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Advanced MEMS Resonators and Sensors: Materials, Designs and Applications
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Advanced MEMS Resonators and Sensors: Materials, Designs and Applications

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Intelligent Sensors".

Deadline for manuscript submissions: 31 May 2025 | Viewed by 9141

Special Issue Editor

Dr. Guofeng Chen

E-Mail Website
Guest Editor
Skyworks Solutions Inc., San Jose, CA 94555, USA
Interests: piezoelectric MEMS; RF MEMS; BAW; MEMS microphones

Special Issue Information

Dear Colleagues,

We are seeing a growing interest in the potential of advanced MEMS resonators and sensors in various fields, including healthcare, communication, environmental monitoring, energy harvesting, automotive, industrial, consumer electronics, aerospace, and defense, thanks to their extraordinary sensing capabilities and advantages in terms of size, power, cost, and reliability.

This Special Issue aims to bring together recent progress regarding advanced MEMS resonators and sensors. It will focus on various aspects of MEMS resonators and sensors, including materials, designs, and applications. Topics of interest include, but are not limited to:

  • Novel materials for MEMS resonators and sensors, such as 2D materials, piezoelectric materials, and soft materials;
  • Innovative designs and fabrication techniques for MEMS resonators and sensors, such as machine learning, biomimicry, and digital fabrication;
  • Advanced applications of MEMS resonators and sensors, such as in communication, healthcare, environmental monitoring, and energy harvesting;
  • Theoretical and experimental studies on the dynamics, stability, and reliability of MEMS resonators and sensors;
  • Integration of MEMS resonators and sensors with other micro- and nanosystems, such as electronics, photonics, and fluidics.

Dr. Guofeng Chen
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

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Published Papers (5 papers)

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Research

18 pages, 9907 KiB  
Article
Design, Fabrication and Characterization of Disk Resonator Gyroscope with Vibration and Shock Resistance
by Zhaoyang Zhai, Xiaorui Bie, Bingchen Zhu, Zhenxiang Qi, Bowen Wang, Kunfeng Wang and Xudong Zou
Sensors 2024, 24(23), 7553; https://doi.org/10.3390/s24237553 - 26 Nov 2024
Viewed by 1186
Abstract
This paper presents a comprehensive optimization of an outer frame anchor disk resonator gyroscope (DRG) with enhanced resistance to vibration and shock, achieved by increasing the resonant frequency of the tub and translation modes. Furthermore, the wineglass mode retains a high quality factor, [...] Read more.
This paper presents a comprehensive optimization of an outer frame anchor disk resonator gyroscope (DRG) with enhanced resistance to vibration and shock, achieved by increasing the resonant frequency of the tub and translation modes. Furthermore, the wineglass mode retains a high quality factor, enhancing sensitivity and reducing the angle random walk (ARW). The performance of the proposed DRG is analyzed using dynamic equations, and its structural parameters are optimized through finite element analysis (FEA). The prototype device was fabricated using a two-mask silicon-on-insulator (SOI) process on (100) single-crystal silicon (SCS), which is better suited for complementary metal-oxide–semiconductor (CMOS) integration compared to (111) SCS. Experimental results show an ARW of 0.63°/h and a bias instability (BI) of 7.7°/h, with no significant performance degradation observed under vibrational environments, indicating potential for tactical-grade performance. Full article
(This article belongs to the Special Issue Advanced MEMS Resonators and Sensors: Materials, Designs and Applications)
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14 pages, 1458 KiB  
Article
An Energy Approach to the Modal Identification of a Variable Thickness Quartz Crystal Plate
by Zhe Wang, Bin Huang, Yan Guo, Yanan Jiang and Asif Khan
Sensors 2024, 24(20), 6707; https://doi.org/10.3390/s24206707 - 18 Oct 2024
Cited by 1 | Viewed by 866
Abstract
The primary objective of modal identification for variable thickness quartz plates is to ascertain their dominant operating mode, which is essential for examining the vibration of beveled quartz resonators. These beveled resonators are plate structures with varying thicknesses. While the beveling process mitigates [...] Read more.
The primary objective of modal identification for variable thickness quartz plates is to ascertain their dominant operating mode, which is essential for examining the vibration of beveled quartz resonators. These beveled resonators are plate structures with varying thicknesses. While the beveling process mitigates some spurious modes, it still presents challenges for modal identification. In this work, we introduce a modal identification technique based on the energy method. When a plate with variable thickness is in a resonant state of thickness–shear vibration, the proportions of strain energy and kinetic energy associated with the thickness–shear mode in the total energy reach their peak values. Near this frequency, their proportions are the highest, aiding in identifying the dominant mode. Our research was based on the Mindlin plate theory, and appropriate modal truncation were conducted by retaining three modes for the coupled vibration analysis. The governing equation of the coupled vibration was solved for eigenvalue problem, and the modal energy proportions were calculated based on the determined modal displacement and frequency. Finally, we computed the eigenvalue problems at different beveling time, as well as the modal energies associated with each mode. By calculating the energy proportions, we could clearly identify the dominant mode at each frequency. Our proposed method can effectively assist engineers in identifying vibration modes, facilitating the design and optimization of variable thickness quartz resonators for sensing applications. Full article
(This article belongs to the Special Issue Advanced MEMS Resonators and Sensors: Materials, Designs and Applications)
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18 pages, 6952 KiB  
Article
Optimization Design of CMUT Sensors with Broadband and High Sensitivity Characteristics Based on the Genetic Algorithm
by Sai Zhang, Wentao Lu, Ailing Wang, Huizi He, Renxin Wang and Wendong Zhang
Sensors 2024, 24(10), 3155; https://doi.org/10.3390/s24103155 - 16 May 2024
Viewed by 3568
Abstract
In this study, we propose a method for optimizing the design of CMUT sensors using genetic algorithms. Existing CMUT sensors face frequency response and sensitivity limitations, necessitating optimization to enhance their sensing performance. Traditional optimization methods are often intricate and time-consuming and may [...] Read more.
In this study, we propose a method for optimizing the design of CMUT sensors using genetic algorithms. Existing CMUT sensors face frequency response and sensitivity limitations, necessitating optimization to enhance their sensing performance. Traditional optimization methods are often intricate and time-consuming and may fail to yield the optimal solution. Genetic algorithms, which simulate the biological evolution process, offer advantages in global optimization and efficiency, making them widely utilized in the optimization design of Microelectromechanical Systems (MEMS) devices. Based on the theoretical framework and finite element model of CMUT sensors, we propose a CMUT array element optimization design method based on genetic algorithms. The optimization and validation results demonstrate that we have successfully designed a broadband CMUT array element consisting of four microelements with a 1–2 MHz frequency range. Compared with a randomly arranged array element, the optimized array shows a 63.9% increase in bandwidth and a 7.5% increase in average sensitivity within the passband. Moreover, the sensitivity variance within the passband is reduced by 50.2%. Our proposed method effectively optimizes the design of high sensitivity CMUT sensors with the desired bandwidth, thereby offering significant reference value for the optimization design of CMUT sensors. Full article
(This article belongs to the Special Issue Advanced MEMS Resonators and Sensors: Materials, Designs and Applications)
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17 pages, 11342 KiB  
Article
Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation
by Raju Patel, Manoj Singh Adhikari, Shailendra Kumar Tripathi and Sourabh Sahu
Sensors 2023, 23(21), 8920; https://doi.org/10.3390/s23218920 - 2 Nov 2023
Cited by 5 | Viewed by 1545
Abstract
In this paper, the study is supported by design, FEA simulation, and practical RF measurements on fabricated single-port-cavity-based acoustic resonator for gas sensing applications. In the FEA simulation, frequency domain analysis was performed to enhance the performance of the acoustic resonator. The structural [...] Read more.
In this paper, the study is supported by design, FEA simulation, and practical RF measurements on fabricated single-port-cavity-based acoustic resonator for gas sensing applications. In the FEA simulation, frequency domain analysis was performed to enhance the performance of the acoustic resonator. The structural and surface morphologies of the deposited ZnO as a piezoelectric layer have been studied using XRD and AFM. The XRD pattern of deposited bulk ZnO film indicates the perfect single crystalline nature of the film with dominant phase (002) at 2θ = 34.58°. The AFM micrograph indicates that deposited piezoelectric film has a very smooth surface and small grain size. In the fabrication process, use of bulk micro machined oxide (SiO2) for the production of a thin membrane as a support layer is adopted. A vector network analyzer (Model MS2028C, Anritsu) was used to measure the radio frequency response of the resonators from 1 GHz to 2.5 GHz. As a result, we have successfully fabricated an acoustic resonator operating at 1.84 GHz with a quality factor Q of 214 and an effective electromechanical coupling coefficient of 10.57%. Full article
(This article belongs to the Special Issue Advanced MEMS Resonators and Sensors: Materials, Designs and Applications)
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17 pages, 5615 KiB  
Article
MEMS-Switched Triangular and U-Shaped Band-Stop Resonators for K-Band Operation
by Romolo Marcelli, Giovanni Maria Sardi, Emanuela Proietti, Giovanni Capoccia, Jacopo Iannacci, Girolamo Tagliapietra and Flavio Giacomozzi
Sensors 2023, 23(19), 8339; https://doi.org/10.3390/s23198339 - 9 Oct 2023
Cited by 3 | Viewed by 1277
Abstract
Triangular resonators re-shaped into Sierpinski geometry and U-shaped resonators were designed, linking them with single-pole-double-through (SPDT) RF MEMS switches to provide frequency tuning for potential applications in the K-Band. Prototypes of band-stop narrowband filters working around 20 GHz and 26 GHz, interesting for [...] Read more.
Triangular resonators re-shaped into Sierpinski geometry and U-shaped resonators were designed, linking them with single-pole-double-through (SPDT) RF MEMS switches to provide frequency tuning for potential applications in the K-Band. Prototypes of band-stop narrowband filters working around 20 GHz and 26 GHz, interesting for RADAR and satellite communications, were studied in a coplanar waveguide (CPW) configuration, and the tuning was obtained by switching between two paths of the devices loaded with different resonators. As a result, dual-band operation or fine-tuning could be obtained depending on the choice of the resonator, acting as a building block. The studied filters belong to the more general group of devices inspired by a metamaterial design. Full article
(This article belongs to the Special Issue Advanced MEMS Resonators and Sensors: Materials, Designs and Applications)
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