasev, Alexander Smyk, Alexander Shurygin and Andrey K. Sarychev
Biosensors 2025, 15(12), 815; https://doi.org/10.3390/bios15120815 - 15 Dec 2025
Cited by 2 | Viewed by 2034
Abstract
Single exosomes are detected via surface-enhanced Raman scattering (SERS) due to electromagnetic field accumulation on a specially designed flexible metasurface. This metasurface is a modulated silver nanofilm deposited on a thin, flexible plastic substrate. An explicit Equation for calculating the local electric field [...] Read more.
Single exosomes are detected via surface-enhanced Raman scattering (SERS) due to electromagnetic field accumulation on a specially designed flexible metasurface. This metasurface is a modulated silver nanofilm deposited on a thin, flexible plastic substrate. An explicit Equation for calculating the local electric field is given. The field reaches extremely high values under plasmon resonance conditions and fills the depressions of the metasurface. The thin, flexible metasurface can be incorporated into automated Lab-On-Chip analytical systems and used for spectroscopic studies of exosomes. We propose a method to distinguish individual exosomes from the HEK293T cell line on the metasurface and then obtain and assign their SERS spectra. An important advantage of the plasmonic metasurface presented in this work is its spatial complementarity to exosomes and other vesicle-like objects. The plasmonic metasurface is fabricated using holographic lithography and further investigated using a correlation approach combining atomic force microscopy, scanning spreading resistance microscopy, and surface-enhanced spectroscopy. Full article
(This article belongs to the Special Issue Raman Scattering-Based Biosensing)
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11 pages, 3448 KB  
Article
Nanoimprinted TiO2 Metasurfaces with Reduced Meta-Atom Aspect Ratio and Enhanced Performance for Holographic Imaging
by Kaiyu Zhang, Yuqi Lin, Yang Qiu, Xingyan Zhao, Shaonan Zheng, Yuan Dong, Qize Zhong and Ting Hu
Materials 2024, 17(10), 2273; https://doi.org/10.3390/ma17102273 - 11 May 2024
Cited by 7 | Viewed by 3330
Abstract
Metasurface holograms, with the capability to manipulate spatial light amplitudes and phases, are considered next-generation solutions for holographic imaging. However, conventional fabrication approaches for meta-atoms are heavily dependent on electron-beam lithography (EBL), a technique known for its expensive and time-consuming nature. In this [...] Read more.
Metasurface holograms, with the capability to manipulate spatial light amplitudes and phases, are considered next-generation solutions for holographic imaging. However, conventional fabrication approaches for meta-atoms are heavily dependent on electron-beam lithography (EBL), a technique known for its expensive and time-consuming nature. In this paper, a polarization-insensitive metasurface hologram is proposed using a cost-effective and rapid nanoimprinting method with titanium dioxide (TiO2) nanoparticle loaded polymer (NLP). Based on a simulation, it has been found that, despite a reduction in the aspect ratio of meta-atoms of nearly 20%, which is beneficial to silicon master etching, NLP filling, and the mold release processes, imaging efficiency can go up to 54% at wavelength of 532 nm. In addition, it demonstrates acceptable imaging quality at wavelengths of 473 and 671 nm. Moreover, the influence of fabrication errors and nanoimprinting material degradation in terms of residual layer thickness, meta-atom loss or fracture, thermal-induced dimensional variation, non-uniform distribution of TiO2 particles, etc., on the performance is investigated. The simulation results indicate that the proposed device exhibits a high tolerance to these defects, proving its applicability and robustness in practice. Full article
(This article belongs to the Special Issue Advances in Metasurface Optics and Devices)
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19 pages, 7129 KB  
Article
Study on Two-Dimensional Exit Pupil Expansion for Diffractive Waveguide Based on Holographic Volume Grating
by Mianhui Weng, Yizhao Wang, Xuechang Ren and Qinghong Lu
Appl. Sci. 2023, 13(21), 11858; https://doi.org/10.3390/app132111858 - 30 Oct 2023
Cited by 7 | Viewed by 6217
Abstract
Diffraction gratings are becoming a preferred option for waveguide head-mounted in–out coupling devices due to their flexible optical properties and small size and light weight. At present, diffraction waveguide coupling devices for AR head-mounted displays (HMD) have difficulties such as a long development [...] Read more.
Diffraction gratings are becoming a preferred option for waveguide head-mounted in–out coupling devices due to their flexible optical properties and small size and light weight. At present, diffraction waveguide coupling devices for AR head-mounted displays (HMD) have difficulties such as a long development cycle and complicated processing. In this paper, we first establish a set of two-dimensional (2D) grating ray tracing models, based on which we determine the initial architecture of the dual-region two-dimensional exit pupil expansion (2D-EPE) AR-HMD holographic waveguide diffraction system. Second, we propose a honeycomb coupled grating array and optimize the optical energy utilization and brightness uniformity of the holographic waveguide and use a custom dynamic linked library (DLL) function to implement the ray tracing of the 2D grating and add a probabilistic splitting function to the DLL, which reduces the single simulation time from 11.853 min to 1.77 min. We also propose a holographic lithography device composed of holographic optical elements (HOEs) and a method for preparing HOEs. Finally, in order to obtain the diffraction efficiency preoptimized by the above DLL for the uniformity of the exit pupil brightness and light energy utilization, we inverse design with the preparation process parameters as the optimization variables and develop the adaptable electromagnetic calculation program Holo-RCWA. Using Holo-RCWA with nondominated sorting genetic algorithm II (NSGA-II), we inverse design to obtain the process parameters satisfying the diffraction efficiency distribution, and the optimization time of the whole system is reduced from 2–3 days to 10 h. This work is of great significance for AR/VR applications. Full article
(This article belongs to the Collection Optical Design and Engineering)
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11 pages, 5817 KB  
Article
Holographic Fabrication of 3D Moiré Photonic Crystals Using Circularly Polarized Laser Beams and a Spatial Light Modulator
by Noah Hurley, Steve Kamau, Jingbiao Cui and Yuankun Lin
Micromachines 2023, 14(6), 1217; https://doi.org/10.3390/mi14061217 - 9 Jun 2023
Cited by 8 | Viewed by 3623
Abstract
A moiré photonic crystal is an optical analog of twisted graphene. A 3D moiré photonic crystal is a new nano-/microstructure that is distinguished from bilayer twisted photonic crystals. Holographic fabrication of a 3D moiré photonic crystal is very difficult due to the coexistence [...] Read more.
A moiré photonic crystal is an optical analog of twisted graphene. A 3D moiré photonic crystal is a new nano-/microstructure that is distinguished from bilayer twisted photonic crystals. Holographic fabrication of a 3D moiré photonic crystal is very difficult due to the coexistence of the bright and dark regions, where the exposure threshold is suitable for one region but not for the other. In this paper, we study the holographic fabrication of 3D moiré photonic crystals using an integrated system of a single reflective optical element (ROE) and a spatial light modulator (SLM) where nine beams (four inner beams + four outer beams + central beam) are overlapped. By modifying the phase and amplitude of the interfering beams, the interference patterns of 3D moiré photonic crystals are systemically simulated and compared with the holographic structures to gain a comprehensive understanding of SLM-based holographic fabrication. We report the holographic fabrication of phase and beam intensity ratio-dependent 3D moiré photonic crystals and their structural characterization. Superlattices modulated in the z-direction of 3D moiré photonic crystals have been discovered. This comprehensive study provides guidance for future pixel-by-pixel phase engineering in SLM for complex holographic structures. Full article
(This article belongs to the Special Issue Photon-Driven Technologies: Exploring the Latest Advancements)
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31 pages, 17999 KB  
Review
The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications
by Ye Wang, Xiuhua Fu, Yongyi Chen, Li Qin, Yongqiang Ning and Lijun Wang
Appl. Sci. 2022, 12(13), 6503; https://doi.org/10.3390/app12136503 - 27 Jun 2022
Cited by 32 | Viewed by 9580
Abstract
The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high [...] Read more.
The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high diffraction efficiency and high laser-induced damage thresholds, such as metal-film and multilayer-dielectric-film gratings. Then, we review the basic principles and most recent stages in the development of manufacturing techniques, such as mechanical scribing, holographic exposure, electron-beam lithography, and nanoimprinting. Full article
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15 pages, 32209 KB  
Article
Nano-Second Laser Interference Photoembossed Microstructures for Enhanced Cell Alignment
by Alba Martínez, Sandra González-Lana, Laura Asín, Jesús M. de la Fuente, Cees W. M. Bastiaansen, Dirk J. Broer and Carlos Sánchez-Somolinos
Polymers 2021, 13(17), 2958; https://doi.org/10.3390/polym13172958 - 31 Aug 2021
Cited by 9 | Viewed by 3017
Abstract
Photoembossing is a powerful photolithographic technique to prepare surface relief structures relying on polymerization-induced diffusion in a solventless development step. Conveniently, surface patterns are formed by two or more interfering laser beams without the need for a lithographic mask. The use of nanosecond [...] Read more.
Photoembossing is a powerful photolithographic technique to prepare surface relief structures relying on polymerization-induced diffusion in a solventless development step. Conveniently, surface patterns are formed by two or more interfering laser beams without the need for a lithographic mask. The use of nanosecond pulsed light-based interference lithography strengthens the pattern resolution through the absence of vibrational line pattern distortions. Typically, a conventional photoembossing protocol consists of an exposure step at room temperature that is followed by a thermal development step at high temperature. In this work, we explore the possibility to perform the pulsed holographic exposure directly at the development temperature. The surface relief structures generated using this modified photoembossing protocol are compared with those generated using the conventional one. Importantly, the enhancement of surface relief height has been observed by exposing the samples directly at the development temperature, reaching approximately double relief heights when compared to samples obtained using the conventional protocol. Advantageously, the light dose needed to reach the optimum height and the amount of photoinitiator can be substantially reduced in this modified protocol, demonstrating it to be a more efficient process for surface relief generation in photopolymers. Kidney epithelial cell alignment studies on substrates with relief-height optimized structures generated using the two described protocols demonstrate improved cell alignment in samples generated with exposure directly at the development temperature, highlighting the relevance of the height enhancement reached by this method. Although cell alignment is well-known to be enhanced by increasing the relief height of the polymeric grating, our work demonstrates nano-second laser interference photoembossing as a powerful tool to easily prepare polymeric gratings with tunable topography in the range of interest for fundamental cell alignment studies. Full article
(This article belongs to the Special Issue State-of-the-Art Polymer Science and Technology in Spain (2020,2021))
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16 pages, 8742 KB  
Review
A Review of Two-Dimensional Liquid Crystal Polarization Gratings
by Kai Zuo, Yue Shi and Dan Luo
Crystals 2021, 11(9), 1015; https://doi.org/10.3390/cryst11091015 - 25 Aug 2021
Cited by 19 | Viewed by 6942
Abstract
In the past two decades, polarization gratings (PGs) have attracted intensive attention due to the high-efficient diffraction and polarization selectivity properties. On one hand, the one-dimensional (1D) PGs have been investigated widely and adapted to various applications. On the other hand, optical signal [...] Read more.
In the past two decades, polarization gratings (PGs) have attracted intensive attention due to the high-efficient diffraction and polarization selectivity properties. On one hand, the one-dimensional (1D) PGs have been investigated widely and adapted to various applications. On the other hand, optical signal manipulation stimulates the development of multibeam optical devices. Therefore, the development of two-dimensional (2D) PGs is in demand. This review summarizes the research progress of 2D PGs. Different designs and fabrication methods are summarized, including assembling two 1D polarization patterns, a 2D holographic lithography by polarization interference and a micro-pixelated electric field stimulated 2D liquid crystal (LC) structure. Both experiments and analyses are included. The design strategy, diffraction property, merits and demerits are discussed and summarized for the different methods. Full article
(This article belongs to the Special Issue Liquid Crystals in China)
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8 pages, 3336 KB  
Article
Low-Threshold Microlasers Based on Holographic Dual-Gratings
by Tianrui Zhai, Liang Han, Xiaojie Ma and Xiaolei Wang
Nanomaterials 2021, 11(6), 1530; https://doi.org/10.3390/nano11061530 - 9 Jun 2021
Cited by 5 | Viewed by 2888
Abstract
Among the efforts to improve the performances of microlasers, optimization of the gain properties and cavity parameters of these lasers has attracted significant attention recently. Distributed feedback lasers, as one of the most promising candidate technologies for electrically pumped microlasers, can be combined [...] Read more.
Among the efforts to improve the performances of microlasers, optimization of the gain properties and cavity parameters of these lasers has attracted significant attention recently. Distributed feedback lasers, as one of the most promising candidate technologies for electrically pumped microlasers, can be combined with dual-gratings. This combination provides additional freedom for the design of the laser cavity. Here, a holographic dual-grating is designed to improve the distributed feedback laser performance. The holographic dual-grating laser consists of a colloidal quantum dot film with two parallel gratings, comprising first-order (210 nm) and second-order (420 nm) gratings that can be fabricated easily using a combination of spin coating and interference lithography. The feedback and the output from the cavity are controlled using the first-order grating and the second-order grating, respectively. Through careful design and analysis of the dual-grating, a balance is achieved between the feedback and the cavity output such that the lasing threshold based on the dual-grating is nearly half the threshold of conventional distributed feedback lasers. Additionally, the holographic dual-grating laser shows a high level of stability because of the high stability of the colloidal quantum dots against photobleaching. Full article
(This article belongs to the Special Issue Scalable Fabrication of Nanostructured Materials and Devices)
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8 pages, 2889 KB  
Letter
Recording of the Multiplexed Bragg Diffraction Gratings for Waveguides Using Phase Mask
by Maria Shishova, Alexander Zherdev, Dmitrii Lushnikov and Sergey Odinokov
Photonics 2020, 7(4), 97; https://doi.org/10.3390/photonics7040097 - 27 Oct 2020
Cited by 8 | Viewed by 3843
Abstract
The paper describes a stable method for multiplexed recording of the Bragg diffraction gratings for waveguides using a phase mask. Diffraction waveguides in this experiment were made of photo-thermo-refractive glass. Two types of the phase mask are considered: surface and volume. Their comparison [...] Read more.
The paper describes a stable method for multiplexed recording of the Bragg diffraction gratings for waveguides using a phase mask. Diffraction waveguides in this experiment were made of photo-thermo-refractive glass. Two types of the phase mask are considered: surface and volume. Their comparison is based on diffraction characteristics of manufactured single and multiplexed Bragg gratings. The experimental results showed the advantage of surface phase mask application. To confirm the efficiency of the proposed method, diffraction waveguides was successfully fabricated and integrated in see-through near-eye display. Full article
(This article belongs to the Section Optoelectronics and Optical Materials)
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13 pages, 2235 KB  
Review
Progress in Phase Calibration for Liquid Crystal Spatial Light Modulators
by Rujia Li and Liangcai Cao
Appl. Sci. 2019, 9(10), 2012; https://doi.org/10.3390/app9102012 - 16 May 2019
Cited by 85 | Viewed by 12916
Abstract
Phase-only Spatial Light Modulator (SLM) is one of the most widely used devices for phase modulation. It has been successfully applied in the field with requirements of precision phase modulation such as holographic display, optical tweezers, lithography, etc. However, due to the limitations [...] Read more.
Phase-only Spatial Light Modulator (SLM) is one of the most widely used devices for phase modulation. It has been successfully applied in the field with requirements of precision phase modulation such as holographic display, optical tweezers, lithography, etc. However, due to the limitations in the manufacturing process, the grayscale-phase response could be different for every single SLM device, even varying on sections of an SLM panel. A diverse array of calibration methods have been proposed and could be sorted into two categories: the interferometric phase calibration methods and the diffractive phase calibration methods. The principles of phase-only SLM are introduced. The main phase calibration methods are discussed and reviewed. The advantages of these methods are analyzed and compared. The potential methods for different applications are suggested. Full article
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15 pages, 6786 KB  
Article
Modified Surface Relief Layer Created by Holographic Lithography: Application to Selective Sodium and Potassium Sensing
by Sabad-E Gul, Luke O’Neill, John Cassidy and Izabela Naydenova
Sensors 2019, 19(5), 1026; https://doi.org/10.3390/s19051026 - 28 Feb 2019
Cited by 6 | Viewed by 4212
Abstract
Point-of-care diagnostics will rely upon the development of low-cost, noncomplex, and easily integrated systems in order to examine biological samples such as blood and urine obtained from the patient. The development of metal ion sensors is a subject of significant relevance for physiological [...] Read more.
Point-of-care diagnostics will rely upon the development of low-cost, noncomplex, and easily integrated systems in order to examine biological samples such as blood and urine obtained from the patient. The development of metal ion sensors is a subject of significant relevance for physiological samples. The level of different blood electrolytes, mainly H+, Na+, K+ and Cl is considerably used to monitor irregular physiologies. The particular challenge in biosensing, and in fact for any other sensor, is signal differentiation between non-specifically bound material and the specific detecting of the target molecule/ion. The biosensors described in this paper are fabricated by a holographic recording of surface relief structures in a photopolymer material. The surface structures are modified by coating with either dibenzo-18-crown-6 (DC) or tetraethyl 4-tert-butylcalix[4]arene (TBC), which are embedded in a polymer matrix. Interrogation of these structures by light allows indirect measurement of the concentration of the analyte. The influence of polymer matrices with different porosities, plasticised polyvinyl chloride (PVC) and a sol-gel matrix, on the performance of the sensors for detection of K+ and Na+ is examined. Here we demonstrate a proof of concept that by using a matrix with higher porosity one can increase the sensitivity of the sensor. The results showed that the DC sensing layer provides a selective response to K+ over Na+ and the TBC modified grating is more responsive to Na+ over K+. The sensor responds to K+ and Na+ within the physiological concentration ranges. Full article
(This article belongs to the Special Issue Nanophotonic Sensors)
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9 pages, 3078 KB  
Article
Refractometric Sensing with Periodic Nano-Indented Arrays: Effect of Structural Dimensions
by Daniel J. Carney, Halldor G. Svavarsson, Hafez Hemmati, Alexander Fannin, Jae W. Yoon and Robert Magnusson
Sensors 2019, 19(4), 897; https://doi.org/10.3390/s19040897 - 21 Feb 2019
Cited by 3 | Viewed by 3646
Abstract
Fabrication and sensor application of a simple plasmonic structure is described in this paper. The sensor element consists of nano-patterned gold film brought about from two-dimensional periodic photoresist templates created by holographic laser interference lithography. Reflectance spectroscopy revealed that the sensor exhibits significant [...] Read more.
Fabrication and sensor application of a simple plasmonic structure is described in this paper. The sensor element consists of nano-patterned gold film brought about from two-dimensional periodic photoresist templates created by holographic laser interference lithography. Reflectance spectroscopy revealed that the sensor exhibits significant refractive index sensitivity. A linear relationship between shifts in plasmonic resonances and changes in the refractive index were demonstrated. The sensor has a bulk sensitivity (SB) of 880 nm/refractive index unit and work under normal incidence conditions. This sensitivity exceeded that of many common types of plasmonic sensors with more intricate structures. A modeled spectral response was used to study the effect of its geometrical dimensions on plasmonic behavior. A qualitative agreement between the experimental spectra and modeled ones was obtained. Full article
(This article belongs to the Section Biosensors)
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10 pages, 2916 KB  
Article
Holographic Fabrication and Optical Property of Graded Photonic Super-Crystals with a Rectangular Unit Super-Cell
by Safaa Hassan, Oliver Sale, David Lowell, Noah Hurley and Yuankun Lin
Photonics 2018, 5(4), 34; https://doi.org/10.3390/photonics5040034 - 11 Oct 2018
Cited by 15 | Viewed by 3931
Abstract
Recently developed graded photonic super-crystals show an enhanced light absorption and light extraction efficiency if they are integrated with a solar cell and an organic light emitting device, respectively. In this paper, we present the holographic fabrication of a graded photonic super-crystal with [...] Read more.
Recently developed graded photonic super-crystals show an enhanced light absorption and light extraction efficiency if they are integrated with a solar cell and an organic light emitting device, respectively. In this paper, we present the holographic fabrication of a graded photonic super-crystal with a rectangular unit super-cell. The spatial light modulator-based pixel-by-pixel phase engineering of the incident laser beam provides a high resolution phase pattern for interference lithography. This also provides a flexible design for the graded photonic super-crystals with a different ratio of length over the width of the rectangular unit super-cell. The light extraction efficiency is simulated for the organic light emitting device, where the cathode is patterned with the graded photonic super-crystal. The high extraction efficiency is maintained for different exposure thresholds during the interference lithography. The desired polarization effects are observed for certain exposure thresholds. The extraction efficiency reaches as high as 75% in the glass substrate. Full article
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12 pages, 3461 KB  
Article
Flexible Holographic Fabrication of 3D Photonic Crystal Templates with Polarization Control through a 3D Printed Reflective Optical Element
by David Lowell, David George, Jeffrey Lutkenhaus, Chris Tian, Murthada Adewole, Usha Philipose, Hualiang Zhang and Yuankun Lin
Micromachines 2016, 7(7), 128; https://doi.org/10.3390/mi7070128 - 21 Jul 2016
Cited by 13 | Viewed by 8860
Abstract
In this paper, we have systematically studied the holographic fabrication of three-dimensional (3D) structures using a single 3D printed reflective optical element (ROE), taking advantage of the ease of design and 3D printing of the ROE. The reflective surface was setup at non-Brewster [...] Read more.
In this paper, we have systematically studied the holographic fabrication of three-dimensional (3D) structures using a single 3D printed reflective optical element (ROE), taking advantage of the ease of design and 3D printing of the ROE. The reflective surface was setup at non-Brewster angles to reflect both s- and p-polarized beams for the interference. The wide selection of reflective surface materials and interference angles allow control of the ratio of s- and p-polarizations, and intensity ratio of side-beam to central beam for interference lithography. Photonic bandgap simulations have also indicated that both s and p-polarized waves are sometimes needed in the reflected side beams for maximum photonic bandgap size and certain filling fractions of dielectric inside the photonic crystals. The flexibility of single ROE and single exposure based holographic fabrication of 3D structures was demonstrated with reflective surfaces of ROEs at non-Brewster angles, highlighting the capability of the ROE technique of producing umbrella configurations of side beams with arbitrary angles and polarizations and paving the way for the rapid throughput of various photonic crystal templates. Full article
(This article belongs to the Special Issue Laser Micromachining and Microfabrication)
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