Search Results (90)

This paper presents a novel framework addressing the fundamental challenge of concurrent real-time audio acquisition and motor control in resource-constrained mobile robotics. The ESP32-based system integrates a digital MEMS microphone with rover mobility through a unified Bluetooth protocol. Key innovations include (1) a dual-thread architecture enabling non-blocking concurrent operation, (2) an adaptive eight-bit compression algorithm optimizing bandwidth while preserving audio quality, and (3) a mathematical model for real-time resource allocation. A comprehensive empirical evaluation demonstrates consistent control latency below 150 ms with 90–95% audio packet delivery rates across varied environments. The framework enables mobile acoustic sensing applications while maintaining responsive motor control, validated through comprehensive testing in 40–85 dB acoustic environments at distances up to 10 m. A performance analysis demonstrates the feasibility of high-fidelity mobile acoustic sensing on embedded platforms, opening new possibilities for environmental monitoring, surveillance, and autonomous acoustic exploration systems. Full article

In recent years, using sound as a source of information in environmental monitoring systems has become increasingly important. Thanks to the development of Internet of Things (IoT) and artificial intelligence (AI) technologies, it has become possible to create distributed, intelligent acoustic systems used in medicine, industry, cities, and the natural environment. The article presents an overview of modern methods of acquiring and analysing sound data, from MEMS sensors and microphones, signal processing, and feature extraction to machine learning algorithms. The analysis of many works shows how diverse the approach to acoustic analysis can be, depending on the purpose, context, and environmental constraints. Technical challenges, privacy issues, and possible directions for further development, such as integration with multimodal monitoring systems or edge processing, are also discussed. The article is cross-sectional and can be a starting point for further research on intelligent acoustic monitoring in systems based on AI and IoT. Full article

Speech recognition in noisy environments has long posed a challenge. Air conduction microphone (ACM), the devices typically used, are susceptible to environmental noise. In this work, a customized bone conduction microphone (BCM) system based on a piezoelectric micromachined ultrasonic transducer is developed to capture speech through real-time bone conduction (BC), while a commercial ACM is integrated for simultaneous capture of speech through air conduction (AC). The system enables simpler and more robust BC speech capture. The BC speech capture achieves a signal-to-noise amplitude ratio over five times greater than that of AC speech capture in an environment with a noise level of 68 dB. Instead of using only AC-captured speech, both BC- and AC-captured speech are input into a speech enhancement module. The noise-insensitive BC-captured speech serves as a speech reference to adapt the SE backbone of AC-captured speech. The two types of speech are fused, and noise suppression is applied to generate enhanced speech. Compared with the original noisy speech, the enhanced speech achieves a character error rate reduction of over 20%, approaching the speech recognition accuracy of clean speech. The results indicate that this speech enhancement method based on the fusion of BC- and AC-captured speech efficiently integrates the features of both types of speech, thereby improving speech recognition accuracy in noisy environments. This work presents an innovative system designed to efficiently capture BC speech and enhance speech recognition in noisy environments. Full article

The development of a universal method for real-time gas leak localisation imaging is crucial for preventing substantial financial losses and hazardous incidents. To achieve this objective, this study integrates array signal processing and electronic techniques to construct an ultrasonic sensor array for gas leak detection and localisation. A digital microelectromechanical system microphone array is used to capture spatial ultrasonic information. By processing the array signals using beamforming algorithms, an acoustic spatial power spectrum is obtained, which facilitates the estimation of the locations of potential gas leak sources. In the pre-processing of beamforming, the Hilbert transform is employed instead of the fast Fourier transform to save computational resources. Subsequently, the spatial power spectrum is fused with visible-light images to generate acoustic localisation images, which enables the visualisation of gas leak sources. Experimental validation demonstrates that the system detects minor and multiple gas leaks in real time, meeting the sensitivity and accuracy requirements of embedded industrial applications. These findings contribute to the development of practical, cost-effective, and scalable gas leak detection systems for industrial and environmental safety applications. Full article

The calibration of Micro-Electro-Mechanical System (MEMS) microphones remains a critical challenge due to their miniaturized geometry and sensitivity to non-uniform acoustic fields. This study presents an advanced calibration methodology that integrates Finite Element Method (FEM) simulations with experimental corrections to improve the accuracy of pressure comparison calibrations using active couplers. A key innovation is the incorporation of asymmetric acoustic field analysis, which systematically quantifies and corrects discrepancies arising from cavity geometry, sensor positioning, and resonance effects peculiar of MEMS microphones. The proposed approach significantly reduces measurement uncertainties, especially in the high-frequency range above 5 kHz, where standard calibration techniques face challenges in taking into account localized pressure variations. Furthermore, the implementation of a measurement set-up, which includes the insert voltage technique, allows for an accurate assessment of the preamplifier gain and minimizes systematic errors. Experimental validation shows that the refined calibration methodology produces highly reliable correction values, ensuring a robust performance over a wide frequency range (20 Hz–20 kHz). These advances establish a rigorous framework for standardizing the calibration of MEMS microphones, strengthening their applicability in acoustic monitoring, sound source localization, and environmental sensing. Full article

With the development of technology, MEMS microphones, which are small-sized and highly uniform, have been applied extensively. To improve their reliability in extreme environment and overcome the constraints of traditional microphones, this article presents a piezoelectric bimorph MEMS microphone using ${\mathrm{Al}}_{0.8}{\mathrm{Sc}}_{0.2}\mathrm{N}$. In the article, the high robustness of piezoelectric microphones and the reasons for choosing ${\mathrm{Al}}_{0.8}{\mathrm{Sc}}_{0.2}\mathrm{N}$ as piezoelectric materials are described. The sensitivity of an ${\mathrm{Al}}_{0.8}{\mathrm{Sc}}_{0.2}\mathrm{N}$-based piezoelectric bimorph compared with the traditional structure are revealed through FEA. Subsequently, a lumped element microphone model is constructed and all noise sources are evaluated comprehensively. The difference in output noise caused by different structures is calculated. The designed piezoelectric microphone, which comprises eight triangular cantilever beams, was fabricated on a chip with an area of 900 $\mu$m × 900 $\mathrm{\mu }$m. The sensitivity of the designed microphone achieves 1.68 mV/Pa, with a noise floor of −110 dBA and SNR of 54.5 dB. The acoustic overload point of the microphone stands at 147 dB SPL, and following the impact test, the survival rate was 100%. Compared to traditional MEMS microphones, the microphone achieves a dynamic range of 107.5 dB. Full article

Background/Objectives: Respiratory diseases are common and result in high mortality, especially in the elderly, with pneumonia and chronic obstructive pulmonary disease (COPD). Auscultation of lung sounds using a stethoscope is a crucial method for diagnosis, but it may require specialized training and the involvement of pulmonologists. This study aims to assist medical professionals who are non-pulmonologist doctors in early screening for pneumonia and COPD by developing a smart stethoscope with cloud server-embedded machine learning to diagnose lung sounds. Methods: The smart stethoscope was developed using a Micro-Electro-Mechanical system (MEMS) microphone to record lung sounds in the mobile application and then send them wirelessly to a cloud server for real-time machine learning classification. Results: The model of the smart stethoscope classifies lung sounds into four categories: normal, pneumonia, COPD, and other respiratory diseases. It achieved an accuracy of 89%, a sensitivity of 89.75%, and a specificity of 95%. In addition, testing with healthy volunteers yielded an accuracy of 80% in distinguishing normal and diseased lungs. Moreover, the performance comparison between the smart stethoscope and two commercial auscultation stethoscopes showed comparable sound quality and loudness results. Conclusions: The smart stethoscope holds great promise for improving healthcare delivery in the post-COVID-19 era, offering the probability of the most likely respiratory conditions for early diagnosis of pneumonia, COPD, and other respiratory diseases. Its user-friendly design and machine learning capabilities provide a valuable resource for non-pulmonologist doctors by delivering timely, evidence-based diagnoses, aiding treatment decisions, and paving the way for more accessible respiratory care. Full article

Different microstructures significantly affect the acoustic performance of MEMS capacitive microphones, particularly in key specifications of interest. This paper presents several microstructures, including rib-reinforced backplates, suspended diaphragms, and outer vent holes. Three MEMS microphone designs were implemented to analyze the impact of these microstructures. Equivalent circuit models corresponding to each design were constructed to simulate specifications such as sensitivity, signal-to-noise ratio (SNR), and low corner frequency (LCF), which were validated through experimental measurements. Finite Element Analysis (FEA) was also employed to calculate the acoustic damping of certain microstructures, the mechanical lumped parameters of the diaphragm, and the pre-deformation of the MEMS structure. A compressed air test (CAT) was conducted to evaluate the mechanical reliability of microphone samples. The results of simulations and measurements indicate that rib-reinforced backplates effectively improve microphone reliability, increasing the pass rate in CAT. Compared to fully clamped diaphragms, suspended diaphragms exhibit higher mechanical compliance, which enhances SNR performance but reduces AOP. Outer vent holes can achieve similar functionality to diaphragm vent holes, but their impact on improving AOP requires further design and testing. Full article

MEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and use certain transduction principles to read out the generated strain, thereby obtaining the targeted acoustic signal’s information, such as its intensity, direction, and distribution. Due to their advantages in miniaturization, low power consumption, high precision, high consistency, high repeatability, high reliability, and ease of integration, MEMS acoustic sensors are widely applied in many areas, such as consumer electronics, industrial perception, military equipment, and health monitoring. Through different sensing mechanisms, they can be used to detect sound energy density, acoustic pressure distribution, and sound wave direction. This article focuses on piezoelectric, piezoresistive, capacitive, and optical MEMS acoustic sensors, showcasing their development in recent years, as well as innovations in their structure, process, and design methods. Then, this review compares the performance of devices with similar working principles. MEMS acoustic sensors have been increasingly widely applied in various fields, including traditional advantage areas such as microphones, stethoscopes, hydrophones, and ultrasound imaging, and cutting-edge fields such as biomedical wearable and implantable devices. Full article

This paper presents a comprehensive review of cardiorespiratory auscultation sensing devices (i.e., stethoscopes), which is useful for understanding the theoretical aspects and practical design notes. In this paper, we first introduce the acoustic properties of the heart and lungs, as well as a brief history of stethoscope evolution. Then, we discuss the basic concept of electret condenser microphones (ECMs) and a stethoscope based on them. Then, we discuss the microelectromechanical systems (MEMSs) technology, particularly focusing on piezoelectric transducer sensors. This paper comprehensively reviews sensing technologies for cardiorespiratory auscultation, emphasizing MEMS-based wearable designs in the past decade. To our knowledge, this is the first paper to summarize ECM and MEMS applications for heart and lung sound analysis. Full article

Currently, the most advanced micromachined microphones on the market are based on a capacitive coupling principle. Capacitive micro-electromechanical-system-based (MEMS) microphones resemble their millimetric counterparts, both in function and in performance. The most advanced MEMS microphones reached a competitive level compared to commonly used measuring microphones in most of the key performance parameters except the acoustic overload point (AOP). In an effort to find a solution for the measurement of high-level acoustic fields, microphones with the piezoelectric coupling principle have been proposed. These novel microphones exploit the piezoelectric effect of a thin layer of aluminum nitride, which is incorporated in their diaphragm structure. In these microphones fabricated with micromachining technology, no fixed electrode is necessary, in contrast to capacitive microphones. This specificity significantly simplifies both the design and the fabrication and opens the door for the improvement of the acoustic overload point, as well as harsh environmental applications. Several variations of piezoelectric structures together with an idea leading to electrically controlled sensitivity of MEMS piezoelectric microphones are discussed in this paper. Full article

Quartz-Enhanced Photoacoustic Spectroscopy (QEPAS) is a technique in which the sound wave is detected by a quartz tuning fork (QTF). It enables particularly high specificity with respect to the excitation frequency and is well known for an extraordinarily sensitive analysis of gaseous samples. We have developed the first photoacoustic (PA) cell for QEPAS on solid samples. Periodic heating of the sample is excited by modulated light from an interband cascade laser (ICL) in the infrared region. The cell represents a half-open cylinder that exhibits an acoustical resonance frequency equal to that of the QTF and, therefore, additionally amplifies the PA signal. The antinode of the sound pressure of the first longitudinal overtone can be accessed by the sound detector. A 3D finite element (FE) simulation confirms the optimal dimensions of the new cylindrical cell with the given QTF resonance frequency. An experimental verification is performed with an ultrasound micro-electromechanical system (MEMS) microphone. The presented frequency-dependent QEPAS measurement exhibits a low noise signal with a high-quality factor. The QEPAS-based investigation of three different solid synthetics resulted in a linearly dependent signal with respect to the absorption. Full article

This work presents a configurable Internet of Things architecture for acoustical sensing and analysis for frequent remote respiratory assessments. The proposed system creates a foundation for enabling real-time therapy and patient feedback adjustment in a telemedicine setting. By allowing continuous remote respiratory monitoring, the system has the potential to give clinicians access to assessments from which they could make decisions about modifying therapy in real-time and communicate changes directly to patients. The system comprises a wearable wireless microphone array interfaced with a programmable microcontroller with embedded signal conditioning. Experiments on the phantom model were conducted to demonstrate the feasibility of reconstructing acoustic lung images for detecting obstructions in the airway and provided controlled validation of noise resilience and imaging capabilities. An optimized denoising technique and design innovations provided 7 dB more SNR and 7% more imaging accuracy for the proposed system, benchmarked against digital stethoscopes. While further clinical studies are warranted, initial results suggest potential benefits over single-point digital stethoscopes for internet-enabled remote lung monitoring needing noise immunity and regional specificity. The flexible architecture aims to bridge critical technical gaps in frequent and connected respiratory function at home or in busy clinical settings challenged by ambient noise interference. Full article

In recent years, micromachined microphones have evolved into versatile transducers for gas-sensing applications in the fields of both direct and indirect photoacoustics. However, their noise properties have not yet caught much attention. In this contribution, we present an analysis of the noise spectrum of a MEMS microphone and show how it may be employed as a gas-sensing tool and to characterize photoacoustic detectors. The results highlight the potential to determine the speed of sound, ambient temperature, and gas composition via Fourier analysis of the microphone noise. Full article

The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental noise, and structural innovation are posed. To collect and summarize the recent advances in this subject, this paper presents a concise review concerning the transduction mechanism, diverse mechanical structure topologies, and effective methods of noise reduction for high-performance MEMS microphones with a dynamic range akin to the audible spectrum, aiming to provide a comprehensive and adequate analysis of this scope. Full article