Laser Micro/Nano-Fabrication: Innovations and Applications

A special issue of Photonics (ISSN 2304-6732). This special issue belongs to the section "Lasers, Light Sources and Sensors".

Deadline for manuscript submissions: 20 February 2026 | Viewed by 8

Special Issue Editors

Center for Advanced Laser Technology, Hebei University of Technology, Tianjin 300401, China
Interests: laser micro/nano-fabrication; femtosecond laser micromachining; machine learning; laser shock peening

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Guest Editor
Department of Physics, The University of Auckland, 23 Symonds Street, Auckland 1010, New Zealand
Interests: laser micro/nano-fabrication; mode-locking; ion beam source; surface enhanced Raman scattering

Special Issue Information

Dear Colleagues,

Laser micro/nano-fabrication plays a crucial role in biomedicine, microelectronics, aerospace and other fields. Due to their extremely high processing precision and flexibility, lasers enable the manufacture of arbitrarily well-designed structures or patterns at the micro-nano scale, which is not feasible with conventional processing techniques. These micro/nano structures, with their distinctive characteristics, are widely applied in domains such as superhydrophobicity, micro-robots, directed transport, lubrication, and more. In recent years, the development of advanced laser sources, e.g., femtosecond lasers and attosecond lasers, has provided opportunities for the development of laser-based micro/nano fabrication. Additionally, numerous scholars have endeavored to reveal the mechanisms implicated in micro/nano fabrication and optimize fabrication processes, which has also resulted in the development of various novel manufacturing strategies.

In this Special Issue, we aim to highlight recent advances in laser micro/nano-fabrication in order to expand the boundaries of basic research and industrial applications, including laser source, fabrication strategy, process control, physical mechanisms, micro/nano feature characterization and real-world applications. We welcome original research articles, comprehensive reviews, and case studies from researchers, academicians, and industry experts.

The scope of this Special Issue includes, but is not limited to, the following topics:

  • Advanced laser sources or equipment (especially ultrafast lasers);
  • Laser micro/nano-fabrication for microelectronics and integrated circuits;
  • Laser micro/nano-fabrication for biomedicine;
  • Laser micro/nano-fabrication for aeronautics and astronautics;
  • Machine learning and AI methods in laser micro/nano-fabrication;
  • Coupling micro/nano-fabrication using laser and other methods.

Dr. Zhen Zhang
Prof. Dr. Neil Broderick
Guest Editors

Manuscript Submission Information

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Keywords

  • lasers
  • micro/nano-fabrication
  • process strategy
  • micro/nanostructure characterization
  • fabrication mechanism
  • coupling fabrication
  • machine learning

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Published Papers

This special issue is now open for submission.
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