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Keywords = coplanar electrode

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19 pages, 8736 KiB  
Article
Preparation of Asymmetric Micro-Supercapacitors Based on Laser-Induced Graphene with Regulated Hydrophobicity and Hydrophilicity
by Qing Liu, Wenpeng Wu, Pingping Luo, Hao Yu, Jiaqi Wang, Rui Chen and Yang Zhao
Nanomaterials 2025, 15(8), 584; https://doi.org/10.3390/nano15080584 - 11 Apr 2025
Viewed by 763
Abstract
Asymmetric micro-supercapacitors (AMSCs) with a small size and high energy density can be compatible with portable and wearable electronic devices and are capable of providing stable, long-term power supply, attracting great research interest in recent years. Here, we present a simple and rapid [...] Read more.
Asymmetric micro-supercapacitors (AMSCs) with a small size and high energy density can be compatible with portable and wearable electronic devices and are capable of providing stable, long-term power supply, attracting great research interest in recent years. Here, we present a simple and rapid preparation method for AMSCs’ fabrication. By regulating the hydrophilicity and hydrophobicity of coplanar laser-induced graphene (LIG) through the adjustment of the laser parameters, two electrode materials with distinct hydrophilic–hydrophobic properties were selectively deposited by sequentially dip-coating. The LIGs serve as current collectors, with activated carbon and poly (3,4-ethylenedioxythiophene): poly (styrene sulfonate) as active materials. After coating the electrolytes and folding the two electrodes, a high-performance AMSC was achieved. The device exhibits a high areal capacitance of 85.88 mF cm−2 at a current density of 0.4 mA cm−2, along with an impressive energy density of 11.93 µWh cm−2 and a good rate performance. Moreover, it is demonstrated to be highly stable in 500,000 cycles. Two AMSCs in series can supply power to an electronic clock and birthday card. The method of preparing asymmetric electrodes in the same plane greatly facilitates the large-area preparation of AMSCs and series–parallel connection, providing an excellent idea for developing high-performance miniature energy storage devices. Full article
(This article belongs to the Section Energy and Catalysis)
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18 pages, 4311 KiB  
Article
Light-Emitting Diode Array with Optical Linear Detector Enables High-Throughput Differential Single-Cell Dielectrophoretic Analysis
by Emerich Kovacs, Behnam Arzang, Elham Salimi, Michael Butler, Greg E. Bridges and Douglas J. Thomson
Sensors 2024, 24(24), 8071; https://doi.org/10.3390/s24248071 - 18 Dec 2024
Viewed by 838
Abstract
This paper presents a lens-free imaging approach utilizing an array of light sources, capable of measuring the dielectric properties of many particles simultaneously. This method employs coplanar electrodes to induce velocity changes in flowing particles through dielectrophoretic forces, allowing the inference of individual [...] Read more.
This paper presents a lens-free imaging approach utilizing an array of light sources, capable of measuring the dielectric properties of many particles simultaneously. This method employs coplanar electrodes to induce velocity changes in flowing particles through dielectrophoretic forces, allowing the inference of individual particle properties from differential velocity changes. Both positive and negative forces are detectable. The light source utilized in this system is composed of LEDs with a wavelength of 470 nm, while detection is performed using a 256-element optical array detector. Measurements with 10 μm polystyrene beads demonstrate this method can resolve changes equivalent to a Clausius–Mossotti factor of 0.18. Simulations in this work, using values from the literature, predict that Clausius–Mossotti factor differences of 0.18 are sufficient to differentiate viable from nonviable cells and cancerous from multidrug-resistant cancerous cells. We demonstrate that for Chinese hamster ovary (CHO) cells, the method can collect a dielectric response spectrum for a large number of cells in several minutes. We demonstrate that for CHO cells, Clausius–Mossotti factor differences of 0.18 can be discriminated. Due to its simple detection apparatus and the utilization of high-throughput, wide, clog-resistant channels, this method holds promise for a wide range of applications. Full article
(This article belongs to the Special Issue Feature Papers in Physical Sensors 2024)
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17 pages, 5301 KiB  
Article
Combined Dielectric-Optical Characterization of Single Cells Using Dielectrophoresis-Imaging Flow Cytometry
by Behnam Arzhang, Justyna Lee, Emerich Kovacs, Michael Butler, Elham Salimi, Douglas J. Thomson and Greg E. Bridges
Biosensors 2024, 14(12), 577; https://doi.org/10.3390/bios14120577 - 27 Nov 2024
Cited by 3 | Viewed by 1692
Abstract
In this paper, we present a microfluidic flow cytometer for simultaneous imaging and dielectric characterization of individual biological cells within a flow. Utilizing a combination of dielectrophoresis (DEP) and high-speed imaging, this system offers a dual-modality approach to analyze both cell morphology and [...] Read more.
In this paper, we present a microfluidic flow cytometer for simultaneous imaging and dielectric characterization of individual biological cells within a flow. Utilizing a combination of dielectrophoresis (DEP) and high-speed imaging, this system offers a dual-modality approach to analyze both cell morphology and dielectric properties, enhancing the ability to analyze, characterize, and discriminate cells in a heterogeneous population. A high-speed camera is used to capture images of and track multiple cells in real-time as they flow through a microfluidic channel. A wide channel is used, enabling analysis of many cells in parallel. A coplanar electrode array perpendicular to cell flow is incorporated at the bottom of the channel to perform dielectrophoresis-based dielectric characterization. A frequency-dependent voltage applied to the array produces a non-uniform electric field, translating cells to higher or lower velocity depending on their dielectric polarizability. In this paper, we demonstrate how cell size, obtained by optical imaging, and DEP response, obtained by particle tracking, can be used to discriminate viable and non-viable Chinese hamster ovary cells in a heterogeneous cell culture. Multiphysics electrostatic-fluid dynamics simulation is used to develop a relationship between cell incoming velocity, differential velocity, size, and the cell’s polarizability, which can subsequently be used to evaluate its physiological state. Measurement of a mixture of polystyrene microspheres is used to evaluate the accuracy of the cytometer. Full article
(This article belongs to the Special Issue Biosensing Applications for Cell Monitoring)
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14 pages, 3412 KiB  
Article
Impedance Characteristics of Microfluidic Channels and Integrated Coplanar Parallel Electrodes as Design Parameters for Whole-Channel Analysis in Organ-on-Chip Micro-Systems
by Crystal E. Rapier, Srikanth Jagadeesan, Gad D. Vatine and Hadar Ben-Yoav
Biosensors 2024, 14(8), 374; https://doi.org/10.3390/bios14080374 - 1 Aug 2024
Cited by 2 | Viewed by 1939
Abstract
Microfluidics have revolutionized cell culture by allowing for precise physical and chemical environmental control. Coupled with electrodes, microfluidic cell culture can be activated or have its changes sensed in real-time. We used our previously developed reliable and stable microfluidic device for cell growth [...] Read more.
Microfluidics have revolutionized cell culture by allowing for precise physical and chemical environmental control. Coupled with electrodes, microfluidic cell culture can be activated or have its changes sensed in real-time. We used our previously developed reliable and stable microfluidic device for cell growth and monitoring to design, fabricate, and characterize a whole-channel impedance-based sensor and used it to systematically assess the electrical and electrochemical influences of microfluidic channel boundaries coupled with varying electrode sizes, distances, coatings, and cell coverage. Our investigation includes both theoretical and experimental approaches to investigate how design parameters and insulating boundary conditions change impedance characteristics. We examined the system with various solutions using a frequency range of 0.5 Hz to 1 MHz and a modulation voltage of 50 mV. The results show that impedance is directly proportional to electrode distance and inversely proportional to electrode coating, area, and channel size. We also demonstrate that electrode spacing is a dominant factor contributing to impedance. In the end, we summarize all the relationships found and comment on the appropriateness of using this system to investigate barrier cells in blood vessel models and organ-on-a-chip devices. This fundamental study can help in the careful design of microfluidic culture constructs and models that require channel geometries and impedance-based biosensing. Full article
(This article belongs to the Special Issue Biosensors for Organ-on-Chip Devices)
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13 pages, 4854 KiB  
Article
A Novel EWOD Platform for Freely Transporting Droplets in Double and Single-Plate Structures
by Yii-Nuoh Chang, Ting-Rui Huang and Da-Jeng Yao
Micromachines 2024, 15(6), 797; https://doi.org/10.3390/mi15060797 - 17 Jun 2024
Viewed by 4450
Abstract
This study developed a novel dielectric wetting microfluidic operation platform combining parallel-plate and coplanar-plate regions with a curved surface structure as the connection structure. With the new electrowetting on dielectric (EWOD) platform, “droplet pull-out” has been successfully achieved and viewed as an essential [...] Read more.
This study developed a novel dielectric wetting microfluidic operation platform combining parallel-plate and coplanar-plate regions with a curved surface structure as the connection structure. With the new electrowetting on dielectric (EWOD) platform, “droplet pull-out” has been successfully achieved and viewed as an essential new operation for microfluidics with the dielectric wetting technique. The EWOD system is divided into a PDMS substrate top plate and an indium tin oxide (ITO) glass substrate as a bottom layer on this chip. In the parallel-plate region, the droplets can be generated and transported through the square parallel electrodes; in the single-plate area, the droplets can be pulled out from the parallel structure, transported and mixed through the common grounded coplanar electrodes. In dielectric wetting performance testing, coplanar electrodes can apply a maximum driving force of 31.22 µN to DI water and 13.38 µN to propylene carbonate (PC). This driving force is sufficient to detach the sample from the top cover and pull the sub-droplet from the parallel plate structure for DI water, PC and polyethylene glycol diacrylate (PEGDA) buffer. The novel EWOD system also possesses the advantage of precise volume control for liquid samples; the volume error of the generated droplet can be controlled within 0.1% to 2%. Full article
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12 pages, 3150 KiB  
Communication
On-Chip Impedance Spectroscopy of Malaria-Infected Red Blood Cells
by Nitipong Panklang, Boonchai Techaumnat, Nutthaphong Tanthanuch, Kesinee Chotivanich, Mati Horprathum and Michihiko Nakano
Sensors 2024, 24(10), 3186; https://doi.org/10.3390/s24103186 - 17 May 2024
Cited by 2 | Viewed by 1854
Abstract
Malaria is a disease that affects millions of people worldwide, particularly in developing countries. The development of accurate and efficient methods for the detection of malaria-infected cells is crucial for effective disease management and control. This paper presents the electrical impedance spectroscopy (EIS) [...] Read more.
Malaria is a disease that affects millions of people worldwide, particularly in developing countries. The development of accurate and efficient methods for the detection of malaria-infected cells is crucial for effective disease management and control. This paper presents the electrical impedance spectroscopy (EIS) of normal and malaria-infected red blood cells. An EIS microfluidic device, comprising a microchannel and a pair of coplanar electrodes, was fabricated for single-cell measurements in a continuous manner. Based on the EIS results, the aim of this work is to discriminate Plasmodium falciparum-infected red blood cells from the normal ones. Different from typical impedance spectroscopy, our measurement was performed for the cells in a low-conductivity medium in a frequency range between 50 kHz and 800 kHz. Numerical simulation was utilized to study the suitability parameters of the microchannel and electrodes for the EIS experiment over the measurement frequencies. The measurement results have shown that by using the low-conductivity medium, we could focus on the change in the conductance caused by the presence of a cell in the sensing electrode gap. The results indicated a distinct frequency spectrum of the conductance between the normal and infected red blood cells, which can be further used for the detection of the disease. Full article
(This article belongs to the Special Issue Electrical Impedance Spectroscopy Technology)
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14 pages, 3924 KiB  
Article
Effects of Annealing Temperature on Bias Temperature Stress Stabilities of Bottom-Gate Coplanar In-Ga-Zn-O Thin-Film Transistors
by Yuyun Chen, Yi Shen, Yuanming Chen, Guodong Xu, Yudong Liu and Rui Huang
Coatings 2024, 14(5), 555; https://doi.org/10.3390/coatings14050555 - 30 Apr 2024
Cited by 1 | Viewed by 1664
Abstract
Defect annihilation of the IGZO/SiO2 layer is of great importance to enhancing the bias stress stabilities of bottom-gate coplanar thin-film transistors (TFTs). The effects of annealing temperatures (Ta) on the structure of the IGZO/SiO2 layer and the stabilities of [...] Read more.
Defect annihilation of the IGZO/SiO2 layer is of great importance to enhancing the bias stress stabilities of bottom-gate coplanar thin-film transistors (TFTs). The effects of annealing temperatures (Ta) on the structure of the IGZO/SiO2 layer and the stabilities of coplanar IGZO TFTs were investigated in this work. An atomic depth profile showed that the IGZO/SiO2 layer included an IGZO layer, an IGZO/SiO2 interfacial mixing layer, and a SiO2 layer. Higher Ta had only one effect on the IGZO layer and SiO2 layer (i.e., strengthening chemical bonds), while it had complex effects on the interfacial mixing layer—including weakening M-O bonds (M: metallic elements in IGZO), strengthening damaged Si-O bonds, and increasing O-related defects (e.g., H2O). At higher Ta, IGZO TFTs exhibited enhanced positive bias temperature stress (PBTS) stabilities but decreased negative bias temperature stress (NBTS) stabilities. The enhanced PBTS stabilities were correlated with decreased electron traps due to the stronger Si-O bonds near the interfacial layer. The decreased NBTS stabilities were related to increased electron de-trapping from donor-like defects (e.g., weak M-O bonds and H2O) in the interfacial layer. Our results suggest that although higher Ta annihilated the structural damage at the interface from ion bombardment, it introduced undesirable defects. Therefore, to comprehensively improve electrical stabilities, controlling defect generation (e.g., by using a mild sputtering condition of source/drain electrodes and oxides) was more important than enhancing defect annihilation (e.g., through increasing Ta). Full article
(This article belongs to the Special Issue Advanced Metal Oxide Films: Materials and Applications)
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18 pages, 6207 KiB  
Article
Seed State-Detection Sensor for a Cotton Precision Dibble
by Ling Ren, Shuang Wang, Bin Hu, Tao Li, Ming Zhao, Yuquan Zhang and Miao Yang
Agriculture 2023, 13(8), 1515; https://doi.org/10.3390/agriculture13081515 - 28 Jul 2023
Cited by 4 | Viewed by 1679
Abstract
In Xinjiang, precision hole-sowing technology is used for cotton cultivation. A disc-type seed disperser has problems with missing seeds and multi-seeding; therefore, an interdigital (multiple pairs of coplanar electrodes crossed) capacitance sensor is designed to determine the seed pick-up status by gathering electrical [...] Read more.
In Xinjiang, precision hole-sowing technology is used for cotton cultivation. A disc-type seed disperser has problems with missing seeds and multi-seeding; therefore, an interdigital (multiple pairs of coplanar electrodes crossed) capacitance sensor is designed to determine the seed pick-up status by gathering electrical capacity information. Firstly, a theoretical derivation is performed for calculating the capacitance of the sensor, and it is concluded that the interdigital spacing, interdigital width, and interdigital logarithm all affect the output capacitance. Then, by analyzing the working process of the dibble, the assemblage position of the sensor and the dimensional constraints were determined. In order to explore the impact of various structural parameters on the sensor’s performance (signal strength and capacitance variation), a Maxwell simulation platform was established, and orthogonal tests were created to optimize the structural parameters. In addition, the STM32 microcontroller is utilized as the core, and it is linked with the PCAP01-AD chip to form a tiny capacitance-detecting circuit. Finally, the capacitance threshold division test determined the capacitance threshold at different seed states. The test results demonstrate that the interdigital capacitive sensor can accurately determine the precision dibble’s seeding status, with detection accuracies of 96.9% for normal seeding, 99.67% for miss-seeding, and 93.77% for multiple seeds. These results can be used as a research reference for capacitive seeding status-detection technology. Full article
(This article belongs to the Section Agricultural Technology)
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13 pages, 6341 KiB  
Article
Design of a Ka-Band Five-Bit MEMS Delay with a Coplanar Waveguide Loaded U-Shaped Slit
by Yongxin Zhan, Yu Chen, Honglei Guo, Qiannan Wu and Mengwei Li
Micromachines 2023, 14(8), 1508; https://doi.org/10.3390/mi14081508 - 27 Jul 2023
Cited by 2 | Viewed by 1755
Abstract
This paper designs a five-bit microelectromechanical system (MEMS) time delay consisting of a single-pole six-throw (SP6T) RF switch and a coplanar waveguide (CPW) microstrip line. The focus is on the switch upper electrode design, power divider design, transmission line corner compensation structure design, [...] Read more.
This paper designs a five-bit microelectromechanical system (MEMS) time delay consisting of a single-pole six-throw (SP6T) RF switch and a coplanar waveguide (CPW) microstrip line. The focus is on the switch upper electrode design, power divider design, transmission line corner compensation structure design, CPW loading U-shaped slit structure design, and system simulation. The switch adopts a triangular upper electrode structure to reduce the cantilever beam equivalent elastic coefficient and the closed contact area to achieve low drive voltage and high isolation. The SP6T RF MEMS switch uses a disc-type power divider to achieve consistent RF performance across the output ports. When designed by loading U-shaped slit on transmission lines and step-compensated tangents at corners, the system loss is reduced, and the delay amount is improved. In addition, the overall size of the device is 2.1 mm × 2.4 mm × 0.5 mm, simulation results show that the device has a delay amount of 0–60 ps in the frequency range of 26.5–40 GHz, the delay accuracy at the center frequency is better than 0.63 ps, the delay error in the whole frequency band is less than 22.2%, the maximum insertion loss is 3.69 dB, and the input–output return rejection is better than 21.54 dB. Full article
(This article belongs to the Special Issue Recent Advances in Electromagnetic Devices)
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13 pages, 1058 KiB  
Article
A Novel Salivary Sensor with Integrated Au Electrodes and Conductivity Meters for Screening of Diabetes
by Chen-Wei Lin, Yuan-Hsiung Tsai, Yun-Shing Peng, Jen-Tsung Yang, Yen-Pei Lu, Mei-Yen Chen and Chun-Wu Tung
Biosensors 2023, 13(7), 702; https://doi.org/10.3390/bios13070702 - 2 Jul 2023
Cited by 4 | Viewed by 3027
Abstract
The rise in diabetes cases is a growing concern due to the aging of populations. This not only places a strain on healthcare systems but also creates serious public health problems. Traditional blood tests are currently used to check blood sugar levels, but [...] Read more.
The rise in diabetes cases is a growing concern due to the aging of populations. This not only places a strain on healthcare systems but also creates serious public health problems. Traditional blood tests are currently used to check blood sugar levels, but they are invasive and can discourage patients from regularly monitoring their levels. We recently developed nano-sensing probes that integrate Au microelectrodes and conductivity meters, requiring only 50 μL of saliva for measurement. The usage of the co-planar design of coating-free Au electrodes makes the measurement more stable, precise, and easier. This study found a positive correlation between the participant’s fasting blood sugar levels and salivary conductivity. We observed a diabetes prevalence of 11.6% among 395 adults under 65 years in this study, using the glycated hemoglobin > 6.5% definition. This study found significantly higher salivary conductivity in the diabetes group, and also a clear trend of increasing diabetes as conductivity levels rose. The prediction model, using salivary conductivity, age, and body mass index, performed well in diagnosing diabetes, with a ROC curve area of 0.75. The study participants were further divided into low and high groups based on salivary conductivity using the Youden index with a cutoff value of 5.987 ms/cm. Individuals with higher salivary conductivity had a 3.82 times greater risk of diabetes than those with lower levels, as determined by the odds ratio calculation. In conclusion, this portable sensing device for salivary conductivity has the potential to be a screening tool for detecting diabetes. Full article
(This article belongs to the Special Issue Biosensing and Diagnosis)
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17 pages, 4610 KiB  
Article
Expansion of the Analytical Modeling of Capacitance for 1-N-1 Multilayered CID Structures with Monotonically Increasing/Decreasing Permittivity
by Anwar Ulla Khan
Sensors 2023, 23(13), 5838; https://doi.org/10.3390/s23135838 - 23 Jun 2023
Cited by 6 | Viewed by 2430
Abstract
Capacitive sensors that utilize the Coplanar Interdigitated (CID) electrode structure are widely employed in various technical and analytical domains, such as healthcare, infectious disease management, pharmaceuticals, metrology, and environmental monitoring. The present exigency for lab-on-a-chip contrivances and the requisite for the miniaturization of [...] Read more.
Capacitive sensors that utilize the Coplanar Interdigitated (CID) electrode structure are widely employed in various technical and analytical domains, such as healthcare, infectious disease management, pharmaceuticals, metrology, and environmental monitoring. The present exigency for lab-on-a-chip contrivances and the requisite for the miniaturization of sensors have led to the widespread adoption of CID sensors featuring multiple dielectric layers (DLs), either in the form of substrates or superstrates. Previously, we derived an analytical model for the capacitance of CID capacitive sensors with four distinct 1-N-1 patterns (namely, 1-1-1, 1-3-1, 1-5-1, and 1-11-1) using partial capacitance (PC) and conformal mapping (CM) techniques. The aforementioned model has been employed in various applications wherein the permittivity of successive layers exhibits a monotonic decrease as one moves away from the electrode plane, resulting in highly satisfactory outcomes. Nevertheless, the PC technique is inadequate for structures with multiple layers where the permittivity exhibits a monotonic increase as the distance from the electrodes increases. Given these circumstances, it is necessary to adapt the initial PC method to incorporate these novel configurations. In this work, we have discussed a new approach, splitting the concept of PC into partial parallel capacitance (PPC) and partial serial capacitance (PSC), where new CM transformations are proposed for the latter case. Thus, the present study proposes a novel methodology to expand upon our prior analytical framework, which aims to incorporate scenarios where the permittivity experiences a reduction across successive layers. The outcomes are juxtaposed with the finite element simulation and analytical findings. Full article
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15 pages, 6092 KiB  
Article
Coplanar Capillary Plasma Electrode Discharge Flat-Panel Lamps Based on Porous Anodic Alumina
by Kun Wang, Shi-Qing Wang, Jian Li, Min Dan and Fan-Ya Jin
Appl. Sci. 2023, 13(6), 3881; https://doi.org/10.3390/app13063881 - 18 Mar 2023
Viewed by 1685
Abstract
A coplanar capillary plasma electrode discharge is a promising source owing to its superior performance. In this study, a coplanar capillary plasma electrode discharge flat-panel plasma lamp fabricated from porous anodic alumina and glass was designed to investigate its properties. Coplanar capillary plasma [...] Read more.
A coplanar capillary plasma electrode discharge is a promising source owing to its superior performance. In this study, a coplanar capillary plasma electrode discharge flat-panel plasma lamp fabricated from porous anodic alumina and glass was designed to investigate its properties. Coplanar capillary plasma electrode discharge flat-panel lamps with porous anodic alumina dielectric layers were fabricated and investigated. Changing of the frequency and voltage of the power supply and altering of the thickness of the dielectric layers and the interval distance of the electrode were carried out to optimize the performance of the lamps by decreasing the spark-ignition voltage and enhancing the luminous efficacy. The luminance can exceed 7200 Cd/m2 and the white light flux efficacy is more than 4.92 lm/W. The discharge process of capillary plasma electrode discharge was modeled and simulated using COMSOL Multiphysics. The electron density and temperature were also analyzed. The results show that small plasma jets were produced at the pores of the porous anodic alumina, which helped stabilize the plasma. The voltage in the gas gap changes sharply with the geometry of the porous anodic alumina dielectric layer, leading to a higher electric field. The spark-ignition voltage decreased. Small plasma jets increase the plasma uniformity. The electron density and electron temperature reach approximately 1.94 × 108 m3 and 3.34 eV, respectively. A high electric field intensity produced at the porous anodic alumina validated the promising potential in related fields. Full article
(This article belongs to the Section Applied Physics General)
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11 pages, 3209 KiB  
Article
Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz
by Yi-Fei Zhang, Min Cui and Dong-Ping Wu
Micromachines 2023, 14(2), 280; https://doi.org/10.3390/mi14020280 - 21 Jan 2023
Cited by 9 | Viewed by 4051
Abstract
The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through [...] Read more.
The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor points. The micromachine characteristics of the filter could be optimized to change the center frequency from 8.5 to 12 GHz by improving the geometrical parameters; other electrical parameters of the filter, such as stopband rejection, insertion loss, and return loss at each center frequency, were simulated and calculated. In order to evaluate the MEMS filter design methodology, a filter working at 10.5 GHz fabricated with an aluminum top electrode was used, and it displayed a low insertion loss of 1.12 dB and a high stopband rejection of 28.3 dB. Compared with the simulation results, these proposed filter showed better electrical performance. Our results demonstrated that the filter with the integrated RF MEMS switch not only provides the benefit of reduced size compared with a traditional filter, but also improves stopband rejection, insertion loss, and return loss. Full article
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10 pages, 1454 KiB  
Article
Wireless Capacitive Liquid-Level Detection Sensor Based on Zero-Power RFID-Sensing Architecture
by Shaheen Ahmad, Ramin Khosravi, Ashwin K. Iyer and Rashid Mirzavand
Sensors 2023, 23(1), 209; https://doi.org/10.3390/s23010209 - 25 Dec 2022
Cited by 7 | Viewed by 3909
Abstract
In this paper, a new method for the wireless detection of liquid level is proposed by integrating a capacitive IDC-sensing element with a passive three-port RFID-sensing architecture. The sensing element transduces changes in the liquid level to corresponding fringe-capacitance variations, which alters the [...] Read more.
In this paper, a new method for the wireless detection of liquid level is proposed by integrating a capacitive IDC-sensing element with a passive three-port RFID-sensing architecture. The sensing element transduces changes in the liquid level to corresponding fringe-capacitance variations, which alters the phase of the RFID backscattered signal. Variation in capacitance also changes the resonance magnitude of the sensing element, which is associated with a high phase transition. This change in the reactive phase is used as a sensing parameter by the RFID architecture for liquid-level detection. Practical measurements were conducted in a real-world scenario by placing the sensor at a distance of approximately 2 m (with a maximum range of about 7 m) from the RFID reader. The results show that the sensor node offers a high sensitivity of 2.15°/mm to the liquid-level variation. Additionally, the sensor can be used within or outside the container for the accurate measurement of conductive- or non-conductive-type liquids due to the use of polyethylene coating on the sensitive element. The proposed sensor increases the reliability of the current level sensors by eliminating the internal power source as well as complex signal-processing circuits, and it offers real-time response, linearity, high sensitivity, and excellent repeatability, which are suitable for widespread deployment of sensor node applications. Full article
(This article belongs to the Special Issue Energy Harvesting in Environmental Wireless Sensor Networks)
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20 pages, 10392 KiB  
Article
Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications
by Jasmina Casals-Terré, Lluís Pradell, Julio César Heredia, Flavio Giacomozzi, Jacopo Iannacci, Adrián Contreras and Miquel Ribó
Sensors 2022, 22(22), 8893; https://doi.org/10.3390/s22228893 - 17 Nov 2022
Cited by 7 | Viewed by 3843
Abstract
In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or three anchoring points, are designed and optimized to minimize membrane deformation due to residual fabrication stresses, thus exhibiting smaller mechanical deformation and a higher [...] Read more.
In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or three anchoring points, are designed and optimized to minimize membrane deformation due to residual fabrication stresses, thus exhibiting smaller mechanical deformation and a higher stiffness with more release force than previously designed single diagonal beam suspensions. The two-anchor DDGs are designed in two different orientations, in-line and 90°-rotated. The membrane may include a window to minimize the coupling to the lower electrode. The devices are integrated in a coplanar-waveguide transmission structure and fabricated using an eight-mask surface-micro-machining process on high-resistivity silicon, with dielectric-free actuation electrodes, and including glass protective caps. The RF-MEMS switch behavior is assessed from measurements of the device S parameters in ON and OFF states. The fabricated devices feature a measured pull-in voltage of 76.5 V/60 V for the windowed/not-windowed two-anchor DDG membranes, and 54 V/49.5 V for the windowed/not-windowed three-anchor DDG membranes, with a good agreement with mechanical 3D simulations. The measured ON-state insertion loss is better than 0.7 dB/0.8 dB and the isolation in the OFF state is better than 40 dB/31 dB up to 20 GHz for the in-line/90°-rotated devices, also in good agreement with 2.5D electromagnetic simulations. Full article
(This article belongs to the Special Issue High-Power and High-Frequency RF MEMS and Their Applications)
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