Investigation of Thin Films Using UV-X-Ray Reflectometry

A special issue of Applied Sciences (ISSN 2076-3417). This special issue belongs to the section "Materials Science and Engineering".

Deadline for manuscript submissions: closed (10 December 2021) | Viewed by 2111

Special Issue Editor


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Guest Editor
IOM-Istituto Officina dei Materiali, Consiglio Nazionale delle Ricerche, Basovizza, 34149 Trieste, Italy
Interests: UV-soft X optics; diffraction gratings; synchrotron radiation; polarimetry; surface spectroscopy; spectroscopy instrumentation

Special Issue Information

Dear Colleagues,

UV-X-Ray reflectometry is a powerful tool for the structural characterization of thin films and layered systems. Often coupled with other techniques such as spectroscopic ellipsometry, profilometry, X-ray diffraction, atomic force microscopy (AFM) or X-ray photoelectron spectroscopy (XPS), this technique can be very useful for the determination of the thickness, density, and roughness parameters of layered systems. Two are the most important peculiarities: it is not destructive and can also be applied to insulating materials. In particular, in proximity to the absorption edges, reflectance measurements can give important informations on the physical and chemical state of films and relative interfaces. Important applications are for instance organic and magnetic films. Polarized light reflectivity can be used to follow the growth and to characterize ultrathin organic layers at surfaces and to determine the molecular arrangement and electronic structure of strongly oriented organic ultrathin films. Additionally, X-ray magnetic reflectivity in resonant conditions is a very powerful probe of magnetic films, allowing to extract the interfacial magnetization profiles with nanometer resolution. With the help of an adequate modelization of the system, reflectometry represents an important tool for depth profiling or quality control of thin single or layered systems. In this Special Issue, we explore recent progress and new directions in the use of UV-X-Ray reflectometry for the study of thin films and buried interfaces.

Dr. Angelo Giglia
Guest Editor

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Keywords

  • thin films
  • UV-X-Ray Reflectometry
  • buried interfaces
  • depth profiling
  • organic films
  • magnetic films

Published Papers (1 paper)

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Research

7 pages, 781 KiB  
Article
Periodic Multilayer for X-ray Spectroscopy in the Li K Range
by Vladimir Polkonikov, Nikolai Chkhalo, Roman Pleshkov, Angelo Giglia, Nicolas Rividi, Emmanuelle Brackx, Karine Le Guen, Iyas Ismail and Philippe Jonnard
Appl. Sci. 2021, 11(14), 6385; https://doi.org/10.3390/app11146385 - 10 Jul 2021
Cited by 7 | Viewed by 1513
Abstract
X-ray spectroscopy of lithium is very difficult, even impossible, with wavelength dispersive spectrometers commonly deployed on scanning electron microscopes or electron microprobe analyzers. This is due to the absence of crystals and lack of efficient periodic multilayer for this spectral range, around 50 [...] Read more.
X-ray spectroscopy of lithium is very difficult, even impossible, with wavelength dispersive spectrometers commonly deployed on scanning electron microscopes or electron microprobe analyzers. This is due to the absence of crystals and lack of efficient periodic multilayer for this spectral range, around 50 eV. To address this issue, we propose using a Be/Si/Al multilayer having a period of about 29 nm. The multilayer was deposited by magnetron sputtering and its reflectivity measured as a function of the glancing angle in the spectral range of the Li K emission and as a function of the incident energy up to ~200 eV. This characterization demonstrates that the designed multilayer is suitable to efficiently perform spectroscopy in the range of the Li K emission in terms of reflectance (0.32 at 51.5 eV), bandwidth (around 3.5 eV) and rejection of high order diffracted radiation. Full article
(This article belongs to the Special Issue Investigation of Thin Films Using UV-X-Ray Reflectometry)
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